Difference between revisions of "SEM H"

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[[Category:SEM]]
 
[[Category:SEM]]
  
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{| class="wikitable sortable" border=1
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{| class="wikitable sortable" border="1"
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!Image !!Vendor !!Model !!Year !!kV !!Gun !!Resolution (nm) !!Features !!List price !!Ask price !!Manual !!Schem !!SW !!Notes  
+
!Image!!Vendor!!Model!!Year!!kV!!Gun!!Resolution (nm)!!Features!!Manual!!Schem!!SW!!Notes
 
|-
 
|-
−
|   || Hitachi || ? || 1954 || 300 ||   ||   ||   ||   ||   ||   ||    ||    || [1960s]
+
| ||Hitachi||?||1954||300|| || || || || || ||[1960s]
 
|-
 
|-
−
|   || Hitachi || H-1250 || 1976 || 1250 ||   || 0.204 ||   ||   ||   ||   ||    ||    || Successor to HU-3000 [1970s]
+
| ||Hitachi||H-1250||1976||1250|| ||0.204|| || || || ||Successor to HU-3000 [1970s]
 
|-
 
|-
−
|   || Hitachi || H-1300S || 1982 || 1300 ||   ||   ||   ||   ||   ||   ||    ||    || " based on ion radiation" [1980s]
+
| ||Hitachi||H-1300S||1982||1300|| || || || || || ||" based on ion radiation" [1980s]
 
|-
 
|-
−
|   || Hitachi || HFS-2 || 1972 ||   || FE || 3 ||   ||   ||   ||   ||    ||    || "first SEM to use a field emission gun as an electron  source" [1970s]
+
| ||Hitachi||HFS-2||1972|| ||FE||3|| || || || ||"first SEM to use a field emission gun as an electron  source" [1970s]
 
|-
 
|-
−
|   || Hitachi || HSM-2A || 1971 || 40 ||   || 15 || EDS, WDS ||   ||   ||   ||    ||    || [1970s]
+
| ||Hitachi||HSM-2A||1971||40|| ||15||EDS, WDS|| || || ||[1970s]
 
|-
 
|-
−
|   || Hitachi || HU-500 || 1964 || 500 ||   ||   ||   ||   ||   ||   ||    ||    || [1960s]
+
| ||Hitachi||HU-500||1964||500|| || || || || || ||[1960s]
 
|-
 
|-
−
|   || Hitachi || HU-650 || 1968 || 650 ||   ||   ||   ||   ||   ||   ||    ||    || [1960s]
+
| ||Hitachi||HU-650||1968||650|| || || || || || ||[1960s]
 
|-
 
|-
−
|   || Hitachi || HU-1000 || 1969 || 1000 ||   ||   ||   ||   ||   ||   ||    ||    || [1960s]
+
| ||Hitachi||HU-1000||1969||1000|| || || || || || ||[1960s]
 
|-
 
|-
−
|   || Hitachi || HU-3000 || 1970 || 3000 ||   || 0.46 ||   ||   ||   ||   ||    ||    || "accelerating voltage was the  highest ever for an electron microscope" [1970s]
+
| ||Hitachi||HU-3000||1970||3000|| ||0.46|| || || || ||"accelerating voltage was the  highest ever for an electron microscope" [1970s]
 
|-
 
|-
−
|   || Hitachi || S-450 || 1977 ||   ||   ||   ||   ||   ||   ||   ||    ||    || "samples up to 4 inches" [1970s]
+
| ||Hitachi||S-450||1977|| || || || || || || ||"samples up to 4 inches" [1970s]
 
|-
 
|-
−
|   || Hitachi || S-500 || 1975 ||   ||   ||   ||   ||   || [http://www.ebay.com/itm/Hitachi-S-500-Scanning-Electron-Microscope-/181197721171?pt=LH_DefaultDomain_0&hash=item2a3039ce53 6,500 refurbished 10/05/2013]  ||    ||    ||   || "two 8 inch CRT displays, and featured automatic recording of image  data (including magnification, acceleration voltage, and film number)  directly on the micrograph" [1970s] ]
+
| ||Hitachi||S-500||1975|| || || || || || || ||"two 8 inch CRT displays, and featured automatic recording of image  data (including magnification, acceleration voltage, and film number)  directly on the micrograph" [1970s] ]
 
