Difference between revisions of "SEM P-Z"

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[[Category:SEM]]
 
[[Category:SEM]]
  
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{| class="wikitable sortable" border=1
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{| class="wikitable sortable" border="1"
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!Image !!Vendor !!Model !!Year !!kV !!Gun !!Resolution (nm) !!Features !!List price !!Ask price !!Manual !!Schem !!SW !!Notes  
+
!Image!!Vendor!!Model!!Year!!kV!!Gun!!Resolution (nm)!!Features!!Manual!!Schem!!SW!!Notes
 
|-
 
|-
−
|   || Phillips || FEG XL 40 ||   ||   ||   ||   || EDAX ||   || [http://www.ebay.com/itm/PHILIPS-FEG-XL-40-SCANNING-ELECTRON-MICROSCOPE-W-EDAX-PV9760-57-/300980801721?pt=LH_DefaultDomain_0&hash=item4613da90b9 100,000]  ||    ||    ||   ||
+
| ||Phillips||FEG XL 40|| || || || ||EDAX|| || || ||
 
|-
 
|-
−
|   || Phillips || 501 || 1977 || 30 ||   || 7 ||   ||   ||   ||   ||    ||    || [1970s]
+
| ||Phillips||501||1977||30|| ||7|| || || || ||[1970s]
 
|-
 
|-
−
|   || Phillips || 501B || 1979 || 30? ||   || 7? || EDS, WDS ||   ||   ||   ||    ||    || [1970s]
+
| ||Phillips||501B||1979||30?|| ||7?||EDS, WDS|| || || ||[1970s]
 
|-
 
|-
−
|   || Phillips || SEM 505 || 1980 ||   ||   ||   ||   ||   ||   ||   ||    ||    || "new doped-yttrium silicate scintillator for the  detection of backscattered electrons in its 1980 model SEM 505; this new  detector was 200 times more sensitive to backscattered electrons than  previous scintillators" [1980s]
+
| ||Phillips||SEM 505||1980|| || || || || || || ||"new doped-yttrium silicate scintillator for the  detection of backscattered electrons in its 1980 model SEM 505; this new  detector was 200 times more sensitive to backscattered electrons than  previous scintillators" [1980s]
 
|-
 
|-
−
|   || Phillips || SEM 515 || 1984 ||   ||   ||   ||   ||   ||   ||   ||    ||    || "improved on the 505 by  adding computer-controlled automatic focussing and astigmation correction" [1980s]
+
| ||Phillips||SEM 515||1984|| || || || || || || ||"improved on the 505 by  adding computer-controlled automatic focussing and astigmation correction" [1980s]
 
|-
 
|-
−
|   || Phillips || SEM 525 EB || 1985 ||   ||   ||   ||   ||   ||   ||   ||    ||    || "created for functional testing of ICs" [1980s]
+
| ||Phillips||SEM 525 EB||1985|| || || || || || || ||"created for functional testing of ICs" [1980s]
 
|-
 
|-
−
|   || Phillips || SEM 525 IC || 1985 ||   ||   ||   ||   ||   ||   ||   ||    ||    || "designed for the non-destructive testing of semiconductor wafers" [1980s]
+
| ||Phillips||SEM 525 IC||1985|| || || || || || || ||"designed for the non-destructive testing of semiconductor wafers" [1980s]
 
|-
 
|-
−
|   || Phillips || EM 300 accessory || 1968 ||   ||   ||   ||   ||   ||   ||   ||    ||    || "attachment turned the TEM into an STEM" [1960s]
+
| ||Phillips||EM 300 accessory||1968|| || || || || || || ||"attachment turned the TEM into an STEM" [1960s]
 
|-
 
|-
−
|   || Phillips || PSEM 500 || 1972 || 50 ||   || 10 ||   ||   ||   ||   ||    ||    || "Philips' first SEM" [1970s]
+
| ||Phillips||PSEM 500||1972||50|| ||10|| || || || ||"Philips' first SEM" [1970s]
 
|-
 
|-
−
|   || Phillips || PSEM 500M || 1973 || 50? ||   || 10? ||   ||   ||   ||   ||    ||    || "designed for larger samples, accommodating  specimens with dimensions of 153 mm x 146 mm x 84 mm" [1970s]
+
| ||Phillips||PSEM 500M||1973||50?|| ||10?|| || || || ||"designed for larger samples, accommodating  specimens with dimensions of 153 mm x 146 mm x 84 mm" [1970s]
 
|-
 
|-
−
| [[File:microscope_sem_dc_phillips_xl40_dc_sem.jpg|300 px]] || Phillips || XL-30 ||   ||   || W || 3.5nm @ 30kV ||   ||   ||   ||   ||    ||    ||
+
|[[File:microscope_sem_dc_phillips_xl40_dc_sem.jpg|300 px]]||Phillips||XL-30|| || ||W||3.5nm @ 30kV|| || || || ||
 
