Difference between revisions of "SEM H"
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− | !Image !!Vendor !!Model !!Year !!kV !!Gun !!Resolution (nm) !!Features !!List price !!Ask price !!Manual !!Schem !!SW !!Notes | + | !Image !!Vendor !!Model !!Year !!kV !!Gun !!Resolution (nm) !!Features !!List price !!Ask price !!Manual !!Schem !!SW !!Notes |
|- | |- | ||
− | | || Hitachi || ? || 1954 || 300 || || || || || || || || || [1960s] | + | | || Hitachi || ? || 1954 || 300 || || || || || || || || || [1960s] |
|- | |- | ||
− | | || Hitachi || H-1250 || 1976 || 1250 || || 0.204 || || || || || || || Successor to HU-3000 [1970s] | + | | || Hitachi || H-1250 || 1976 || 1250 || || 0.204 || || || || || || || Successor to HU-3000 [1970s] |
|- | |- | ||
− | | || Hitachi || H-1300S || 1982 || 1300 || || || || || || || || || " based on ion radiation" [1980s] | + | | || Hitachi || H-1300S || 1982 || 1300 || || || || || || || || || " based on ion radiation" [1980s] |
|- | |- | ||
− | | || Hitachi || HFS-2 || 1972 || || FE || 3 || || || || || || || "first SEM to use a field emission gun as an electron source" [1970s] | + | | || Hitachi || HFS-2 || 1972 || || FE || 3 || || || || || || || "first SEM to use a field emission gun as an electron source" [1970s] |
|- | |- | ||
− | | || Hitachi || HSM-2A || 1971 || 40 || || 15 || EDS, WDS || || || || || || [1970s] | + | | || Hitachi || HSM-2A || 1971 || 40 || || 15 || EDS, WDS || || || || || || [1970s] |
|- | |- | ||
− | | || Hitachi || HU-500 || 1964 || 500 || || || || || || || || || [1960s] | + | | || Hitachi || HU-500 || 1964 || 500 || || || || || || || || || [1960s] |
|- | |- | ||
− | | || Hitachi || HU-650 || 1968 || 650 || || || || || || || || || [1960s] | + | | || Hitachi || HU-650 || 1968 || 650 || || || || || || || || || [1960s] |
|- | |- | ||
− | | || Hitachi || HU-1000 || 1969 || 1000 || || || || || || || || || [1960s] | + | | || Hitachi || HU-1000 || 1969 || 1000 || || || || || || || || || [1960s] |
|- | |- | ||
− | | || Hitachi || HU-3000 || 1970 || 3000 || || 0.46 || || || || || || || "accelerating voltage was the highest ever for an electron microscope" [1970s] | + | | || Hitachi || HU-3000 || 1970 || 3000 || || 0.46 || || || || || || || "accelerating voltage was the highest ever for an electron microscope" [1970s] |
|- | |- | ||
− | | || Hitachi || S-450 || 1977 || || || || || || || || || || "samples up to 4 inches" [1970s] | + | | || Hitachi || S-450 || 1977 || || || || || || || || || || "samples up to 4 inches" [1970s] |
|- | |- | ||
− | | || Hitachi || S-500 || 1975 || || || || || || | + | | || Hitachi || S-500 || 1975 || || || || || || [http://www.ebay.com/itm/Hitachi-S-500-Scanning-Electron-Microscope-/181197721171?pt=LH_DefaultDomain_0&hash=item2a3039ce53 6,500 refurbished 10/05/2013] || || || || "two 8 inch CRT displays, and featured automatic recording of image data (including magnification, acceleration voltage, and film number) directly on the micrograph" [1970s] ] |
|- | |- | ||
− | | || Hitachi || S-510 || || || || || EDX || || || || || || | + | | || Hitachi || S-510 || || || || || EDX || || || || || || [http://www.hht-eu.com/cms/6562.html ref] |
|- | |- | ||
− | | || Hitachi || S-520 || || || || || || || | + | | || Hitachi || S-520 || || || || || || || [http://www.ebay.com/itm/Hitachi-S-520-Scanning-Electron-Microscope-SEM-Vacuum-TSK-Oil-Diffusion-Pump-/310391896582?pt=LH_DefaultDomain_0&hash=item4844cc7a06 8950] || || || || |
|- | |- | ||