|-
 
|-
−
|   || Hitachi || S-510 ||   ||   ||   ||   || EDX ||   ||   ||   ||    ||    || [http://www.hht-eu.com/cms/6562.html ref]
+
| ||Hitachi||S-510|| || || || ||EDX|| || || ||[http://www.hht-eu.com/cms/6562.html ref]
 
|-
 
|-
−
|   || Hitachi || S-520 ||   ||   ||   ||   ||   ||   || [http://www.ebay.com/itm/Hitachi-S-520-Scanning-Electron-Microscope-SEM-Vacuum-TSK-Oil-Diffusion-Pump-/310391896582?pt=LH_DefaultDomain_0&hash=item4844cc7a06 8950]  ||    ||    ||   ||
+
| ||Hitachi||S-520|| || || || || || || || ||
 
|-
 
|-
−
|   || Hitachi || S-530 ||   ||   ||   ||   ||   ||   || [http://www.ebay.com/itm/Hitachi-S-530-Scanning-Electron-Microscope-with-WDS-/261208885140?pt=LH_DefaultDomain_0&hash=item3cd1434794 9500]  ||    ||    ||   ||
+
| ||Hitachi||S-530|| || || || || || || || ||
 
|-
 
|-
−
|   || Hitachi || S-570 ||   ||   ||   ||   ||   ||   || [http://www.ebay.com/itm/Hitachi-S-570-SEM-Scanning-Electron-Microscope-/190638433369?pt=LH_DefaultDomain_0&hash=item2c62efa459 4,900 non-working 10/05/2013]  ||    || [http://siliconpr0n.org/media/hitachi/s-570/S-570 Schematics.pdf Yes] || "As an option the S-570 is available with LaB6 gun for large probe currents and low voltage applications" [http://www.hht-eu.com/cms/4731.html ref]
+
| ||Hitachi||S-570|| || || || || || ||[http://siliconpr0n.org/media/hitachi/s-570/S-570 Schematics.pdf Yes]||"As an option the S-570 is available with LaB6 gun for large probe currents and low voltage applications" [http://www.hht-eu.com/cms/4731.html ref]
 
|-
 
|-
−
|   || Hitachi || S-800 ||   ||   ||   ||   ||   ||   || [http://www.ebay.com/itm/Hitachi-S800-Scanning-Electron-Microscope-/171142626069?pt=LH_DefaultDomain_0&hash=item27d8e53b15 $6,700 used 10/05/2013]  ||    || [http://siliconpr0n.org/media/hitachi/s-800/S-800 Schematics Manual.pdf Yes] || [http://www.hht-eu.com/cms/4713.html ref]
+
| ||Hitachi||S-800|| || || || || || ||[http://siliconpr0n.org/media/hitachi/s-800/S-800 Schematics Manual.pdf Yes]||[http://www.hht-eu.com/cms/4713.html ref]
 
|-
 
|-
−
|   || Hitachi || S-806 ||   ||   ||   ||   ||   ||   ||   ||   ||    ||    || "uses a cold field emitter as electron gun" [http://www.hht-eu.com/cms/4719.html ref]
+
| ||Hitachi||S-806|| || || || || || || || ||"uses a cold field emitter as electron gun" [http://www.hht-eu.com/cms/4719.html ref]
 
|-
 
|-
−
|   || Hitachi || S-806C ||   ||   ||   ||   ||   ||   ||   ||   ||    ||    ||
+
| ||Hitachi||S-806C|| || || || || || || || ||
 
|-
 
|-
−
|   || Hitachi || S-2100 ||   ||   ||   ||   ||   ||   ||   ||   ||    ||    ||
+
| ||Hitachi||S-2100|| || || || || || || || ||
 
|-
 
|-
−
|   || Hitachi || S-2300 ||   ||   ||   ||   || WDX, EDX ||   || [http://www.ebay.com/itm/G75921-Hitachi-S-2300-Scanning-Electron-Microscope-/330998984221?pt=LH_DefaultDomain_0&hash=item4d1113ae1d $4,999 non-working 10/05/2013]  ||    || [http://siliconpr0n.org/media/hitachi/s-2300/S-2300 Schematics Manual.pdf Yes] || [http://www.hht-eu.com/cms/6475.html ref]
+
| ||Hitachi||S-2300|| || || || ||WDX, EDX|| ||[http://siliconpr0n.org/media/hitachi/s-2300/S-2300 Schematics Manual.pdf Yes]||[http://www.hht-eu.com/cms/6475.html ref]
 
|-
 
|-
−
| [[File:kitmondo_hitachi_s-2400_7ee58f4d-4bef-4cd0-acd2-2b74d6987591.jpg|300 px]]  <br />[http://www.kitmondo.com/hitachi-s-2400/ref478043 Source] || Hitachi || S-2400 ||   ||   ||   ||   ||   ||   ||   ||   ||    ||    ||
+
|[[File:kitmondo_hitachi_s-2400_7ee58f4d-4bef-4cd0-acd2-2b74d6987591.jpg|300 px]]  <br />[http://www.kitmondo.com/hitachi-s-2400/ref478043 Source]||Hitachi||S-2400|| || || || || || || || ||
 
|-
 
|-
−
|   || Hitachi || S-2460N ||   ||   ||   ||   ||   ||   ||    ||    || [http://siliconpr0n.org/media/hitachi/s-2460n/S-2460N Schematics Manual.pdf Yes] ||   ||
+
| ||Hitachi||S-2460N|| || || || || || ||[http://siliconpr0n.org/media/hitachi/s-2460n/S-2460N Schematics Manual.pdf Yes]|| ||
 
|-
 
|-
−
|   || Hitachi || S-2500 ||   ||   ||   ||   ||   ||   ||   ||   ||    ||    ||
+
| ||Hitachi||S-2500|| || || || || || || || ||
 
|-
 
|-
−
|   || Hitachi || S-2600H ||   ||   ||   ||   ||   ||   ||    ||    || [http://siliconpr0n.org/media/hitachi/S-3500NH-S3000NH-S2600NH Schematics Manual.pdf Yes] ||   ||
+
| ||Hitachi||S-2600H|| || || || || || ||[http://siliconpr0n.org/media/hitachi/S-3500NH-S3000NH-S2600NH Schematics Manual.pdf Yes]|| ||
 
|-
 
|-
−
|   || Hitachi || S-2600N ||   ||   ||   ||   ||   ||   ||    ||    || [http://siliconpr0n.org/media/hitachi/S-3500NH-S3000NH-S2600NH Schematics Manual.pdf Yes] ||   ||
+
| ||Hitachi||S-2600N|| || || || || || ||[http://siliconpr0n.org/media/hitachi/S-3500NH-S3000NH-S2600NH Schematics Manual.pdf Yes]|| ||
 
|-
 
|-
−
|   || Hitachi || S-2700 ||   ||   ||   ||   ||   ||   ||   ||   ||    ||    ||
+
| ||Hitachi||S-2700|| || || || || || || || ||
 
|-
 
|-
−
|   || Hitachi || S-3000H ||   ||   ||   || 3nm @ 30kV ||   ||   ||    ||    || [http://siliconpr0n.org/media/hitachi/S-3500NH-S3000NH-S2600NH Schematics Manual.pdf Yes] ||   ||
+
| ||Hitachi||S-3000H|| || || ||3nm @ 30kV|| || ||[http://siliconpr0n.org/media/hitachi/S-3500NH-S3000NH-S2600NH Schematics Manual.pdf Yes]|| ||
 
|-
 
|-
−
| [[File:kitmondo_hitachi_s-3000n_ef3890fa-3989-4aeb-8c2e-4cf59988c489.jpg|300 px]]  <br />[http://www.kitmondo.com/hitachi-s-3000n/ref487575 Source] || Hitachi || S-3000N ||   ||   ||   ||   ||   ||   ||    ||    || [http://siliconpr0n.org/media/hitachi/S-3500NH-S3000NH-S2600NH Schematics Manual.pdf Yes] ||   ||
+
|[[File:kitmondo_hitachi_s-3000n_ef3890fa-3989-4aeb-8c2e-4cf59988c489.jpg|300 px]]  <br />[http://www.kitmondo.com/hitachi-s-3000n/ref487575 Source]||Hitachi||S-3000N|| || || || || || ||[http://siliconpr0n.org/media/hitachi/S-3500NH-S3000NH-S2600NH Schematics Manual.pdf Yes]|| ||
 