|-
 
|-
−
|   || RCA || EMU-3 ||   ||   ||   ||   ||   ||   || [http://www.ebay.com/itm/RCA-Electron-Microscopes-Vintage-EMU-3-and-EMU-4-/331036772721?pt=LH_DefaultDomain_0&hash=item4d13544971 275,000 for EMU-3/4 (way overpriced?)]  ||    ||    ||   ||
+
| ||RCA||EMU-3|| || || || || || || || ||
 
|-
 
|-
−
|   || RCA || EMU-4 ||   ||   ||   ||   ||   ||   || [http://www.ebay.com/itm/RCA-Electron-Microscopes-Vintage-EMU-3-and-EMU-4-/331036772721?pt=LH_DefaultDomain_0&hash=item4d13544971 275,000 for EMU-3/4 (way overpriced?)]  ||    ||    ||   ||
+
| ||RCA||EMU-4|| || || || || || || || ||
 
|-
 
|-
−
|   || SEC || SNE-1500M ||   ||   ||   ||   ||   ||    ||    || [http://siliconpr0n.org/media/sec/sne-1500m/SNE-1500M Manual_eng_042308[1].pdf Yes] ||   ||   || Tabletop ]
+
| ||SEC||SNE-1500M|| || || || || ||[http://siliconpr0n.org/media/sec/sne-1500m/SNE-1500M Manual_eng_042308[1].pdf Yes]|| || ||Tabletop ]
 
|-
 
|-
−
|   || SEC || SNE-3000M ||   ||   ||   ||   ||   ||   ||   ||   ||    ||    || Tabletop
+
| ||SEC||SNE-3000M|| || || || || || || || ||Tabletop
 
|-
 
|-
−
|   || SEC || SNE-3000MB ||   ||   ||   ||   ||   ||   ||   ||   ||    ||    || Tabletop
+
| ||SEC||SNE-3000MB|| || || || || || || || ||Tabletop
 
|-
 
|-
−
|   || SEC || SNE-3200M ||   ||   ||   ||   ||   ||   ||   ||   ||    ||    || Tabletop
+
| ||SEC||SNE-3200M|| || || || || || || || ||Tabletop
 
|-
 
|-
−
|   || SEC || SNE-4500M ||   ||   ||   ||   ||   ||   ||   ||   ||    ||    || Tabletop
+
| ||SEC||SNE-4500M|| || || || || || || || ||Tabletop
 
|-
 
|-
−
|   || Seron || AIS2100C ||   ||   ||   ||   ||   ||   ||   ||   ||    ||    ||
+
| ||Seron||AIS2100C|| || || || || || || || ||
 
|-
 
|-
−
|   || Seron || AIS2200 ||   ||   ||   ||   ||   ||   ||   ||   ||    ||    ||
+
| ||Seron||AIS2200|| || || || || || || || ||
 
|-
 
|-
−
|   || Seron || AIS2300C ||   ||   ||   ||   ||   ||   ||   ||   ||    ||    ||
+
| ||Seron||AIS2300C|| || || || || || || || ||
 
|-
 
|-
−
|   || Tescan || VEGA3 ||   ||   ||   ||   ||   ||    ||    || [http://siliconpr0n.org/media/tescan/vega3/VEGA_manual_GEN_3_04_tisk.pdf Yes] ||   ||   ||
+
| ||Tescan||VEGA3|| || || || || ||[https://microwiki.org/media/tescan/vega3/vega_manual_gen_3_04_tisk.pdf Yes]|| || ||
 
|-
 
|-
−
|   || Topcon || ABT-32 ||   ||   ||   || [http://ds130.com/ABT-32.htm 5] ||   ||   ||   ||   ||    ||    ||
+
| ||Topcon||ABT-32|| || || ||[http://ds130.com/ABT-32.htm 5]|| || || || ||
 
|-
 
|-
−
|   || Topcon || ABT-60 ||   ||   ||   || [http://ds130.com/ABT-60.htm 4] ||   ||   ||   ||   ||    ||    ||
+
| ||Topcon||ABT-60|| || || ||[http://ds130.com/ABT-60.htm 4]|| || || || ||
 
|-
 
|-
−
|   || Topcon || ABT-150 ||   ||   ||   ||   ||   ||   ||   ||   ||    ||    ||
+
| ||Topcon||ABT-150|| || || || || || || || ||
 
|-
 
|-
−
|   || Topcon || SM-720 ||   ||   ||   || [http://ds130.com/SM-720.htm 0.9] ||   ||   ||   ||   ||    ||    ||
+
| ||Topcon||SM-720|| || || ||[http://ds130.com/SM-720.htm 0.9]|| || || || ||
 
