SEM H

Image	Vendor	Model	Year	kV	Gun	Resolution (nm)	Features	List price	Ask price	Manual	Schem	SW	Notes
	Hitachi	?	1954	300									[1960s]
	Hitachi	H-1250	1976	1250		0.204							Successor to HU-3000 [1970s]
	Hitachi	H-1300S	1982	1300									" based on ion radiation" [1980s]
	Hitachi	HFS-2	1972		FE	3							"first SEM to use a field emission gun as an electron source" [1970s]
	Hitachi	HSM-2A	1971	40		15	EDS, WDS						[1970s]
	Hitachi	HU-500	1964	500									[1960s]
	Hitachi	HU-650	1968	650									[1960s]
	Hitachi	HU-1000	1969	1000									[1960s]
	Hitachi	HU-3000	1970	3000		0.46							"accelerating voltage was the highest ever for an electron microscope" [1970s]
	Hitachi	S-450	1977										"samples up to 4 inches" [1970s]
	Hitachi	S-500	1975						6,500 refurbished 10/05/2013				"two 8 inch CRT displays, and featured automatic recording of image data (including magnification, acceleration voltage, and film number) directly on the micrograph" [1970s] ]
	Hitachi	S-510					EDX						ref
	Hitachi	S-520							8950
	Hitachi	S-530							9500
	Hitachi	S-570							4,900 non-working 10/05/2013		Schematics.pdf Yes	"As an option the S-570 is available with LaB6 gun for large probe currents and low voltage applications" ref
	Hitachi	S-800							$6,700 used 10/05/2013		Schematics Manual.pdf Yes	ref
	Hitachi	S-806											"uses a cold field emitter as electron gun" ref
	Hitachi	S-806C
	Hitachi	S-2100
	Hitachi	S-2300					WDX, EDX		$4,999 non-working 10/05/2013		Schematics Manual.pdf Yes	ref
Source	Hitachi	S-2400
	Hitachi	S-2460N									Schematics Manual.pdf Yes
	Hitachi	S-2500
	Hitachi	S-2600H									Schematics Manual.pdf Yes
	Hitachi	S-2600N									Schematics Manual.pdf Yes
	Hitachi	S-2700
	Hitachi	S-3000H				3nm @ 30kV					Schematics Manual.pdf Yes
Source	Hitachi	S-3000N									Schematics Manual.pdf Yes
	Hitachi	S-3200N								Yes
Source	Hitachi	S-3500H									Schematics Manual.pdf Yes
	Hitachi	S-3500N									Schematics Manual.pdf Yes
	Hitachi	S-4000									Schematics Manual.pdf Yes
	Hitachi	S-4100
Source	Hitachi	S-4200			FE	5 nm @ 1 kV 1.6 nm @ 15 kV
Source	Hitachi	S-4500									Schematics Manual.pdf Yes
	Hitachi	S-4700									Schematics.pdf Yes
	Hitachi	S-4700-II							160,000
	Hitachi	S-4800								Yes
	Hitachi	S-5200									Yes
	Hitachi	S-6000
	Hitachi	S-6100
	Hitachi	S-6200
	Hitachi	S-6280H											ref
	Hitachi	S-6600
	Hitachi	S-6780							10,000
	Hitachi	S-7000
Source	Hitachi	S-7800H											"Critical Dimension (CD)" SEM ]
Source	Hitachi	S-8840
Source	Hitachi	S-9200
Source	Hitachi	S-9220
	Hitachi	S-9300							8,000 column only			ref
	Hitachi	SU-1500
	Hitachi	SU-8010
	Hitachi	SU-8020
	Hitachi	SU-8030
	Hitachi	SU-8040
	Hitachi	TM3000								Yes
	Hitachi	XMA-5b	1966										"Hitachi called its 1966 XMA-5b an “EPMA with SEM.” This was more of an electron probe microanalyzer than an SEM, and was most likely Hitachi's attempt to quickly join in the SEM business" [1960s]