|-
 
|-
−
|   || Hitachi || S-3200N ||   ||   ||   ||   ||   ||    ||    || [http://siliconpr0n.org/media/hitachi/s-3200n/S3200N.pdf Yes] ||   ||   ||
+
| ||Hitachi||S-3200N|| || || || || ||[http://siliconpr0n.org/media/hitachi/s-3200n/S3200N.pdf Yes]|| || ||
 
|-
 
|-
−
| [[File:kitmondo_hitachi_s-3200h_hitachi_s-3200h.jpg|300 px]]  <br />[http://www.kitmondo.com/hitachi-s-3200h/ref242817 Source] || Hitachi || S-3500H ||   ||   ||   ||   ||   ||   ||    ||    || [http://siliconpr0n.org/media/hitachi/S-3500NH-S3000NH-S2600NH Schematics Manual.pdf Yes] ||   ||
+
|[[File:kitmondo_hitachi_s-3200h_hitachi_s-3200h.jpg|300 px]]  <br />[http://www.kitmondo.com/hitachi-s-3200h/ref242817 Source]||Hitachi||S-3500H|| || || || || || ||[http://siliconpr0n.org/media/hitachi/S-3500NH-S3000NH-S2600NH Schematics Manual.pdf Yes]|| ||
 
|-
 
|-
−
|   || Hitachi || S-3500N ||   ||   ||   ||   ||   ||   ||    ||    || [http://siliconpr0n.org/media/hitachi/S-3500NH-S3000NH-S2600NH Schematics Manual.pdf Yes] ||   ||
+
| ||Hitachi||S-3500N|| || || || || || ||[http://siliconpr0n.org/media/hitachi/S-3500NH-S3000NH-S2600NH Schematics Manual.pdf Yes]|| ||
 
|-
 
|-
−
|   || Hitachi || S-4000 ||   ||   ||   ||   ||   ||   ||    ||    || [http://siliconpr0n.org/media/hitachi/s-4000/S-4000 Schematics Manual.pdf Yes] ||   ||
+
| ||Hitachi||S-4000|| || || || || || ||[http://siliconpr0n.org/media/hitachi/s-4000/S-4000 Schematics Manual.pdf Yes]|| ||
 
|-
 
|-
−
|   || Hitachi || S-4100 ||   ||   ||   ||   ||   ||   ||   ||   ||    ||    ||
+
| ||Hitachi||S-4100|| || || || || || || || ||
 
|-
 
|-
−
| [[File:kitmondo_hitachi_s-4200_h4200.jpg|300 px]]  <br />[http://www.kitmondo.com/hitachi-s-4200/ref242815 Source] || Hitachi || S-4200 ||   ||   || FE || 5 nm @ 1 kV      <br />1.6 nm @ 15 kV ||   ||   ||   ||   ||    ||    ||
+
|[[File:kitmondo_hitachi_s-4200_h4200.jpg|300 px]]  <br />[http://www.kitmondo.com/hitachi-s-4200/ref242815 Source]||Hitachi||S-4200|| || ||FE||5 nm @ 1 kV      <br />1.6 nm @ 15 kV|| || || || ||
 
|-
 
|-
−
| [[File:kitmondo_hitachi_s-4500_109hitachis-4_106.jpg|300 px]]  <br />[http://www.kitmondo.com/hitachi-s-4500/ref284598 Source] || Hitachi || S-4500 ||   ||   ||   ||   ||   ||   ||    ||    || [http://siliconpr0n.org/media/hitachi/s-4500/S-4500 Schematics Manual.pdf Yes] ||   ||
+
|[[File:kitmondo_hitachi_s-4500_109hitachis-4_106.jpg|300 px]]  <br />[http://www.kitmondo.com/hitachi-s-4500/ref284598 Source]||Hitachi||S-4500|| || || || || || ||[http://siliconpr0n.org/media/hitachi/s-4500/S-4500 Schematics Manual.pdf Yes]|| ||
 
|-
 
|-
−
|   || Hitachi || S-4700 ||   ||   ||   ||   ||   ||   ||    ||    || [http://siliconpr0n.org/media/hitachi/s-4700/S-4700 Schematics.pdf Yes] ||   ||
+
| ||Hitachi||S-4700|| || || || || || ||[http://siliconpr0n.org/media/hitachi/s-4700/S-4700 Schematics.pdf Yes]|| ||
 
