SEM H

Image	Vendor	Model	Year	kV	Gun	Resolution (nm)	Features	Manual	Schem	SW	Notes
	Hitachi	?	1954	300							[1960s]
	Hitachi	H-1250	1976	1250		0.204					Successor to HU-3000 [1970s]
	Hitachi	H-1300S	1982	1300							" based on ion radiation" [1980s]
	Hitachi	HFS-2	1972		FE	3					"first SEM to use a field emission gun as an electron source" [1970s]
	Hitachi	HSM-2A	1971	40		15	EDS, WDS				[1970s]
	Hitachi	HU-500	1964	500							[1960s]
	Hitachi	HU-650	1968	650							[1960s]
	Hitachi	HU-1000	1969	1000							[1960s]
	Hitachi	HU-3000	1970	3000		0.46					"accelerating voltage was the highest ever for an electron microscope" [1970s]
	Hitachi	S-450	1977								"samples up to 4 inches" [1970s]
	Hitachi	S-500	1975								"two 8 inch CRT displays, and featured automatic recording of image data (including magnification, acceleration voltage, and film number) directly on the micrograph" [1970s] ]
	Hitachi	S-510					EDX				ref
	Hitachi	S-520
	Hitachi	S-530
	Hitachi	S-570							Schematics.pdf Yes	"As an option the S-570 is available with LaB6 gun for large probe currents and low voltage applications" ref
	Hitachi	S-800							Schematics Manual.pdf Yes	ref
	Hitachi	S-806									"uses a cold field emitter as electron gun" ref
	Hitachi	S-806C
	Hitachi	S-2100
	Hitachi	S-2300					WDX, EDX		Schematics Manual.pdf Yes	ref
Source	Hitachi	S-2400
	Hitachi	S-2460N							Schematics Manual.pdf Yes
	Hitachi	S-2500							Schematics - No Maunal.pdf Yes
	Hitachi	S-2600H							Schematics Manual.pdf Yes
	Hitachi	S-2600N							Schematics Manual.pdf Yes
	Hitachi	S-2700
	Hitachi	S-3000H				3nm @ 30kV			Schematics Manual.pdf Yes
Source	Hitachi	S-3000N							Schematics Manual.pdf Yes
	Hitachi	S-3200N						Yes
Source	Hitachi	S-3500H							Schematics Manual.pdf Yes
	Hitachi	S-3500N							Schematics Manual.pdf Yes
	Hitachi	S-4000							Schematics Manual.pdf Yes
	Hitachi	S-4100
Source	Hitachi	S-4200			FE	5 nm @ 1 kV 1.6 nm @ 15 kV
Source	Hitachi	S-4500							Schematics Manual.pdf Yes
	Hitachi	S-4700							Schematics.pdf Yes
	Hitachi	S-4700-II
	Hitachi	S-4800						Yes
	Hitachi	S-5200							Yes
	Hitachi	S-6000
	Hitachi	S-6100
	Hitachi	S-6200
	Hitachi	S-6280H									ref
	Hitachi	S-6600
	Hitachi	S-6780
	Hitachi	S-7000
Source	Hitachi	S-7800H									"Critical Dimension (CD)" SEM ]
Source	Hitachi	S-8840
Source	Hitachi	S-9200
Source	Hitachi	S-9220
	Hitachi	S-9300								ref
	Hitachi	SU-1500
	Hitachi	SU-8010
	Hitachi	SU-8020
	Hitachi	SU-8030
	Hitachi	SU-8040
	Hitachi	TM3000						Yes
	Hitachi	XMA-5b	1966								"Hitachi called its 1966 XMA-5b an “EPMA with SEM.” This was more of an electron probe microanalyzer than an SEM, and was most likely Hitachi's attempt to quickly join in the SEM business" [1960s]