Reactive Ion Etching

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Keywords

  • (plasma, rf, hf) (amp, amplifier, generator, etcher)


Planar

Ion beam etching machines are essentially planar RIE machines without a process gas? Should be easily convertable to RIE machine.


Barrel

Unsorted

Desktop machines:

  • Diener Zepto: seems to be a lower cost desktop system. Overall unit looks nice for small prep work
    • Type: barrel
    • Thierry Zepto Low Pressure Plasma System
    • 40 kHz (compare with 13.56 MHz)
    • 2 Needle Valves
    • Manual Control (compare with automatic)
    • Borosilicate Glass Chamber (compare with quartz chamber) \\
    • mne: I had a phone call with a Diener tech: The Zepto is a barrel etcher, so it won't be useful for anisotropic IC RIE etching. The lowest cost system they have for corrosive RIE etching is the13.56MHz FEMTO Series. The price (including an active charcoal exhaust scrubber but without any fancy device control and backing pump) is approx. EUR 15k. \\
  • SPI SUPPLIES Plasma Prep Plasma Etcher Plasma Asher Plasma Cleaner
    • Very basic but looks like it should be functional
    • Adjustable RF power to 100W
    • Has an RF tuning knob…frequency range?
  • ANTON PAAR CPA-1 COOL PLASMA ASHER
    • Quartz chamber
    • Looks like a nice unit
    • Intended for biotech composition analysis ("digestion"). How hard would it be to re-purpose?
  • Harrick: Looks like an entry level desktop unit
  • Electron Microscopy Sciences: EMS 1050

Table sized machines:

  • Nordson MARCH PM-600 Barrel Plasma Etcher: looks to be a nice unit although much larger than some tabletop units
  • Plasmatic Systems Plasma-Preen II 862 Plasma Cleaning & Etching System
    • Looks like a super industrial kitchen microwave
    • Looks like it has some nice features like maybe better gas diffusion ("show head" type)
  • Technics PEII A, Table Top Asher/Desum System
    • Type: parallel plate
    • 11" parallel plate

Smallish 13.56 MHz RF supplies:

  • March Plasmod Plasma Asher/Etcher, MPS 300 RF Generator
  • Seren R601 600W RF Generator Plasma Power Supply 9600610003 13.56MHz March
  • Nordson MARCH PM-600 Barrel Plasma Etcher
  • March Plasma Etcher Component
  • Adtec AX-2000III 2000W RF Plasma Generator 13.56MHz

Medium machines:

  • Plasma-Therm Model 70
  • TECHNICS MACRO 8800
  • Axic MultiMode HF-8
  • TECHNICS PLASMA GmbH PVA TEPLA 100-E
  • TOK OPMA 1250
  • TOK OPM-1250ALBM
  • OptiGlow ACE
  • TEPLA AUTOLOAD 300
  • Branson IPC 2000 3000 4000

Floor model:

  • MetroLine / IPC 7102 Barrel Plasma
  • Gasonic 2000LL
  • Drytek MegaStrip6
  • Matrix 10 Plasma
  • Gasonics Aura 1000 (1008)
  • Matrix 105 Plasma Asher Descum

Plasmaline

Equipment rie plasmaline unk0 front.jpgEquipment rie plasmaline unk0 inside.jpgEquipment rie plasmaline unk0 door.jpgEquipment rie plasmaline unk0 back.jpg