Difference between revisions of "FEI FIB 200"
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Revision as of 00:55, 13 February 2019
This seems to be a pretty popular FIB. Based on the XL30?
Refilling
Videos for GIS refill: https://www.youtube.com/channel/UCebcTTg_Al48R9Uxdy8sS9Q
Chemicals Markus is using to refill (TODO: get image of Ga bottle, process):
Calibration
General procedure is to wobble the focus and minimize how much drift occurs when sweeping. Looks something like this: https://youtu.be/Ln2GDMw-Vf8
Markus
mcmaster: took a bunch of notes, but they were lost. I still have the pictures though
Problems when acquired:
- LMIS empty
- Fabricated replacement using Ga from Sigma-Aldrich, tungsten wire, syringe, and DIY spot welder
- Sources were refilled?
- Detector tube bad (outgassed)
- Replaced
- XeF2 leak. Damaged stage gears
- Removed XeF2 GIS and blanked off
- Bought similar replacement gears, machined to fit
- TOOD: install new seals. Requires special XeF2 rated version not in other GIS
- Faulty power supply
- Repaired module (replaced resistor?)
- Bad seal on pneumatic stabilizer
- Bought (silicone?) sheet to repair
- Turbo pump sometimes noisy, but seems to still work
GIS
GIS cluster. Note one of the injectors missing (more on it below)
A new Pt injector tip:
This XeF2 injector sat for a long time in storage. The XeF2 ate through the seals and caused considerable damage in the FIB
Computer
Misc
Aperture motor test: https://youtu.be/TIqlTjR2UH4
Test edit after calibration (cut trace):
GIS controller (pneumatics + heater controllers):
High voltage power suppl:
Main power distribution:
