Difference between revisions of "SEM H"

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(Adding some details to the S-2500 entry)
(Fixed links for S-2500 manuals)
 
(8 intermediate revisions by 2 users not shown)
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| ||Hitachi||S-530|| || || || || || || || ||
 
| ||Hitachi||S-530|| || || || || || || || ||
 
|-
 
|-
−
| ||Hitachi||S-570|| || || || || || ||[http://siliconpr0n.org/media/hitachi/s-570/S-570 Schematics.pdf Yes]||"As an option the S-570 is available with LaB6 gun for large probe currents and low voltage applications" [http://www.hht-eu.com/cms/4731.html ref]
+
| ||Hitachi||S-570|| || || || || || ||[https://microwiki.org/media/hitachi/s-570/s-570_schematics.pdf Yes]||"As an option the S-570 is available with LaB6 gun for large probe currents and low voltage applications" [http://www.hht-eu.com/cms/4731.html ref]
 
|-
 
|-
−
| ||Hitachi||S-800|| || || || || || ||[http://siliconpr0n.org/media/hitachi/s-800/S-800 Schematics Manual.pdf Yes]||[http://www.hht-eu.com/cms/4713.html ref]
+
| ||Hitachi||S-800|| || || || || || ||[https://microwiki.org/media/hitachi/s-800/s-800_schematics_manual.pdf Yes]||[http://www.hht-eu.com/cms/4713.html ref]
 
|-
 
|-
 
| ||Hitachi||S-806|| || || || || || || || ||"uses a cold field emitter as electron gun" [http://www.hht-eu.com/cms/4719.html ref]
 
| ||Hitachi||S-806|| || || || || || || || ||"uses a cold field emitter as electron gun" [http://www.hht-eu.com/cms/4719.html ref]
Line 42: Line 42:
 
| ||Hitachi||S-2100|| || || || || || || || ||
 
| ||Hitachi||S-2100|| || || || || || || || ||
 
|-
 
|-
−
| ||Hitachi||S-2300|| || || || ||WDX, EDX|| ||[http://siliconpr0n.org/media/hitachi/s-2300/S-2300 Schematics Manual.pdf Yes]||[http://www.hht-eu.com/cms/6475.html ref]
+
| ||Hitachi||S-2300|| || || || ||WDX, EDX|| ||[https://microwiki.org/media/hitachi/s-2300/s-2300_schematics_manual.pdf Yes]||[http://www.hht-eu.com/cms/6475.html ref]
 
|-
 
|-
 
|[[File:kitmondo_hitachi_s-2400_7ee58f4d-4bef-4cd0-acd2-2b74d6987591.jpg|300 px]]  <br />[http://www.kitmondo.com/hitachi-s-2400/ref478043 Source]||Hitachi||S-2400|| || || || || || || || ||
 
|[[File:kitmondo_hitachi_s-2400_7ee58f4d-4bef-4cd0-acd2-2b74d6987591.jpg|300 px]]  <br />[http://www.kitmondo.com/hitachi-s-2400/ref478043 Source]||Hitachi||S-2400|| || || || || || || || ||
 
|-
 
|-
−
| ||Hitachi||S-2460N|| || || || || || ||[http://siliconpr0n.org/media/hitachi/s-2460n/S-2460N Schematics Manual.pdf Yes]|| ||
+
| ||Hitachi||S-2460N|| || || || || || ||[https://microwiki.org/media/hitachi/s-2460n/s-2460n_schematics_manual.pdf Yes]|| ||
 
|-
 
|-
 
|[[File:Hitachi S-2500 running.jpg|thumb]]||Hitachi||S-2500||1987
 
|[[File:Hitachi S-2500 running.jpg|thumb]]||Hitachi||S-2500||1987
 
|0.5-30 kV
 
|0.5-30 kV
−
| || || || ||
+
| || || ||
 +
[https://archive.org/details/s-2500-2500-c-service-manual Service Manual]
 +
 