− | | || Hitachi || S-530 || || || || || || || | + | | || Hitachi || S-530 || || || || || || || [http://www.ebay.com/itm/Hitachi-S-530-Scanning-Electron-Microscope-with-WDS-/261208885140?pt=LH_DefaultDomain_0&hash=item3cd1434794 9500] || || || || |
|- | |- | ||
− | | || Hitachi || S-570 || || || || || || || | + | | || Hitachi || S-570 || || || || || || || [http://www.ebay.com/itm/Hitachi-S-570-SEM-Scanning-Electron-Microscope-/190638433369?pt=LH_DefaultDomain_0&hash=item2c62efa459 4,900 non-working 10/05/2013] || || [http://siliconpr0n.org/media/hitachi/s-570/S-570 Schematics.pdf Yes] || "As an option the S-570 is available with LaB6 gun for large probe currents and low voltage applications" [http://www.hht-eu.com/cms/4731.html ref] |
|- | |- | ||
− | | || Hitachi || S-800 || || || || || || || | + | | || Hitachi || S-800 || || || || || || || [http://www.ebay.com/itm/Hitachi-S800-Scanning-Electron-Microscope-/171142626069?pt=LH_DefaultDomain_0&hash=item27d8e53b15 $6,700 used 10/05/2013] || || [http://siliconpr0n.org/media/hitachi/s-800/S-800 Schematics Manual.pdf Yes] || [http://www.hht-eu.com/cms/4713.html ref] |
|- | |- | ||
− | | || Hitachi || S-806 || || || || || || || || || || || "uses a cold field emitter as electron gun" | + | | || Hitachi || S-806 || || || || || || || || || || || "uses a cold field emitter as electron gun" [http://www.hht-eu.com/cms/4719.html ref] |
|- | |- | ||
− | | || Hitachi || S-806C || || || || || || || || || || || | + | | || Hitachi || S-806C || || || || || || || || || || || |
|- | |- | ||
− | | || Hitachi || S-2100 || || || || || || || || || || || | + | | || Hitachi || S-2100 || || || || || || || || || || || |
|- | |- | ||
− | | || Hitachi || S-2300 || || || || || WDX, EDX || || | + | | || Hitachi || S-2300 || || || || || WDX, EDX || || [http://www.ebay.com/itm/G75921-Hitachi-S-2300-Scanning-Electron-Microscope-/330998984221?pt=LH_DefaultDomain_0&hash=item4d1113ae1d $4,999 non-working 10/05/2013] || || [http://siliconpr0n.org/media/hitachi/s-2300/S-2300 Schematics Manual.pdf Yes] || [http://www.hht-eu.com/cms/6475.html ref] |
|- | |- | ||
− | | | + | | [[File:kitmondo_hitachi_s-2400_7ee58f4d-4bef-4cd0-acd2-2b74d6987591.jpg|300 px]] <br />[http://www.kitmondo.com/hitachi-s-2400/ref478043 Source] || Hitachi || S-2400 || || || || || || || || || || || |
|- | |- | ||
− | | || Hitachi || S-2460N || || || || || || || || || | + | | || Hitachi || S-2460N || || || || || || || || || [http://siliconpr0n.org/media/hitachi/s-2460n/S-2460N Schematics Manual.pdf Yes] || || |
|- | |- | ||
− | | || Hitachi || S-2500 || || || || || || || || || || || | + | | || Hitachi || S-2500 || || || || || || || || || || || |
|- | |- | ||
− | | || Hitachi || S-2600H || || || || || || || || || | + | | || Hitachi || S-2600H || || || || || || || || || [http://siliconpr0n.org/media/hitachi/S-3500NH-S3000NH-S2600NH Schematics Manual.pdf Yes] || || |
|- | |- | ||
− | | || Hitachi || S-2600N || || || || || || || || || | + | | || Hitachi || S-2600N || || || || || || || || || [http://siliconpr0n.org/media/hitachi/S-3500NH-S3000NH-S2600NH Schematics Manual.pdf Yes] || || |
|- | |- | ||
− | | || Hitachi || S-2700 || || || || || || || || || || || | + | | || Hitachi || S-2700 || || || || || || || || || || || |
|- | |- | ||
− | | || Hitachi || S-3000H || || || || 3nm @ 30kV || || || || || | + | | || Hitachi || S-3000H || || || || 3nm @ 30kV || || || || || [http://siliconpr0n.org/media/hitachi/S-3500NH-S3000NH-S2600NH Schematics Manual.pdf Yes] || || |
|- | |- | ||