|-
 
|-
−
|   || Hitachi || S-4700-II ||   ||   ||   ||   ||   ||   || [http://www.ebay.com/itm/Hitachi-S-4700-II-Scanning-Electron-Microscope-with-Thermo-Noran-Vantage-EDS-SEM-/130878728136?pt=LH_DefaultDomain_0&hash=item1e78fae7c8 160,000]  ||    ||    ||   ||
+
| ||Hitachi||S-4700-II|| || || || || || || || ||
 
|-
 
|-
−
|   || Hitachi || S-4800 ||   ||   ||   ||   ||   ||    ||    || [http://siliconpr0n.org/media/hitachi/s-4800/SEM-Hitachi-S-4800-Instruction-Manual.pdf Yes] ||   ||   ||
+
| ||Hitachi||S-4800|| || || || || ||[http://siliconpr0n.org/media/hitachi/s-4800/SEM-Hitachi-S-4800-Instruction-Manual.pdf Yes]|| || ||
 
|-
 
|-
−
|   || Hitachi || S-5200 ||   ||   ||   ||   ||   ||   ||    ||    || [http://siliconpr0n.org/media/hitachi/s-5200/S-5200service-schematics.pdf Yes] ||   ||
+
| ||Hitachi||S-5200|| || || || || || ||[http://siliconpr0n.org/media/hitachi/s-5200/S-5200service-schematics.pdf Yes]|| ||
 
|-
 
|-
−
|   || Hitachi || S-6000 ||   ||   ||   ||   ||   ||   ||   ||   ||    ||    ||
+
| ||Hitachi||S-6000|| || || || || || || || ||
 
|-
 
|-
−
|   || Hitachi || S-6100 ||   ||   ||   ||   ||   ||   ||   ||   ||    ||    ||
+
| ||Hitachi||S-6100|| || || || || || || || ||
 
|-
 
|-
−
|   || Hitachi || S-6200 ||   ||   ||   ||   ||   ||   ||   ||   ||    ||    ||
+
| ||Hitachi||S-6200|| || || || || || || || ||
 
|-
 
|-
−
|   || Hitachi || S-6280H ||   ||   ||   ||   ||   ||   ||   ||   ||    ||    || [http://www.hht-eu.com/cms/4725.html ref]
+
| ||Hitachi||S-6280H|| || || || || || || || ||[http://www.hht-eu.com/cms/4725.html ref]
 
|-
 
|-
−
|   || Hitachi || S-6600 ||   ||   ||   ||   ||   ||   ||   ||   ||    ||    ||
+
| ||Hitachi||S-6600|| || || || || || || || ||
 
|-
 
|-
−
|   || Hitachi || S-6780 ||   ||   ||   ||   ||   ||   || [http://www.ebay.com/itm/Hitachi-SEM-Scanning-Electron-Microscope-S-6780-as-is-/140744408886?pt=LH_DefaultDomain_0&hash=item20c5053f36 10,000]  ||    ||    ||   ||
+
| ||Hitachi||S-6780|| || || || || || || || ||
 
|-
 
|-
−
|   || Hitachi || S-7000 ||   ||   ||   ||   ||   ||   ||   ||   ||    ||    ||
+
| ||Hitachi||S-7000|| || || || || || || || ||
 
|-
 
|-
−
| [[File:kitmondo_hitachi_s-7800h_109hitachis-7_108.jpg|300 px]]  <br />[http://www.kitmondo.com/hitachi-s-7800h-cd-sem/ref284600 Source] || Hitachi || S-7800H ||   ||   ||   ||   ||   ||   ||   ||   ||   ||    ||  "Critical Dimension (CD)" SEM ]
+
|[[File:kitmondo_hitachi_s-7800h_109hitachis-7_108.jpg|300 px]]  <br />[http://www.kitmondo.com/hitachi-s-7800h-cd-sem/ref284600 Source]||Hitachi||S-7800H|| || || || || || || || ||"Critical Dimension (CD)" SEM ]
 
|-
 
|-
−
| [[File:kitmondo_hitachi_s-8840_109hitachis-8_110.jpg|300 px]]  <br />[http://www.kitmondo.com/hitachi-s-8840/ref284602 Source] || Hitachi || S-8840 ||   ||   ||   ||   ||   ||   ||   ||   ||    ||    ||
+
|[[File:kitmondo_hitachi_s-8840_109hitachis-8_110.jpg|300 px]]  <br />[http://www.kitmondo.com/hitachi-s-8840/ref284602 Source]||Hitachi||S-8840|| || || || || || || || ||
 
