SEM H
Image | Vendor | Model | Year | kV | Gun | Resolution (nm) | Features | Manual | Schem | SW | Notes |
---|---|---|---|---|---|---|---|---|---|---|---|
Hitachi | ? | 1954 | 300 | [1960s] | |||||||
Hitachi | H-1250 | 1976 | 1250 | 0.204 | Successor to HU-3000 [1970s] | ||||||
Hitachi | H-1300S | 1982 | 1300 | " based on ion radiation" [1980s] | |||||||
Hitachi | HFS-2 | 1972 | FE | 3 | "first SEM to use a field emission gun as an electron source" [1970s] | ||||||
Hitachi | HSM-2A | 1971 | 40 | 15 | EDS, WDS | [1970s] | |||||
Hitachi | HU-500 | 1964 | 500 | [1960s] | |||||||
Hitachi | HU-650 | 1968 | 650 | [1960s] | |||||||
Hitachi | HU-1000 | 1969 | 1000 | [1960s] | |||||||
Hitachi | HU-3000 | 1970 | 3000 | 0.46 | "accelerating voltage was the highest ever for an electron microscope" [1970s] | ||||||
Hitachi | S-450 | 1977 | "samples up to 4 inches" [1970s] | ||||||||
Hitachi | S-500 | 1975 | "two 8 inch CRT displays, and featured automatic recording of image data (including magnification, acceleration voltage, and film number) directly on the micrograph" [1970s] ] | ||||||||
Hitachi | S-510 | EDX | ref | ||||||||
Hitachi | S-520 | ||||||||||
Hitachi | S-530 | ||||||||||
Hitachi | S-570 | Yes | "As an option the S-570 is available with LaB6 gun for large probe currents and low voltage applications" ref | ||||||||
Hitachi | S-800 | Yes | ref | ||||||||
Hitachi | S-806 | "uses a cold field emitter as electron gun" ref | |||||||||
Hitachi | S-806C | ||||||||||
Hitachi | S-2100 | ||||||||||
Hitachi | S-2300 | WDX, EDX | Yes | ref | |||||||
Source |
Hitachi | S-2400 | |||||||||
Hitachi | S-2460N | Yes | |||||||||
Hitachi | S-2500 | 1987 | 0.5-30 kV | See S-570, which is apparently equivalent | |||||||
Hitachi | S-2600H | Yes | |||||||||
Hitachi | S-2600N | Yes | |||||||||
Hitachi | S-2700 | ||||||||||
Hitachi | S-3000H | 3nm @ 30kV | Yes | ||||||||
Source |
Hitachi | S-3000N | Yes | ||||||||
Hitachi | S-3200N | Yes | |||||||||
Source |
Hitachi | S-3500H | Yes | ||||||||
Hitachi | S-3500N | Yes | |||||||||
Hitachi | S-4000 | Yes | |||||||||
Hitachi | S-4100 | ||||||||||
Source |
Hitachi | S-4200 | FE | 5 nm @ 1 kV 1.6 nm @ 15 kV |
|||||||
Source |
Hitachi | S-4500 | Yes | ||||||||
Hitachi | S-4700 | Yes | |||||||||
Hitachi | S-4700-II | ||||||||||
Hitachi | S-4800 | Yes | |||||||||
Hitachi | S-5200 | Yes | |||||||||
Hitachi | S-6000 | ||||||||||
Hitachi | S-6100 | ||||||||||
Hitachi | S-6200 | ||||||||||
Hitachi | S-6280H | ref | |||||||||
Hitachi | S-6600 | ||||||||||
Hitachi | S-6780 | ||||||||||
Hitachi | S-7000 | ||||||||||
Source |
Hitachi | S-7800H | "Critical Dimension (CD)" SEM ] | ||||||||
Source |
Hitachi | S-8840 | |||||||||
Source |
Hitachi | S-9200 | |||||||||
Source |
Hitachi | S-9220 | |||||||||
Hitachi | S-9300 | ref | |||||||||
Hitachi | SU-1500 | ||||||||||
Hitachi | SU-8010 | ||||||||||
Hitachi | SU-8020 | ||||||||||
Hitachi | SU-8030 | ||||||||||
Hitachi | SU-8040 | ||||||||||
Hitachi | TM3000 | Yes | |||||||||
Hitachi | XMA-5b | 1966 | "Hitachi called its 1966 XMA-5b an EPMA with SEM. This was more of an electron probe microanalyzer than an SEM, and was most likely Hitachi's attempt to quickly join in the SEM business" [1960s] |