Technics PE II

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A popular unit. A number of people have this or similar including:

  • John McMaster
  • Markus
  • Sam Z


Specifications:

  • Parallel plate 15" chamber
  • Microprocessor controller
  • 11" electrode
  • Power?
  • 500 Watt @ 30Khz
    • Other source says 300W @ 13.56 MHz
  • Three gas system
  • Wafers
    • 4 4"
    • One 5-8"
  • Weight
    • System: 120 lb
    • Module: 30 lb
    • Pump (which?): 100 lb


https://www.chiphistory.org/274-technics-pe-ii-a-planar-etcher


Components:

  • MKS PDR-C-1A Baratron pressure gauge
    • Original had an on/off switch, new one does not
    • Doesn't really matter since I always want this on if master power is on
    • Had to be replaced, but kept the original display since its part of the Technics chassis, not the Baratron chassis
  • MKS Baratron sensor (which?)
  • TODO: temp controller
  • TODO: timer
  • Filters: HOKE 316SS Filter Element, 2-5 microns, No. 2231

McMaster

Pressure gauge:

  • PS/DVM
  • PDR-C-1A

Previous

Summary

  • Came with bad pressure gauge
    • Tried to order replacement but seller sent wrong part
    • Second replacement installed
    • Think it worked? Needs to be checked out
  • Pressure gauge was likely bypassed
  • Missing manifold valve
    • Replacement ordered but not installed

2020-05-06

Summary:

  • Clear area around it
    • Put Ron back up
  • Order lazy susan
  • Vacuum gauge controller is bad
    • Modified and in bad state: repairs may be difficult
    • Looking to source identical replacement or something new entirely


Vacuum gauge

  • Rewired with colored wires + better connections
  • Still reading bad
    • Negative reading (switch center)
    • Low setpoint can be set (switch left)
    • High setpoint can not be set (switch right). Shows same negative value as center
  • Opened gauge
    • Loose/missing cover screws
    • Several wires have been desoldered
    • Diode is hanging loose
    • Bad state. Probably not worth further troubleshooting
    • Try to source replacement identical module, or find another gauge with low/high set points