FEI FIB 200

This seems to be a pretty popular FIB. Based on the XL30?

Refilling

Videos for GIS refill: https://www.youtube.com/channel/UCebcTTg_Al48R9Uxdy8sS9Q

Chemicals Markus is using to refill (TODO: get image of Ga bottle, process):

Calibration

General procedure is to wobble the focus and minimize how much drift occurs when sweeping. Looks something like this: https://youtu.be/Ln2GDMw-Vf8

Markus

mcmaster: took a bunch of notes, but they were lost. I still have the pictures though

Problems when acquired:

• LMIS empty
  • Fabricated replacement using Ga from Sigma-Aldrich, tungsten wire, syringe, and DIY spot welder
• Sources were refilled?
• Detector tube bad (outgassed)
  • Replaced
• XeF2 leak. Damaged stage gears
  • Removed XeF2 GIS and blanked off
  • Bought similar replacement gears, machined to fit
  • TOOD: install new seals. Requires special XeF2 rated version not in other GIS
• Faulty power supply
  • Repaired module (replaced resistor?)
• Bad seal on pneumatic stabilizer
  • Bought (silicone?) sheet to repair
• Turbo pump sometimes noisy, but seems to still work

GIS

GIS cluster. Note one of the injectors missing (more on it below)

A new Pt injector tip:

This XeF2 injector sat for a long time in storage. The XeF2 ate through the seals and caused considerable damage in the FIB

Computer

Misc

Aperture motor test: https://youtu.be/TIqlTjR2UH4

Test edit after calibration (cut trace):

GIS controller (pneumatics + heater controllers):

High voltage power suppl:

Main power distribution:

Chamber camera on left screen:

Doc describing the LMIS column: