Difference between revisions of "FIB"
Line 12: | Line 12: | ||
| || FEI || Dual Beam Expida 1275 || || || || Y || || || || || || || || | | || FEI || Dual Beam Expida 1275 || || || || Y || || || || || || || || | ||
|- | |- | ||
− | | || FEI || ExSolve || ~2015 || || || Y || || || || || || || || <br /> [http://www.fei.com/products/dualbeam/exsolve/ | Link | + | | || FEI || ExSolve || ~2015 || || || Y || || || || || || || || <br /> [http://www.fei.com/products/dualbeam/exsolve/ | Link] <br /> <br /> BIg, for wafers |
|- | |- | ||
| || FEI || FIB 200 || || || || N || || || || [http://www.technicalsalessolutions.com/ 225-250k] || || || || | | || FEI || FIB 200 || || || || N || || || || [http://www.technicalsalessolutions.com/ 225-250k] || || || || |
Revision as of 14:55, 26 December 2018
Image | Vendor | Model | Year | Max nA | SEM kV | SEM Gun | SEM resolution (nm) | Features | List price | Ask price | Manual | Schem | SW | Notes |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
FEI | Dual Beam 235 | Y | 550k | |||||||||||
FEI | Dual Beam 830 | Y | 400k | |||||||||||
FEI | Dual Beam 835 | Y | 425k | |||||||||||
FEI | Dual Beam 865 | Y | 495k | |||||||||||
FEI | Dual Beam Expida 1275 | Y | ||||||||||||
FEI | ExSolve | ~2015 | Y | Link] BIg, for wafers | ||||||||||
FEI | FIB 200 | N | 225-250k | |||||||||||
FEI | FIB800 | N | 225k | |||||||||||
FEI | Helios Nanolab | ~2015 | Y | [1] | ||||||||||
FEI | Nova 600 NanoLab | ~2003 | Y | |||||||||||
FEI | Scios | ~2015 | Y | [2] | ||||||||||
FEI | V400ACE | ~2015 | [3] | |||||||||||
FEI | Versa 3D DualBeam | ~2015 | Y | Optional: ESEM | [4] | |||||||||
FEI | Vion | ~2015 | [5] | |||||||||||
Helios | 460HP | Y | ||||||||||||
LEO-Zeiss | 1540 XB | Y | ||||||||||||
Micrion | 9500 | N | 100k | |||||||||||
Zeiss | Crossbeam 340 | ~2015 | 100? | Y | [6] | |||||||||
Zeiss | Crossbeam 540 | ~2015 | 100? | Y | [7] | |||||||||
Seiko | SMI3050 SE | 650k |
Maybe this system could be scavenged for instruments to use on another SEM: [8]