Difference between revisions of "Reactive Ion Etching"
(Created page with " Keywords * (plasma, rf, hf) (amp, amplifier, generator, etcher) = Planar = Ion beam etching machines are essentially planar RIE machines without a process gas? Should be...") |
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| + | McMaster unit: [[Technics PE II]] | ||
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Keywords | Keywords | ||
| − | * (plasma, rf, hf) (amp, amplifier, generator, etcher) | + | *(plasma, rf, hf) (amp, amplifier, generator, etcher) |
| − | = Planar = | + | =Planar= |
Ion beam etching machines are essentially planar RIE machines without a process gas? Should be easily convertable to RIE machine. | Ion beam etching machines are essentially planar RIE machines without a process gas? Should be easily convertable to RIE machine. | ||
| − | = Barrel = | + | =Barrel= |
| − | = Unsorted = | + | =Unsorted= |
Desktop machines: | Desktop machines: | ||
| − | * Diener Zepto: seems to be a lower cost desktop system. Overall unit looks nice for small prep work | + | *Diener Zepto: seems to be a lower cost desktop system. Overall unit looks nice for small prep work |
| − | ** Type: barrel | + | **Type: barrel |
| − | ** Thierry Zepto Low Pressure Plasma System | + | **Thierry Zepto Low Pressure Plasma System |
| − | ** 40 kHz (compare with 13.56 MHz) | + | **40 kHz (compare with 13.56 MHz) |
| − | ** 2 Needle Valves | + | **2 Needle Valves |
| − | ** Manual Control (compare with automatic) | + | **Manual Control (compare with automatic) |
| − | ** Borosilicate Glass Chamber (compare with quartz chamber) \\ | + | **Borosilicate Glass Chamber (compare with quartz chamber) \\ |
| − | ** mne: I had a phone call with a Diener tech: The Zepto is a barrel etcher, so it won't be useful for anisotropic IC RIE etching. The lowest cost system they have for corrosive RIE etching is the13.56MHz FEMTO Series. The price (including an active charcoal exhaust scrubber but without any fancy device control and backing pump) is approx. EUR 15k. \\ | + | **mne: I had a phone call with a Diener tech: The Zepto is a barrel etcher, so it won't be useful for anisotropic IC RIE etching. The lowest cost system they have for corrosive RIE etching is the13.56MHz FEMTO Series. The price (including an active charcoal exhaust scrubber but without any fancy device control and backing pump) is approx. EUR 15k. \\ |
| − | * SPI SUPPLIES Plasma Prep Plasma Etcher Plasma Asher Plasma Cleaner | + | *SPI SUPPLIES Plasma Prep Plasma Etcher Plasma Asher Plasma Cleaner |
| − | ** Very basic but looks like it should be functional | + | **Very basic but looks like it should be functional |
| − | ** Adjustable RF power to 100W | + | **Adjustable RF power to 100W |
| − | ** Has an RF tuning knob…frequency range? | + | **Has an RF tuning knob…frequency range? |
| − | * ANTON PAAR CPA-1 COOL PLASMA ASHER | + | *ANTON PAAR CPA-1 COOL PLASMA ASHER |
| − | ** Quartz chamber | + | **Quartz chamber |
| − | ** Looks like a nice unit | + | **Looks like a nice unit |
| − | ** Intended for biotech composition analysis ("digestion"). How hard would it be to re-purpose? | + | **Intended for biotech composition analysis ("digestion"). How hard would it be to re-purpose? |
| − | * Harrick: Looks like an entry level desktop unit | + | *Harrick: Looks like an entry level desktop unit |
| − | * Electron Microscopy Sciences: EMS 1050 | + | *Electron Microscopy Sciences: EMS 1050 |
Table sized machines: | Table sized machines: | ||
| − | * Nordson MARCH PM-600 Barrel Plasma Etcher: looks to be a nice unit although much larger than some tabletop units | + | *Nordson MARCH PM-600 Barrel Plasma Etcher: looks to be a nice unit although much larger than some tabletop units |
| − | * Plasmatic Systems Plasma-Preen II 862 Plasma Cleaning & Etching System | + | *Plasmatic Systems Plasma-Preen II 862 Plasma Cleaning & Etching System |
| − | ** Looks like a super industrial kitchen microwave | + | **Looks like a super industrial kitchen microwave |
| − | ** Looks like it has some nice features like maybe better gas diffusion ("show head" type) | + | **Looks like it has some nice features like maybe better gas diffusion ("show head" type) |
| − | * Technics PEII A, Table Top Asher/Desum System | + | *Technics PEII A, Table Top Asher/Desum System |
| − | ** Type: parallel plate | + | **Type: parallel plate |
| − | ** 11" parallel plate | + | **11" parallel plate |
Smallish 13.56 MHz RF supplies: | Smallish 13.56 MHz RF supplies: | ||