− | | | + | | [[File:kitmondo_hitachi_s-3000n_ef3890fa-3989-4aeb-8c2e-4cf59988c489.jpg|300 px]] <br />[http://www.kitmondo.com/hitachi-s-3000n/ref487575 Source] || Hitachi || S-3000N || || || || || || || || || [http://siliconpr0n.org/media/hitachi/S-3500NH-S3000NH-S2600NH Schematics Manual.pdf Yes] || || |
|- | |- | ||
− | | || Hitachi || S-3200N || || || || || || || || | + | | || Hitachi || S-3200N || || || || || || || || [http://siliconpr0n.org/media/hitachi/s-3200n/S3200N.pdf Yes] || || || |
|- | |- | ||
− | | | + | | [[File:kitmondo_hitachi_s-3200h_hitachi_s-3200h.jpg|300 px]] <br />[http://www.kitmondo.com/hitachi-s-3200h/ref242817 Source] || Hitachi || S-3500H || || || || || || || || || [http://siliconpr0n.org/media/hitachi/S-3500NH-S3000NH-S2600NH Schematics Manual.pdf Yes] || || |
|- | |- | ||
− | | || Hitachi || S-3500N || || || || || || || || || | + | | || Hitachi || S-3500N || || || || || || || || || [http://siliconpr0n.org/media/hitachi/S-3500NH-S3000NH-S2600NH Schematics Manual.pdf Yes] || || |
|- | |- | ||
− | | || Hitachi || S-4000 || || || || || || || || || | + | | || Hitachi || S-4000 || || || || || || || || || [http://siliconpr0n.org/media/hitachi/s-4000/S-4000 Schematics Manual.pdf Yes] || || |
|- | |- | ||
− | | || Hitachi || S-4100 || || || || || || || || || || || | + | | || Hitachi || S-4100 || || || || || || || || || || || |
|- | |- | ||
− | | | + | | [[File:kitmondo_hitachi_s-4200_h4200.jpg|300 px]] <br />[http://www.kitmondo.com/hitachi-s-4200/ref242815 Source] || Hitachi || S-4200 || || || FE || 5 nm @ 1 kV <br />1.6 nm @ 15 kV || || || || || || || |
|- | |- | ||
− | | | + | | [[File:kitmondo_hitachi_s-4500_109hitachis-4_106.jpg|300 px]] <br />[http://www.kitmondo.com/hitachi-s-4500/ref284598 Source] || Hitachi || S-4500 || || || || || || || || || [http://siliconpr0n.org/media/hitachi/s-4500/S-4500 Schematics Manual.pdf Yes] || || |
|- | |- | ||
− | | || Hitachi || S-4700 || || || || || || || || || | + | | || Hitachi || S-4700 || || || || || || || || || [http://siliconpr0n.org/media/hitachi/s-4700/S-4700 Schematics.pdf Yes] || || |
|- | |- | ||
− | | || Hitachi || S-4700-II || || || || || || || | + | | || Hitachi || S-4700-II || || || || || || || [http://www.ebay.com/itm/Hitachi-S-4700-II-Scanning-Electron-Microscope-with-Thermo-Noran-Vantage-EDS-SEM-/130878728136?pt=LH_DefaultDomain_0&hash=item1e78fae7c8 160,000] || || || || |
|- | |- | ||
− | | || Hitachi || S-4800 || || || || || || || || | + | | || Hitachi || S-4800 || || || || || || || || [http://siliconpr0n.org/media/hitachi/s-4800/SEM-Hitachi-S-4800-Instruction-Manual.pdf Yes] || || || |
|- | |- | ||
− | | || Hitachi || S-5200 || || || || || || || || || | + | | || Hitachi || S-5200 || || || || || || || || || [http://siliconpr0n.org/media/hitachi/s-5200/S-5200service-schematics.pdf Yes] || || |
|- | |- | ||
− | | || Hitachi || S-6000 || || || || || || || || || || || | + | | || Hitachi || S-6000 || || || || || || || || || || || |
|- | |- | ||
− | | || Hitachi || S-6100 || || || || || || || || || || || | + | | || Hitachi || S-6100 || || || || || || || || || || || |
|- | |- | ||
− | | || Hitachi || S-6200 || || || || || || || || || || || | + | | || Hitachi || S-6200 || || || || || || || || || || || |
|- | |- | ||
− | | || Hitachi || S-6280H || || || || || || || || || || || | + | | || Hitachi || S-6280H || || || || || || || || || || || [http://www.hht-eu.com/cms/4725.html ref] |
|- | |- | ||
− | | || Hitachi || S-6600 || || || || || || || || || || || | + | | || Hitachi || S-6600 || || || || || || || || || || || |
