Difference between revisions of "FEI FIB 200"
Line 19: | Line 19: | ||
mcmaster: took a bunch of notes, but they were lost. I still have the pictures though | mcmaster: took a bunch of notes, but they were lost. I still have the pictures though | ||
+ | |||
+ | Problems when acquired: | ||
+ | * LMIS empty | ||
+ | ** Fabricated replacement using Ga from Sigma-Aldrich, tungsten wire, syringe, and DIY spot welder | ||
+ | * Detector tube bad (outgassed) | ||
+ | ** Replaced | ||
+ | * XeF2 leak. Damaged stage gears | ||
+ | ** Removed XeF2 GIS and blanked off | ||
+ | ** Bought similar replacement gears, machined to fit | ||
+ | ** TOOD: install new seals. Requires special XeF2 rated version not in other GIS | ||
+ | * Faulty power supply | ||
+ | ** Repaired module (replaced resistor?) | ||
+ | |||
== GIS == | == GIS == | ||
Line 56: | Line 69: | ||
Aperture motor test: https://youtu.be/TIqlTjR2UH4 | Aperture motor test: https://youtu.be/TIqlTjR2UH4 | ||
+ | |||
+ | Test edit after calibration (cut trace): | ||
+ | |||
+ | [[File:markus_fei_fib200_edit1.jpg|frameless]] | ||
+ | [[File:markus_fei_fib200_edit2.jpg|frameless]] |
Revision as of 00:08, 13 February 2019
This seems to be a pretty popular FIB. Based on the XL30?
Refilling
Videos for GIS refill: https://www.youtube.com/channel/UCebcTTg_Al48R9Uxdy8sS9Q
Chemicals Markus is using to refill (TODO: get image of Ga bottle, process):
Calibration
General procedure is to wobble the focus and minimize how much drift occurs when sweeping. Looks something like this: https://youtu.be/Ln2GDMw-Vf8
Markus
mcmaster: took a bunch of notes, but they were lost. I still have the pictures though
Problems when acquired:
- LMIS empty
- Fabricated replacement using Ga from Sigma-Aldrich, tungsten wire, syringe, and DIY spot welder
- Detector tube bad (outgassed)
- Replaced
- XeF2 leak. Damaged stage gears
- Removed XeF2 GIS and blanked off
- Bought similar replacement gears, machined to fit
- TOOD: install new seals. Requires special XeF2 rated version not in other GIS
- Faulty power supply
- Repaired module (replaced resistor?)
GIS
GIS cluster. Note one of the injectors missing (more on it below)
A new Pt injector tip:
This XeF2 injector sat for a long time in storage. The XeF2 ate through the seals and caused considerable damage in the FIB
Computer
Misc
Aperture motor test: https://youtu.be/TIqlTjR2UH4
Test edit after calibration (cut trace):