|-
 
|-
−
| [[File:kitmondo_hitachi_s-9200_109hitachis-9_112.jpg|300 px]]  <br />[http://www.kitmondo.com/hitachi-s-9200/ref284604 Source] || Hitachi || S-9200 ||   ||   ||   ||   ||   ||   ||   ||   ||    ||    ||
+
|[[File:kitmondo_hitachi_s-9200_109hitachis-9_112.jpg|300 px]]  <br />[http://www.kitmondo.com/hitachi-s-9200/ref284604 Source]||Hitachi||S-9200|| || || || || || || || ||
 
|-
 
|-
−
| [[File:kitmondo_hitachi_s-9220_109hitachis-9_113.jpg|300 px]]  <br />[http://www.kitmondo.com/hitachi-s-9220-sem/ref284605 Source] || Hitachi || S-9220 ||   ||   ||   ||   ||   ||   ||   ||   ||    ||    ||
+
|[[File:kitmondo_hitachi_s-9220_109hitachis-9_113.jpg|300 px]]  <br />[http://www.kitmondo.com/hitachi-s-9220-sem/ref284605 Source]||Hitachi||S-9220|| || || || || || || || ||
 
|-
 
|-
−
|   || Hitachi || S-9300 ||   ||   ||   ||   ||   ||   || [http://www.ebay.com/itm/Hitachi-SEM-9300-Electronic-Microscope-Working-/290921996061?pt=LH_DefaultDomain_0&hash=item43bc4d5f1d 8,000 column only]  ||    ||    || [http://www.ebay.com/itm/Hitachi-S-9300-Column-Scanning-Electron-Microscope-/131010537853?pt=LH_DefaultDomain_0&hash=item1e80d6297d ref]
+
| ||Hitachi||S-9300|| || || || || || || ||[http://www.ebay.com/itm/Hitachi-S-9300-Column-Scanning-Electron-Microscope-/131010537853?pt=LH_DefaultDomain_0&hash=item1e80d6297d ref]
 
|-
 
|-
−
|   || Hitachi || SU-1500 ||   ||   ||   ||   ||   ||   ||   ||   ||    ||    ||
+
| ||Hitachi||SU-1500|| || || || || || || || ||
 
|-
 
|-
−
|   || Hitachi || SU-8010 ||   ||   ||   ||   ||   ||   ||   ||   ||    ||    ||
+
| ||Hitachi||SU-8010|| || || || || || || || ||
 
|-
 
|-
−
|   || Hitachi || SU-8020 ||   ||   ||   ||   ||   ||   ||   ||   ||    ||    ||
+
| ||Hitachi||SU-8020|| || || || || || || || ||
 
|-
 
|-
−
|   || Hitachi || SU-8030 ||   ||   ||   ||   ||   ||   ||   ||   ||    ||    ||
+
| ||Hitachi||SU-8030|| || || || || || || || ||
 
|-
 
|-
−
|   || Hitachi || SU-8040 ||   ||   ||   ||   ||   ||   ||   ||   ||    ||    ||
+
| ||Hitachi||SU-8040|| || || || || || || || ||
 
|-
 
|-
−
|   || Hitachi || TM3000 ||   ||   ||   ||   ||   ||    ||    || [http://siliconpr0n.org/media/hitachi/tm3000/tm_scopeeg.pdf Yes] ||   ||   ||
+
| ||Hitachi||TM3000|| || || || || ||[http://siliconpr0n.org/media/hitachi/tm3000/tm_scopeeg.pdf Yes]|| || ||
 
|-
 
|-
−
|   || Hitachi || XMA-5b || 1966 ||   ||   ||   ||   ||   ||   ||   ||    ||    || "Hitachi called its 1966 XMA-5b an “EPMA with SEM.”  This was more of an electron probe microanalyzer than an SEM, and was  most likely Hitachi's attempt to quickly join in the SEM business" [1960s]
+
| ||Hitachi||XMA-5b||1966|| || || || || || || ||"Hitachi called its 1966 XMA-5b an “EPMA with SEM.”  This was more of an electron probe microanalyzer than an SEM, and was  most likely Hitachi's attempt to quickly join in the SEM business" [1960s]
 