|- | |- | ||
− | | || Hitachi || S-6780 || || || || || || || | + | | || Hitachi || S-6780 || || || || || || || [http://www.ebay.com/itm/Hitachi-SEM-Scanning-Electron-Microscope-S-6780-as-is-/140744408886?pt=LH_DefaultDomain_0&hash=item20c5053f36 10,000] || || || || |
|- | |- | ||
− | | || Hitachi || S-7000 || || || || || || || || || || || | + | | || Hitachi || S-7000 || || || || || || || || || || || |
|- | |- | ||
− | | | + | | [[File:kitmondo_hitachi_s-7800h_109hitachis-7_108.jpg|300 px]] <br />[http://www.kitmondo.com/hitachi-s-7800h-cd-sem/ref284600 Source] || Hitachi || S-7800H || || || || || || || || || || || "Critical Dimension (CD)" SEM ] |
|- | |- | ||
− | | | + | | [[File:kitmondo_hitachi_s-8840_109hitachis-8_110.jpg|300 px]] <br />[http://www.kitmondo.com/hitachi-s-8840/ref284602 Source] || Hitachi || S-8840 || || || || || || || || || || || |
|- | |- | ||
− | | | + | | [[File:kitmondo_hitachi_s-9200_109hitachis-9_112.jpg|300 px]] <br />[http://www.kitmondo.com/hitachi-s-9200/ref284604 Source] || Hitachi || S-9200 || || || || || || || || || || || |
|- | |- | ||
− | | | + | | [[File:kitmondo_hitachi_s-9220_109hitachis-9_113.jpg|300 px]] <br />[http://www.kitmondo.com/hitachi-s-9220-sem/ref284605 Source] || Hitachi || S-9220 || || || || || || || || || || || |
|- | |- | ||
− | | || Hitachi || S-9300 || || || || || || || | + | | || Hitachi || S-9300 || || || || || || || [http://www.ebay.com/itm/Hitachi-SEM-9300-Electronic-Microscope-Working-/290921996061?pt=LH_DefaultDomain_0&hash=item43bc4d5f1d 8,000 column only] || || || [http://www.ebay.com/itm/Hitachi-S-9300-Column-Scanning-Electron-Microscope-/131010537853?pt=LH_DefaultDomain_0&hash=item1e80d6297d ref] |
|- | |- | ||
− | | || Hitachi || SU-1500 || || || || || || || || || || || | + | | || Hitachi || SU-1500 || || || || || || || || || || || |
|- | |- | ||
− | | || Hitachi || SU-8010 || || || || || || || || || || || | + | | || Hitachi || SU-8010 || || || || || || || || || || || |
|- | |- | ||
− | | || Hitachi || SU-8020 || || || || || || || || || || || | + | | || Hitachi || SU-8020 || || || || || || || || || || || |
|- | |- | ||
− | | || Hitachi || SU-8030 || || || || || || || || || || || | + | | || Hitachi || SU-8030 || || || || || || || || || || || |
|- | |- | ||
− | | || Hitachi || SU-8040 || || || || || || || || || || || | + | | || Hitachi || SU-8040 || || || || || || || || || || || |
|- | |- | ||
− | | || Hitachi || TM3000 || || || || || || || || | + | | || Hitachi || TM3000 || || || || || || || || [http://siliconpr0n.org/media/hitachi/tm3000/tm_scopeeg.pdf Yes] || || || |
|- | |- | ||
− | | || Hitachi || XMA-5b || 1966 || || || || || || || || || || "Hitachi called its 1966 XMA-5b an EPMA with SEM. This was more of an electron probe microanalyzer than an SEM, and was most likely Hitachi's attempt to quickly join in the SEM business" [1960s] | + | | || Hitachi || XMA-5b || 1966 || || || || || || || || || || "Hitachi called its 1966 XMA-5b an EPMA with SEM. This was more of an electron probe microanalyzer than an SEM, and was most likely Hitachi's attempt to quickly join in the SEM business" [1960s] |
|- | |- | ||
|} | |} | ||
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Revision as of 11:08, 26 December 2018
Image | Vendor | Model | Year | kV | Gun | Resolution (nm) | Features | List price | Ask price | Manual | Schem | SW | Notes |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|
Hitachi | ? | 1954 | 300 | [1960s] | |||||||||
