Difference between revisions of "SEM P-Z"
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Revision as of 03:34, 19 March 2021
| Image | Vendor | Model | Year | kV | Gun | Resolution (nm) | Features | Manual | Schem | SW | Notes |
|---|---|---|---|---|---|---|---|---|---|---|---|
| Phillips | FEG XL 40 | EDAX | |||||||||
| Phillips | 501 | 1977 | 30 | 7 | [1970s] | ||||||
| Phillips | 501B | 1979 | 30? | 7? | EDS, WDS | [1970s] | |||||
| Phillips | SEM 505 | 1980 | "new doped-yttrium silicate scintillator for the detection of backscattered electrons in its 1980 model SEM 505; this new detector was 200 times more sensitive to backscattered electrons than previous scintillators" [1980s] | ||||||||
| Phillips | SEM 515 | 1984 | "improved on the 505 by adding computer-controlled automatic focussing and astigmation correction" [1980s] | ||||||||
| Phillips | SEM 525 EB | 1985 | "created for functional testing of ICs" [1980s] | ||||||||
| Phillips | SEM 525 IC | 1985 | "designed for the non-destructive testing of semiconductor wafers" [1980s] | ||||||||
| Phillips | EM 300 accessory | 1968 | "attachment turned the TEM into an STEM" [1960s] | ||||||||
| Phillips | PSEM 500 | 1972 | 50 | 10 | "Philips' first SEM" [1970s] | ||||||
| Phillips | PSEM 500M | 1973 | 50? | 10? | "designed for larger samples, accommodating specimens with dimensions of 153 mm x 146 mm x 84 mm" [1970s] | ||||||
 |
Phillips | XL-30 | W | 3.5nm @ 30kV | |||||||
| RCA | EMU-3 | ||||||||||
| RCA | EMU-4 | ||||||||||
| SEC | SNE-1500M | Manual_eng_042308[1.pdf Yes] | Tabletop ] | ||||||||
| SEC | SNE-3000M | Tabletop | |||||||||
| SEC | SNE-3000MB | Tabletop | |||||||||
| SEC | SNE-3200M | Tabletop | |||||||||
| SEC | SNE-4500M | Tabletop | |||||||||
| Seron | AIS2100C | ||||||||||
| Seron | AIS2200 | ||||||||||
| Seron | AIS2300C | ||||||||||
| Tescan | VEGA3 | Yes | |||||||||
| Topcon | ABT-32 | 5 | |||||||||
| Topcon | ABT-60 | 4 | |||||||||
| Topcon | ABT-150 | ||||||||||
| Topcon | SM-720 | 0.9 | |||||||||
| Zeiss | DSM 950 | 1986 | 30kV | W | 10nm (Spec) | "Digital SEM" | Schematics (ask @tmbinc for access) | "First Digital SEM" == lots of 74xx with a microcontroller here and there; Very similar to DSM960(A) and DSM940 | |||
| Zeiss | DSM 940 | 1988 | |||||||||
| Zeiss | DSM 960 | 1988 | DSM960 Manual | ||||||||
| Zeiss | DSM 942 | 1990 | 30 | ||||||||
| Zeiss | DSM 962 | 1990 | 30 | ||||||||
| Zeiss | DSM 940A | 1990 | 30 | ||||||||
| Zeiss | DSM 962A | 1990 | 30 | ||||||||
| Zeiss | DSM 982 Gemini | 1993 | 30 | FE | First combined electrostatic-magnetic Lens SEM | ||||||
| Zeiss | Supra 35 (VP) | 30 | FE | ||||||||
| Zeiss | Supra 40 (VP) | ||||||||||
| Zeiss | Supra 55 (VP) | FE | 1.7 nm @ 1 kV 2 nm @ 30 kV (VP) |
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| Zeiss | Supra 60 (VP) | ||||||||||
| Zeiss | Ultra 55 | 2003 | 30 | FE | |||||||
| Zeiss | Ultra 60 | ||||||||||
| Zeiss | Ultra Plus | 2008 | 30 | FE | |||||||
| Zeiss | SIGMA | 2009 | 30 | FE | Yes | ||||||
| Zeiss | Sigma HD | 30 | FE | ||||||||
| Zeiss | Merlin | 30 | FE | ||||||||
| Zeiss | Merlin Compact | 30 | FE | ||||||||
| Zeiss | Sigma 300 | 30 | FE | ||||||||
| Zeiss | Sigma 500 | 30 | FE | ||||||||
| Zeiss | GeminiSEM 500 | 2015 | 30 | FE | |||||||
| Zeiss | GeminiSEM 300 | 30 | FE | ||||||||
| Zeiss | GeminiSEM 450 | 2018 | 30 | FE | https://doi.org/10.1017/S1551929518000585 | ||||||
| Zeiss | GeminiSEM 360 | 2020 | 30 | FE | |||||||
| Zeiss | GeminiSEM 460 | 2020 | 30 | FE | |||||||
| Zeiss | GeminiSEM 560 | 2020 | 30 | FE | |||||||
| Zeiss | EVO | 2004 | 30 | W | |||||||
| Zeiss | EVO HD | LaB6 | |||||||||
| Zeiss | EVO MA/LS | 2008 | 30 | W |