|-
 
|-
−
|   || Zeiss || DSM 950 || 1986 || 30kV || W || 10nm (Spec) || "Digital SEM" || ~300k DM in 1987 || [https://debugmo.de/2018/11/my-scanning-electron-microscope/ 4500 EUR]  ||    ||  [http://dsm950.debugmo.de Schematics] (ask @tmbinc for access) ||   || "First Digital SEM" == lots of 74xx with a microcontroller here and there; Very similar to DSM960(A) and DSM940
+
| ||Zeiss||DSM 950||1986||30kV||W||10nm (Spec)||"Digital SEM"|| ||[http://dsm950.debugmo.de Schematics] (ask @tmbinc for access)|| ||"First Digital SEM" == lots of 74xx with a microcontroller here and there; Very similar to DSM960(A) and DSM940
 
|-
 
|-
−
|   || Zeiss || DSM 960  ||    ||    ||    ||    ||    ||    || [http://www.ebay.com/itm/ZEISS-SEM-Scanning-Electron-Microscope-Model-DSM-960-Turbo-Pump-/151026866735?pt=LH_DefaultDomain_0& link]  || [http://www.microscopy.ou.edu/manual/zeiss-960.pdf DSM960 Manual]  ||   ||   ||
+
|
 +
|Zeiss
 +
|DSM 940
 +
|1988
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|
 
|-
 
|-
−
|   || Zeiss || NEON 40 EsB  ||   ||   || FE  || 2.5 nm @ 1 kV  ||   ||   ||    ||    ||   ||   || "Canion FIB column"
+
| ||Zeiss||DSM 960||1988|| || || || ||[http://www.microscopy.ou.edu/manual/zeiss-960.pdf%20DSM960 Manual]|| || ||
 
|-
 
|-
−
|   || Zeiss || SIGMA  ||    ||    ||    ||    ||    ||    ||   || [http://siliconpr0n.org/media/carl_zeiss/sigma/SEM_manual.pdf Yes]  ||   ||   ||
+
|
 +
|Zeiss
 +
|DSM 942
 +
|1990
 +
|30
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|
 
|-
 
|-
−
|   || Zeiss || Supra 55VP  ||   ||   || FE ||   <br />1.7 nm @ 1 kV                <br />  <br />2 nm @ 30 kV (VP)   ||   ||   ||   ||   ||   ||   ||
+
|
 +
|Zeiss
 +
|DSM 962
 +
|1990
 +
|30
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|-
 +
|
 +
|Zeiss
 +
|DSM 940A
 +
|1990
 +
|30
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|-
 +
|
 +
|Zeiss
 +
|DSM 962A
 +
|1990
 +
|30
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|-
 +
|
 +
|Zeiss
 +
|DSM 982 Gemini
 +
|1993
 +
|30
 +
|FE
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|First combined electrostatic-magnetic Lens SEM
 +
|-
 +
|
 +
|Zeiss
 +
|Supra 35 (VP)
 +
|
 +
|30
 +
|FE
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|-
 +
|
 +
|Zeiss
 +
|Supra 40 (VP)
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|-
 +
| ||Zeiss||Supra 55 (VP)|| || ||FE||<br />1.7 nm @ 1 kV                <br />  <br />2 nm @ 30 kV (VP)|| || || || ||
 +
|-
 +
|
 +
|Zeiss
 +
|Supra 60 (VP)
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|-
 +
|
 +
|Zeiss
 +
|Ultra 55
 +
|2003
 +
|30
 +
|FE
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|-
 +
|
 +
|Zeiss
 +
|Ultra 60
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|-
 +
|
 +
|Zeiss
 +
|Ultra Plus
 +
|2008
 +
|30
 +
|FE
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|-
 +
| ||Zeiss||SIGMA||2009||30||FE|| || ||[https://microwiki.org/media/carl_zeiss/sigma/sem_manual.pdf Yes]|| || ||
 +
|-
 +
|
 +
|Zeiss
 +
|Sigma HD
 +
|
 +
|30
 +
|FE
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|-
 +
|
 +
|Zeiss
 +
|Merlin
 +
|
 +
|30
 +
|FE
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|-
 +
|
 +
|Zeiss
 +
|Merlin Compact
 +
|
 +
|30
 +
|FE
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|-
 +
|
 +
|Zeiss
 +
|Sigma 300
 +
|
 +
|30
 +
|FE
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|-
 +
|
 +
|Zeiss
 +
|Sigma 500
 +
|
 +
|30
 +
|FE
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|-
 +
|
 +
|Zeiss
 +
|GeminiSEM 500
 +
|2015
 +
|30
 +
|FE
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|-
 +
|
 +
|Zeiss
 +
|GeminiSEM 300
 +
|
 +
|30
 +
|FE
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|-
 +
|
 +
|Zeiss
 +
|GeminiSEM 450
 +
|2018
 +
|30
 +
|FE
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|https://doi.org/10.1017/S1551929518000585
 +
|-
 +
|
 +
|Zeiss
 +
|GeminiSEM 360
 +
|2020
 +
|30
 +
|FE
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|-
 +
|
 +
|Zeiss
 +
|GeminiSEM 460
 +
|2020
 +
|30
 +
|FE
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|-
 +
|
 +
|Zeiss
 +
|GeminiSEM 560
 +
|2020
 +
|30
 +
|FE
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|-
 +
|
 +
|Zeiss
 +
|EVO
 +
|2004
 +
|30
 +
|W
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|-
 +
|
 +
|Zeiss
 +
|EVO HD
 +
|
 +
|
 +
|LaB6
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|-
 +
|
 +
|Zeiss
 +
|EVO MA/LS
 +
|2008
 +
|30
 +
|W
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|
 
