Difference between revisions of "Technics PE II"
(→McMaster) (Tag: Visual edit) |
(Tag: Visual edit) |
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| Line 31: | Line 31: | ||
Pressure gauge: | Pressure gauge: | ||
| − | * PS/DVM | + | *PS/DVM |
| − | * PDR-C-1A | + | *PDR-C-1A |
| − | === | + | === Previous === |
| − | + | Summary | |
| − | * Came with bad pressure gauge | + | *Came with bad pressure gauge |
| − | ** Tried to order replacement but seller sent wrong part | + | **Tried to order replacement but seller sent wrong part |
| − | ** Second replacement installed | + | **Second replacement installed |
| − | ** Think it worked? Needs to be checked out | + | **Think it worked? Needs to be checked out |
| − | * Pressure gauge was likely bypassed | + | *Pressure gauge was likely bypassed |
| − | * Missing manifold valve | + | *Missing manifold valve |
| − | ** Replacement ordered but not installed | + | **Replacement ordered but not installed |
| + | ===2020-5-06=== | ||
| − | + | Summary: | |
| − | * Clear area around it | + | *Clear area around it |
| − | ** Put Ron back up | + | **Put Ron back up |
| − | * Order lazy susan | + | *Order lazy susan |
| + | *Vacuum gauge controller is bad | ||
| + | **Modified and in bad state: repairs may be difficult | ||
| + | **Looking to source identical replacement or something new entirely | ||
Vacuum gauge | Vacuum gauge | ||
| − | * Rewired with colored wires + better connections | + | *Rewired with colored wires + better connections |
| − | * Still reading bad | + | *Still reading bad |
| − | ** Negative reading (switch center) | + | **Negative reading (switch center) |
| − | ** Low setpoint can be set (switch left) | + | **Low setpoint can be set (switch left) |
| − | ** High setpoint can not be set (switch right). Shows same negative value as center | + | **High setpoint can not be set (switch right). Shows same negative value as center |
| − | * Opened gauge | + | *Opened gauge |
| − | ** Loose/missing cover screws | + | **Loose/missing cover screws |
| − | ** Several wires have been desoldered | + | **Several wires have been desoldered |
| − | ** Diode is hanging loose | + | **Diode is hanging loose |
| − | ** Bad state. Probably not worth further troubleshooting | + | **Bad state. Probably not worth further troubleshooting |
| − | ** Try to source replacement identical module, or find another gauge with low/high set points | + | **Try to source replacement identical module, or find another gauge with low/high set points |
<br /> | <br /> | ||
Revision as of 05:09, 7 May 2020
A popular unit. A number of people have this or similar including:
- John McMaster
- Markus
- Sam Z
Specifications:
- Parallel plate 15" chamber
- Microprocessor controller
- 11" electrode
- Power?
- 500 Watt @ 30Khz
- Other source says 300W @ 13.56 MHz
- Three gas system
- Wafers
- 4 4"
- One 5-8"
- Weight
- System: 120 lb
- Module: 30 lb
- Pump (which?): 100 lb
https://www.chiphistory.org/274-technics-pe-ii-a-planar-etcher
McMaster
Pressure gauge:
- PS/DVM
- PDR-C-1A
Previous
Summary
- Came with bad pressure gauge
- Tried to order replacement but seller sent wrong part
- Second replacement installed
- Think it worked? Needs to be checked out
- Pressure gauge was likely bypassed
- Missing manifold valve
- Replacement ordered but not installed
2020-5-06
Summary:
- Clear area around it
- Put Ron back up
- Order lazy susan
- Vacuum gauge controller is bad
- Modified and in bad state: repairs may be difficult
- Looking to source identical replacement or something new entirely
Vacuum gauge
- Rewired with colored wires + better connections
- Still reading bad
- Negative reading (switch center)
- Low setpoint can be set (switch left)
- High setpoint can not be set (switch right). Shows same negative value as center
- Opened gauge
- Loose/missing cover screws
- Several wires have been desoldered
- Diode is hanging loose
- Bad state. Probably not worth further troubleshooting
- Try to source replacement identical module, or find another gauge with low/high set points