 +
[https://archive.org/details/instruction-manual-for-s-2500-scanning-electron-microscope.smaller Instruction Manual]
 +
|See S-570, which is apparently equivalent
 
| ||
 
| ||
 
|-
 
|-
−
| ||Hitachi||S-2600H|| || || || || || ||[http://siliconpr0n.org/media/hitachi/S-3500NH-S3000NH-S2600NH Schematics Manual.pdf Yes]|| ||
+
| ||Hitachi||S-2600H|| || || || || || ||[https://microwiki.org/media/hitachi/s-3500nh-s3000nh-s2600nh_schematics_manual.pdf Yes]|| ||
 
|-
 
|-
−
| ||Hitachi||S-2600N|| || || || || || ||[http://siliconpr0n.org/media/hitachi/S-3500NH-S3000NH-S2600NH Schematics Manual.pdf Yes]|| ||
+
| ||Hitachi||S-2600N|| || || || || || ||[https://microwiki.org/media/hitachi/s-3500nh-s3000nh-s2600nh_schematics_manual.pdf Yes]|| ||
 
|-
 
|-
 
| ||Hitachi||S-2700|| || || || || || || || ||
 
| ||Hitachi||S-2700|| || || || || || || || ||
 
|-
 
|-
−
| ||Hitachi||S-3000H|| || || ||3nm @ 30kV|| || ||[http://siliconpr0n.org/media/hitachi/S-3500NH-S3000NH-S2600NH Schematics Manual.pdf Yes]|| ||
+
| ||Hitachi||S-3000H|| || || ||3nm @ 30kV|| || ||[https://microwiki.org/media/hitachi/s-3500nh-s3000nh-s2600nh_schematics_manual.pdf Yes]|| ||
 
|-
 
|-
−
|[[File:kitmondo_hitachi_s-3000n_ef3890fa-3989-4aeb-8c2e-4cf59988c489.jpg|300 px]]  <br />[http://www.kitmondo.com/hitachi-s-3000n/ref487575 Source]||Hitachi||S-3000N|| || || || || || ||[http://siliconpr0n.org/media/hitachi/S-3500NH-S3000NH-S2600NH Schematics Manual.pdf Yes]|| ||
+
|[[File:kitmondo_hitachi_s-3000n_ef3890fa-3989-4aeb-8c2e-4cf59988c489.jpg|300 px]]  <br />[http://www.kitmondo.com/hitachi-s-3000n/ref487575 Source]||Hitachi||S-3000N|| || || || || || ||[https://microwiki.org/media/hitachi/s-3500nh-s3000nh-s2600nh_schematics_manual.pdf Yes]|| ||
 
|-
 
|-
−
| ||Hitachi||S-3200N|| || || || || ||[http://siliconpr0n.org/media/hitachi/s-3200n/S3200N.pdf Yes]|| || ||
+
| ||Hitachi||S-3200N|| || || || || ||[https://microwiki.org/media/hitachi/s-3200n/s3200n.pdf Yes]|| || ||
 
|-
 
|-
−
|[[File:kitmondo_hitachi_s-3200h_hitachi_s-3200h.jpg|300 px]]  <br />[http://www.kitmondo.com/hitachi-s-3200h/ref242817 Source]||Hitachi||S-3500H|| || || || || || ||[http://siliconpr0n.org/media/hitachi/S-3500NH-S3000NH-S2600NH Schematics Manual.pdf Yes]|| ||
+
|[[File:kitmondo_hitachi_s-3200h_hitachi_s-3200h.jpg|300 px]]  <br />[http://www.kitmondo.com/hitachi-s-3200h/ref242817 Source]||Hitachi||S-3500H|| || || || || || ||[https://microwiki.org/media/hitachi/s-3500nh-s3000nh-s2600nh_schematics_manual.pdf Yes]|| ||
 
|-
 
|-
−
| ||Hitachi||S-3500N|| || || || || || ||[http://siliconpr0n.org/media/hitachi/S-3500NH-S3000NH-S2600NH Schematics Manual.pdf Yes]|| ||
+
| ||Hitachi||S-3500N|| || || || || || ||[https://microwiki.org/media/hitachi/s-3500nh-s3000nh-s2600nh_schematics_manual.pdf Yes]|| ||
 
|-
 
|-
−
| ||Hitachi||S-4000|| || || || || || ||[http://siliconpr0n.org/media/hitachi/s-4000/S-4000 Schematics Manual.pdf Yes]|| ||
+
| ||Hitachi||S-4000|| || || || || || ||[https://microwiki.org/media/hitachi/s-4000/s-4000_schematics_manual.pdf Yes]|| ||
 