|-
 
|-
 
|}
 
|}

Latest revision as of 20:37, 27 August 2022


Image Vendor Model Year kV Gun Resolution (nm) Features Manual Schem SW Notes
Phillips FEG XL 40 EDAX
Phillips 501 1977 30 7 [1970s]
Phillips 501B 1979 30? 7? EDS, WDS [1970s]
Phillips SEM 505 1980 "new doped-yttrium silicate scintillator for the detection of backscattered electrons in its 1980 model SEM 505; this new detector was 200 times more sensitive to backscattered electrons than previous scintillators" [1980s]
Phillips SEM 515 1984 "improved on the 505 by adding computer-controlled automatic focussing and astigmation correction" [1980s]
Phillips SEM 525 EB 1985 "created for functional testing of ICs" [1980s]
Phillips SEM 525 IC 1985 "designed for the non-destructive testing of semiconductor wafers" [1980s]
Phillips EM 300 accessory 1968 "attachment turned the TEM into an STEM" [1960s]
Phillips PSEM 500 1972 50 10 "Philips' first SEM" [1970s]
Phillips PSEM 500M 1973 50? 10? "designed for larger samples, accommodating specimens with dimensions of 153 mm x 146 mm x 84 mm" [1970s]
Microscope sem dc phillips xl40 dc sem.jpg Phillips XL-30 W 3.5nm @ 30kV
RCA EMU-3
RCA EMU-4
SEC SNE-1500M Manual_eng_042308[1.pdf Yes] Tabletop ]
SEC SNE-3000M Tabletop
SEC SNE-3000MB Tabletop
SEC SNE-3200M Tabletop
SEC SNE-4500M Tabletop
Seron AIS2100C
Seron AIS2200
Seron AIS2300C
Tescan VEGA3 Yes
Topcon ABT-32 5
Topcon ABT-60 4
Topcon ABT-150
Topcon SM-720 0.9
Zeiss DSM 950 1986 30kV W 10nm (Spec) "Digital SEM" Schematics (ask @tmbinc for access) "First Digital SEM" == lots of 74xx with a microcontroller here and there; Very similar to DSM960(A) and DSM940
Zeiss DSM 940 1988
Zeiss DSM 960 1988 Manual
Zeiss DSM 942 1990 30
Zeiss DSM 962 1990 30
Zeiss DSM 940A 1990 30
Zeiss DSM 962A 1990 30
Zeiss DSM 982 Gemini 1993 30 FE First combined electrostatic-magnetic Lens SEM
Zeiss Supra 35 (VP) 30 FE
Zeiss Supra 40 (VP)
Zeiss Supra 55 (VP) FE
1.7 nm @ 1 kV

2 nm @ 30 kV (VP)
Zeiss Supra 60 (VP)
Zeiss Ultra 55 2003 30 FE
Zeiss Ultra 60
Zeiss Ultra Plus 2008 30 FE
Zeiss SIGMA 2009 30 FE Yes
Zeiss Sigma HD 30 FE
Zeiss Merlin 30 FE
Zeiss Merlin Compact 30 FE
Zeiss Sigma 300 30 FE
Zeiss Sigma 500 30 FE
Zeiss GeminiSEM 500 2015 30 FE
Zeiss GeminiSEM 300 30 FE
Zeiss GeminiSEM 450 2018 30 FE https://doi.org/10.1017/S1551929518000585
Zeiss GeminiSEM 360 2020 30 FE
Zeiss GeminiSEM 460 2020 30 FE
Zeiss GeminiSEM 560 2020 30 FE
Zeiss EVO 2004 30 W
Zeiss EVO HD LaB6
Zeiss EVO MA/LS 2008 30 W
Retrieved from "http://microwiki.org/wiki/index.php?title=SEM_P-Z&oldid=1328"