| − | * March Plasmod Plasma Asher/Etcher, MPS 300 RF Generator | + | *March Plasmod Plasma Asher/Etcher, MPS 300 RF Generator |
| − | * Seren R601 600W RF Generator Plasma Power Supply 9600610003 13.56MHz March | + | *Seren R601 600W RF Generator Plasma Power Supply 9600610003 13.56MHz March |
| − | * Nordson MARCH PM-600 Barrel Plasma Etcher | + | *Nordson MARCH PM-600 Barrel Plasma Etcher |
| − | * March Plasma Etcher Component | + | *March Plasma Etcher Component |
| − | * Adtec AX-2000III 2000W RF Plasma Generator 13.56MHz | + | *Adtec AX-2000III 2000W RF Plasma Generator 13.56MHz |
Medium machines: | Medium machines: | ||
| − | * Plasma-Therm Model 70 | + | *Plasma-Therm Model 70 |
| − | * TECHNICS MACRO 8800 | + | *TECHNICS MACRO 8800 |
| − | * Axic MultiMode HF-8 | + | *Axic MultiMode HF-8 |
| − | * TECHNICS PLASMA GmbH PVA TEPLA 100-E | + | *TECHNICS PLASMA GmbH PVA TEPLA 100-E |
| − | * TOK OPMA 1250 | + | *TOK OPMA 1250 |
| − | * TOK OPM-1250ALBM | + | *TOK OPM-1250ALBM |
| − | * OptiGlow ACE | + | *OptiGlow ACE |
| − | * TEPLA AUTOLOAD 300 | + | *TEPLA AUTOLOAD 300 |
| − | * Branson IPC 2000 3000 4000 | + | *Branson IPC 2000 3000 4000 |
Floor model: | Floor model: | ||
| − | * MetroLine / IPC 7102 Barrel Plasma | + | *MetroLine / IPC 7102 Barrel Plasma |
| − | * Gasonic 2000LL | + | *Gasonic 2000LL |
| − | * Drytek MegaStrip6 | + | *Drytek MegaStrip6 |
| − | * Matrix 10 Plasma | + | *Matrix 10 Plasma |
| − | * Gasonics Aura 1000 (1008) | + | *Gasonics Aura 1000 (1008) |
| − | * Matrix 105 Plasma Asher Descum | + | *Matrix 105 Plasma Asher Descum |
| − | = Plasmaline = | + | =Plasmaline= |
[[File:equipment_rie_plasmaline_unk0_front.jpg|300 px]][[File:equipment_rie_plasmaline_unk0_inside.jpg|300 px]][[File:equipment_rie_plasmaline_unk0_door.jpg|300 px]][[File:equipment_rie_plasmaline_unk0_back.jpg|300 px]] | [[File:equipment_rie_plasmaline_unk0_front.jpg|300 px]][[File:equipment_rie_plasmaline_unk0_inside.jpg|300 px]][[File:equipment_rie_plasmaline_unk0_door.jpg|300 px]][[File:equipment_rie_plasmaline_unk0_back.jpg|300 px]] | ||
Latest revision as of 02:40, 7 May 2020
McMaster unit: Technics PE II
Keywords
- (plasma, rf, hf) (amp, amplifier, generator, etcher)
Contents
Planar
Ion beam etching machines are essentially planar RIE machines without a process gas? Should be easily convertable to RIE machine.
Barrel
Unsorted
Desktop machines:
- Diener Zepto: seems to be a lower cost desktop system. Overall unit looks nice for small prep work
- Type: barrel
- Thierry Zepto Low Pressure Plasma System
- 40 kHz (compare with 13.56 MHz)
- 2 Needle Valves
- Manual Control (compare with automatic)
- Borosilicate Glass Chamber (compare with quartz chamber) \\
- mne: I had a phone call with a Diener tech: The Zepto is a barrel etcher, so it won't be useful for anisotropic IC RIE etching. The lowest cost system they have for corrosive RIE etching is the13.56MHz FEMTO Series. The price (including an active charcoal exhaust scrubber but without any fancy device control and backing pump) is approx. EUR 15k. \\
- SPI SUPPLIES Plasma Prep Plasma Etcher Plasma Asher Plasma Cleaner
- Very basic but looks like it should be functional
- Adjustable RF power to 100W
- Has an RF tuning knob…frequency range?
- ANTON PAAR CPA-1 COOL PLASMA ASHER
- Quartz chamber
- Looks like a nice unit
- Intended for biotech composition analysis ("digestion"). How hard would it be to re-purpose?
- Harrick: Looks like an entry level desktop unit
- Electron Microscopy Sciences: EMS 1050
Table sized machines:
- Nordson MARCH PM-600 Barrel Plasma Etcher: looks to be a nice unit although much larger than some tabletop units
- Plasmatic Systems Plasma-Preen II 862 Plasma Cleaning & Etching System
- Looks like a super industrial kitchen microwave
- Looks like it has some nice features like maybe better gas diffusion ("show head" type)
- Technics PEII A, Table Top Asher/Desum System
- Type: parallel plate
- 11" parallel plate
Smallish 13.56 MHz RF supplies:
- March Plasmod Plasma Asher/Etcher, MPS 300 RF Generator
- Seren R601 600W RF Generator Plasma Power Supply 9600610003 13.56MHz March
- Nordson MARCH PM-600 Barrel Plasma Etcher
- March Plasma Etcher Component
- Adtec AX-2000III 2000W RF Plasma Generator 13.56MHz
Medium machines:
- Plasma-Therm Model 70
- TECHNICS MACRO 8800
- Axic MultiMode HF-8
- TECHNICS PLASMA GmbH PVA TEPLA 100-E
- TOK OPMA 1250
- TOK OPM-1250ALBM
- OptiGlow ACE
- TEPLA AUTOLOAD 300
- Branson IPC 2000 3000 4000
Floor model:
- MetroLine / IPC 7102 Barrel Plasma
- Gasonic 2000LL
- Drytek MegaStrip6
- Matrix 10 Plasma
- Gasonics Aura 1000 (1008)
- Matrix 105 Plasma Asher Descum
Plasmaline