|-
 
|-
 
| ||Hitachi||S-4100|| || || || || || || || ||
 
| ||Hitachi||S-4100|| || || || || || || || ||
Line 75: Line 79:
 
|[[File:kitmondo_hitachi_s-4200_h4200.jpg|300 px]]  <br />[http://www.kitmondo.com/hitachi-s-4200/ref242815 Source]||Hitachi||S-4200|| || ||FE||5 nm @ 1 kV      <br />1.6 nm @ 15 kV|| || || || ||
 
|[[File:kitmondo_hitachi_s-4200_h4200.jpg|300 px]]  <br />[http://www.kitmondo.com/hitachi-s-4200/ref242815 Source]||Hitachi||S-4200|| || ||FE||5 nm @ 1 kV      <br />1.6 nm @ 15 kV|| || || || ||
 
|-
 
|-
−
|[[File:kitmondo_hitachi_s-4500_109hitachis-4_106.jpg|300 px]]  <br />[http://www.kitmondo.com/hitachi-s-4500/ref284598 Source]||Hitachi||S-4500|| || || || || || ||[http://siliconpr0n.org/media/hitachi/s-4500/S-4500 Schematics Manual.pdf Yes]|| ||
+
|[[File:kitmondo_hitachi_s-4500_109hitachis-4_106.jpg|300 px]]  <br />[http://www.kitmondo.com/hitachi-s-4500/ref284598 Source]||Hitachi||S-4500|| || || || || || ||[https://microwiki.org/media/hitachi/s-4500/s-4500_schematics_manual.pdf Yes]|| ||
 
|-
 
|-
−
| ||Hitachi||S-4700|| || || || || || ||[http://siliconpr0n.org/media/hitachi/s-4700/S-4700 Schematics.pdf Yes]|| ||
+
| ||Hitachi||S-4700|| || || || || || ||[https://microwiki.org/media/hitachi/s-4700/s-4700_schematics.pdf Yes]|| ||
 
|-
 
|-
 
| ||Hitachi||S-4700-II|| || || || || || || || ||
 
| ||Hitachi||S-4700-II|| || || || || || || || ||
 
|-
 
|-
−
| ||Hitachi||S-4800|| || || || || ||[http://siliconpr0n.org/media/hitachi/s-4800/SEM-Hitachi-S-4800-Instruction-Manual.pdf Yes]|| || ||
+
| ||Hitachi||S-4800|| || || || || ||[https://microwiki.org/media/hitachi/s-4800/sem-hitachi-s-4800-instruction-manual.pdf Yes]|| || ||
 
|-
 
|-
−
| ||Hitachi||S-5200|| || || || || || ||[http://siliconpr0n.org/media/hitachi/s-5200/S-5200service-schematics.pdf Yes]|| ||
+
| ||Hitachi||S-5200|| || || || || || ||[https://microwiki.org/media/hitachi/s-5200/s-5200service-schematics.pdf Yes]|| ||
 
|-
 
|-
 
| ||Hitachi||S-6000|| || || || || || || || ||
 
| ||Hitachi||S-6000|| || || || || || || || ||
Line 119: Line 123:
 
| ||Hitachi||SU-8040|| || || || || || || || ||
 
| ||Hitachi||SU-8040|| || || || || || || || ||
 
|-
 
|-
−
| ||Hitachi||TM3000|| || || || || ||[http://siliconpr0n.org/media/hitachi/tm3000/tm_scopeeg.pdf Yes]|| || ||
+
| ||Hitachi||TM3000|| || || || || ||[https://microwiki.org/media/hitachi/tm3000/tm_scopeeg.pdf Yes]|| || ||
 
|-
 
|-
 
| ||Hitachi||XMA-5b||1966|| || || || || || || ||"Hitachi called its 1966 XMA-5b an “EPMA with SEM.”  This was more of an electron probe microanalyzer than an SEM, and was  most likely Hitachi's attempt to quickly join in the SEM business" [1960s]
 
| ||Hitachi||XMA-5b||1966|| || || || || || || ||"Hitachi called its 1966 XMA-5b an “EPMA with SEM.”  This was more of an electron probe microanalyzer than an SEM, and was  most likely Hitachi's attempt to quickly join in the SEM business" [1960s]
 
