Difference between revisions of "SEM P-Z"
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| || Topcon || SM-720 || || || || [http://ds130.com/SM-720.htm 0.9] || || || || || || || | | || Topcon || SM-720 || || || || [http://ds130.com/SM-720.htm 0.9] || || || || || || || | ||
|- | |- | ||
| − | | || Zeiss || DSM 960 || || || || || || || [http://www.ebay.com/itm/ZEISS-SEM-Scanning-Electron-Microscope-Model-DSM-960-Turbo-Pump-/151026866735?pt=LH_DefaultDomain_0& link] || | + | | || Zeiss || DSM 950 || 1986 || 30kV || W || 10nm (Spec) || "Digital SEM" || ~300k DM in 1987 || [https://debugmo.de/2018/11/my-scanning-electron-microscope/ 4500 EUR] || || [http://dsm950.debugmo.de Schematics] (ask @tmbinc for access) || || "First Digital SEM" == lots of 74xx with a microcontroller here and there; Very similar to DSM960(A) and DSM940 |
| + | |- | ||
| + | | || Zeiss || DSM 960 || || || || || || || [http://www.ebay.com/itm/ZEISS-SEM-Scanning-Electron-Microscope-Model-DSM-960-Turbo-Pump-/151026866735?pt=LH_DefaultDomain_0& link] || [http://www.microscopy.ou.edu/manual/zeiss-960.pdf DSM960 Manual] || || || | ||
|- | |- | ||
| || Zeiss || NEON 40 EsB || || || FE || 2.5 nm @ 1 kV || || || || || || || "Canion FIB column" | | || Zeiss || NEON 40 EsB || || || FE || 2.5 nm @ 1 kV || || || || || || || "Canion FIB column" | ||
Revision as of 13:50, 31 December 2018
| Image | Vendor | Model | Year | kV | Gun | Resolution (nm) | Features | List price | Ask price | Manual | Schem | SW | Notes |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Phillips | FEG XL 40 | EDAX | 100,000 | ||||||||||
| Phillips | 501 | 1977 | 30 | 7 | [1970s] | ||||||||
| Phillips | 501B | 1979 | 30? | 7? | EDS, WDS | [1970s] | |||||||
| Phillips | SEM 505 | 1980 | "new doped-yttrium silicate scintillator for the detection of backscattered electrons in its 1980 model SEM 505; this new detector was 200 times more sensitive to backscattered electrons than previous scintillators" [1980s] | ||||||||||
| Phillips | SEM 515 | 1984 | "improved on the 505 by adding computer-controlled automatic focussing and astigmation correction" [1980s] | ||||||||||
| Phillips | SEM 525 EB | 1985 | "created for functional testing of ICs" [1980s] | ||||||||||
| Phillips | SEM 525 IC | 1985 | "designed for the non-destructive testing of semiconductor wafers" [1980s] | ||||||||||
| Phillips | EM 300 accessory | 1968 | "attachment turned the TEM into an STEM" [1960s] | ||||||||||
| Phillips | PSEM 500 | 1972 | 50 | 10 | "Philips' first SEM" [1970s] | ||||||||
| Phillips | PSEM 500M | 1973 | 50? | 10? | "designed for larger samples, accommodating specimens with dimensions of 153 mm x 146 mm x 84 mm" [1970s] | ||||||||
 |
Phillips | XL-30 | W | 3.5nm @ 30kV | |||||||||
| RCA | EMU-3 | 275,000 for EMU-3/4 (way overpriced?) | |||||||||||
| RCA | EMU-4 | 275,000 for EMU-3/4 (way overpriced?) | |||||||||||
| SEC | SNE-1500M | Manual_eng_042308[1.pdf Yes] | Tabletop ] | ||||||||||
| SEC | SNE-3000M | Tabletop | |||||||||||
| SEC | SNE-3000MB | Tabletop | |||||||||||
| SEC | SNE-3200M | Tabletop | |||||||||||
| SEC | SNE-4500M | Tabletop | |||||||||||
| Seron | AIS2100C | ||||||||||||
| Seron | AIS2200 | ||||||||||||
| Seron | AIS2300C | ||||||||||||
| Tescan | VEGA3 | Yes | |||||||||||
| Topcon | ABT-32 | 5 | |||||||||||
| Topcon | ABT-60 | 4 | |||||||||||
| Topcon | ABT-150 | ||||||||||||
| Topcon | SM-720 | 0.9 | |||||||||||
| Zeiss | DSM 950 | 1986 | 30kV | W | 10nm (Spec) | "Digital SEM" | ~300k DM in 1987 | 4500 EUR | Schematics (ask @tmbinc for access) | "First Digital SEM" == lots of 74xx with a microcontroller here and there; Very similar to DSM960(A) and DSM940 | |||
| Zeiss | DSM 960 | link | DSM960 Manual | ||||||||||
| Zeiss | NEON 40 EsB | FE | 2.5 nm @ 1 kV | "Canion FIB column" | |||||||||
| Zeiss | SIGMA | Yes | |||||||||||
| Zeiss | Supra 55VP | FE | 1.7 nm @ 1 kV 2 nm @ 30 kV (VP) |