Hitachi | H-1250 | 1976 | 1250 | 0.204 | Successor to HU-3000 [1970s] | ||||||||
Hitachi | H-1300S | 1982 | 1300 | " based on ion radiation" [1980s] | |||||||||
Hitachi | HFS-2 | 1972 | FE | 3 | "first SEM to use a field emission gun as an electron source" [1970s] | ||||||||
Hitachi | HSM-2A | 1971 | 40 | 15 | EDS, WDS | [1970s] | |||||||
Hitachi | HU-500 | 1964 | 500 | [1960s] | |||||||||
Hitachi | HU-650 | 1968 | 650 | [1960s] | |||||||||
Hitachi | HU-1000 | 1969 | 1000 | [1960s] | |||||||||
Hitachi | HU-3000 | 1970 | 3000 | 0.46 | "accelerating voltage was the highest ever for an electron microscope" [1970s] | ||||||||
Hitachi | S-450 | 1977 | "samples up to 4 inches" [1970s] | ||||||||||
Hitachi | S-500 | 1975 | 6,500 refurbished 10/05/2013 | "two 8 inch CRT displays, and featured automatic recording of image data (including magnification, acceleration voltage, and film number) directly on the micrograph" [1970s] ] | |||||||||
Hitachi | S-510 | EDX | ref | ||||||||||
Hitachi | S-520 | 8950 | |||||||||||
Hitachi | S-530 | 9500 | |||||||||||
Hitachi | S-570 | 4,900 non-working 10/05/2013 | Schematics.pdf Yes | "As an option the S-570 is available with LaB6 gun for large probe currents and low voltage applications" ref | |||||||||
Hitachi | S-800 | $6,700 used 10/05/2013 | Schematics Manual.pdf Yes | ref | |||||||||
Hitachi | S-806 | "uses a cold field emitter as electron gun" ref | |||||||||||
Hitachi | S-806C | ||||||||||||
Hitachi | S-2100 | ||||||||||||
Hitachi | S-2300 | WDX, EDX | $4,999 non-working 10/05/2013 | Schematics Manual.pdf Yes | ref | ||||||||
Source |
Hitachi | S-2400 | |||||||||||
Hitachi | S-2460N | Schematics Manual.pdf Yes | |||||||||||
Hitachi | S-2500 | ||||||||||||
Hitachi | S-2600H | Schematics Manual.pdf Yes | |||||||||||
Hitachi | S-2600N | Schematics Manual.pdf Yes | |||||||||||
Hitachi | S-2700 | ||||||||||||
Hitachi | S-3000H | 3nm @ 30kV | Schematics Manual.pdf Yes | ||||||||||
Source |
Hitachi | S-3000N | Schematics Manual.pdf Yes | ||||||||||
Hitachi | S-3200N | Yes | |||||||||||
Source |
Hitachi | S-3500H | Schematics Manual.pdf Yes | ||||||||||
Hitachi | S-3500N | Schematics Manual.pdf Yes | |||||||||||
Hitachi | S-4000 | Schematics Manual.pdf Yes | |||||||||||
Hitachi | S-4100 | ||||||||||||
Source |
Hitachi | S-4200 | FE | 5 nm @ 1 kV 1.6 nm @ 15 kV |
|||||||||
Source |
Hitachi | S-4500 | Schematics Manual.pdf Yes | ||||||||||
Hitachi | S-4700 | Schematics.pdf Yes | |||||||||||
Hitachi | S-4700-II | 160,000 | |||||||||||
Hitachi | S-4800 | Yes | |||||||||||
Hitachi | S-5200 | Yes | |||||||||||
Hitachi | S-6000 | ||||||||||||
Hitachi | S-6100 | ||||||||||||
Hitachi | S-6200 | ||||||||||||
Hitachi | S-6280H | ref | |||||||||||
Hitachi | S-6600 | ||||||||||||
Hitachi | S-6780 | 10,000 | |||||||||||
Hitachi | S-7000 | ||||||||||||
Source |
Hitachi | S-7800H | "Critical Dimension (CD)" SEM ] | ||||||||||
Source |
Hitachi | S-8840 | |||||||||||
Source |
Hitachi | S-9200 | |||||||||||
Source |
Hitachi | S-9220 | |||||||||||
Hitachi | S-9300 | 8,000 column only | ref | ||||||||||
Hitachi | SU-1500 | ||||||||||||
Hitachi | SU-8010 | ||||||||||||
Hitachi | SU-8020 | ||||||||||||
Hitachi | SU-8030 | ||||||||||||
Hitachi | SU-8040 | ||||||||||||
Hitachi | TM3000 | Yes | |||||||||||
Hitachi | XMA-5b | 1966 | "Hitachi called its 1966 XMA-5b an EPMA with SEM. This was more of an electron probe microanalyzer than an SEM, and was most likely Hitachi's attempt to quickly join in the SEM business" [1960s] |