|-
 
|-
 
|}
 
|}

Revision as of 18:54, 13 February 2019


Image Vendor Model Year kV Gun Resolution (nm) Features Manual Schem SW Notes
Hitachi ? 1954 300 [1960s]
Hitachi H-1250 1976 1250 0.204 Successor to HU-3000 [1970s]
Hitachi H-1300S 1982 1300 " based on ion radiation" [1980s]
Hitachi HFS-2 1972 FE 3 "first SEM to use a field emission gun as an electron source" [1970s]
Hitachi HSM-2A 1971 40 15 EDS, WDS [1970s]
Hitachi HU-500 1964 500 [1960s]
Hitachi HU-650 1968 650 [1960s]
Hitachi HU-1000 1969 1000 [1960s]
Hitachi HU-3000 1970 3000 0.46 "accelerating voltage was the highest ever for an electron microscope" [1970s]
Hitachi S-450 1977 "samples up to 4 inches" [1970s]
Hitachi S-500 1975 "two 8 inch CRT displays, and featured automatic recording of image data (including magnification, acceleration voltage, and film number) directly on the micrograph" [1970s] ]
Hitachi S-510 EDX ref
Hitachi S-520
Hitachi S-530
Hitachi S-570 Schematics.pdf Yes "As an option the S-570 is available with LaB6 gun for large probe currents and low voltage applications" ref
Hitachi S-800 Schematics Manual.pdf Yes ref
Hitachi S-806 "uses a cold field emitter as electron gun" ref
Hitachi S-806C
Hitachi S-2100
Hitachi S-2300 WDX, EDX Schematics Manual.pdf Yes ref
Kitmondo hitachi s-2400 7ee58f4d-4bef-4cd0-acd2-2b74d6987591.jpg
Source		 Hitachi S-2400
Hitachi S-2460N Schematics Manual.pdf Yes
Hitachi S-2500
Hitachi S-2600H Schematics Manual.pdf Yes
Hitachi S-2600N Schematics Manual.pdf Yes
Hitachi S-2700
Hitachi S-3000H 3nm @ 30kV Schematics Manual.pdf Yes
Kitmondo hitachi s-3000n ef3890fa-3989-4aeb-8c2e-4cf59988c489.jpg
Source		 Hitachi S-3000N Schematics Manual.pdf Yes
Hitachi S-3200N Yes
Kitmondo hitachi s-3200h hitachi s-3200h.jpg
Source		 Hitachi S-3500H Schematics Manual.pdf Yes
Hitachi S-3500N Schematics Manual.pdf Yes
Hitachi S-4000 Schematics Manual.pdf Yes
Hitachi S-4100
Kitmondo hitachi s-4200 h4200.jpg
Source		 Hitachi S-4200 FE 5 nm @ 1 kV
1.6 nm @ 15 kV
Kitmondo hitachi s-4500 109hitachis-4 106.jpg
Source		 Hitachi S-4500 Schematics Manual.pdf Yes
Hitachi S-4700 Schematics.pdf Yes
Hitachi S-4700-II
Hitachi S-4800 Yes
Hitachi S-5200 Yes
Hitachi S-6000
Hitachi S-6100
Hitachi S-6200
Hitachi S-6280H ref
Hitachi S-6600
Hitachi S-6780
Hitachi S-7000
Kitmondo hitachi s-7800h 109hitachis-7 108.jpg
Source		 Hitachi S-7800H "Critical Dimension (CD)" SEM ]
Kitmondo hitachi s-8840 109hitachis-8 110.jpg
Source		 Hitachi S-8840
Kitmondo hitachi s-9200 109hitachis-9 112.jpg
Source		 Hitachi S-9200
Kitmondo hitachi s-9220 109hitachis-9 113.jpg
Source		 Hitachi S-9220
Hitachi S-9300 ref
Hitachi SU-1500
Hitachi SU-8010
Hitachi SU-8020
Hitachi SU-8030
Hitachi SU-8040
Hitachi TM3000 Yes
Hitachi XMA-5b 1966 "Hitachi called its 1966 XMA-5b an “EPMA with SEM.” This was more of an electron probe microanalyzer than an SEM, and was most likely Hitachi's attempt to quickly join in the SEM business" [1960s]
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