|-
 
|-
 
|}
 
|}

Latest revision as of 06:33, 31 July 2024


Image Vendor Model Year kV Gun Resolution (nm) Features Manual Schem SW Notes
Hitachi ? 1954 300 [1960s]
Hitachi H-1250 1976 1250 0.204 Successor to HU-3000 [1970s]
Hitachi H-1300S 1982 1300 " based on ion radiation" [1980s]
Hitachi HFS-2 1972 FE 3 "first SEM to use a field emission gun as an electron source" [1970s]
Hitachi HSM-2A 1971 40 15 EDS, WDS [1970s]
Hitachi HU-500 1964 500 [1960s]
Hitachi HU-650 1968 650 [1960s]
Hitachi HU-1000 1969 1000 [1960s]
Hitachi HU-3000 1970 3000 0.46 "accelerating voltage was the highest ever for an electron microscope" [1970s]
Hitachi S-450 1977 "samples up to 4 inches" [1970s]
Hitachi S-500 1975 "two 8 inch CRT displays, and featured automatic recording of image data (including magnification, acceleration voltage, and film number) directly on the micrograph" [1970s] ]
Hitachi S-510 EDX ref
Hitachi S-520
Hitachi S-530
Hitachi S-570 Yes "As an option the S-570 is available with LaB6 gun for large probe currents and low voltage applications" ref
Hitachi S-800 Yes ref
Hitachi S-806 "uses a cold field emitter as electron gun" ref
Hitachi S-806C
Hitachi S-2100
Hitachi S-2300 WDX, EDX Yes ref
Kitmondo hitachi s-2400 7ee58f4d-4bef-4cd0-acd2-2b74d6987591.jpg
Source		 Hitachi S-2400
Hitachi S-2460N Yes
Hitachi S-2500 running.jpg
Hitachi S-2500 1987 0.5-30 kV

Service Manual

Instruction Manual

See S-570, which is apparently equivalent
Hitachi S-2600H Yes
Hitachi S-2600N Yes
Hitachi S-2700
Hitachi S-3000H 3nm @ 30kV Yes
Kitmondo hitachi s-3000n ef3890fa-3989-4aeb-8c2e-4cf59988c489.jpg
Source		 Hitachi S-3000N Yes
Hitachi S-3200N Yes
Kitmondo hitachi s-3200h hitachi s-3200h.jpg
Source		 Hitachi S-3500H Yes
Hitachi S-3500N Yes
Hitachi S-4000 Yes
Hitachi S-4100
Kitmondo hitachi s-4200 h4200.jpg
Source		 Hitachi S-4200 FE 5 nm @ 1 kV
1.6 nm @ 15 kV
Kitmondo hitachi s-4500 109hitachis-4 106.jpg
Source		 Hitachi S-4500 Yes
Hitachi S-4700 Yes
Hitachi S-4700-II
Hitachi S-4800 Yes
Hitachi S-5200 Yes
Hitachi S-6000
Hitachi S-6100
Hitachi S-6200
Hitachi S-6280H ref
Hitachi S-6600
Hitachi S-6780
Hitachi S-7000
Kitmondo hitachi s-7800h 109hitachis-7 108.jpg
Source		 Hitachi S-7800H "Critical Dimension (CD)" SEM ]
Kitmondo hitachi s-8840 109hitachis-8 110.jpg
Source		 Hitachi S-8840
Kitmondo hitachi s-9200 109hitachis-9 112.jpg
Source		 Hitachi S-9200
Kitmondo hitachi s-9220 109hitachis-9 113.jpg
Source		 Hitachi S-9220
Hitachi S-9300 ref
Hitachi SU-1500
Hitachi SU-8010
Hitachi SU-8020
Hitachi SU-8030
Hitachi SU-8040
Hitachi TM3000 Yes
Hitachi XMA-5b 1966 "Hitachi called its 1966 XMA-5b an “EPMA with SEM.” This was more of an electron probe microanalyzer than an SEM, and was most likely Hitachi's attempt to quickly join in the SEM business" [1960s]
Retrieved from "http://microwiki.org/wiki/index.php?title=SEM_H&oldid=1386"