Difference between revisions of "Technics PE II"
(Tag: Visual edit) |
(→McMaster) (Tag: Visual edit) |
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A popular unit. A number of people have this or similar including: | A popular unit. A number of people have this or similar including: | ||
| − | * John McMaster | + | *John McMaster |
| − | * Markus | + | *Markus |
| − | * Sam Z | + | *Sam Z |
Specifications: | Specifications: | ||
| − | * Parallel plate 15" chamber | + | *Parallel plate 15" chamber |
| − | * Microprocessor controller | + | *Microprocessor controller |
| − | * 11" electrode | + | *11" electrode |
| − | * Power? | + | *Power? |
| − | * 500 Watt @ 30Khz | + | *500 Watt @ 30Khz |
| − | ** Other source says 300W @ 13.56 MHz | + | **Other source says 300W @ 13.56 MHz |
| − | * Three gas system | + | *Three gas system |
| − | * Wafers | + | *Wafers |
| − | ** 4 4" | + | **4 4" |
| − | ** One 5-8" | + | **One 5-8" |
| − | * Weight | + | *Weight |
| − | ** System: 120 lb | + | **System: 120 lb |
| − | ** Module: 30 lb | + | **Module: 30 lb |
| − | ** Pump (which?): 100 lb | + | **Pump (which?): 100 lb |
| Line 28: | Line 28: | ||
<br /> | <br /> | ||
| − | == McMaster == | + | ==McMaster== |
| + | Pressure gauge: | ||
| + | |||
| + | * PS/DVM | ||
| + | * PDR-C-1A | ||
| + | |||
| + | === 2020-5-06 === | ||
| + | Resuming repair effort. The story so far: | ||
| + | |||
| + | * Came with bad pressure gauge | ||
| + | ** Tried to order replacement but seller sent wrong part | ||
| + | ** Second replacement installed | ||
| + | ** Think it worked? Needs to be checked out | ||
| + | * Pressure gauge was likely bypassed | ||
| + | * Missing manifold valve | ||
| + | ** Replacement ordered but not installed | ||
| + | |||
| + | |||
| + | Today: | ||
| + | |||
| + | * Clear area around it | ||
| + | ** Put Ron back up | ||
| + | * Order lazy susan | ||
| + | |||
| + | |||
| + | Vacuum gauge | ||
| + | |||
| + | * Rewired with colored wires + better connections | ||
| + | * Still reading bad | ||
| + | ** Negative reading (switch center) | ||
| + | ** Low setpoint can be set (switch left) | ||
| + | ** High setpoint can not be set (switch right). Shows same negative value as center | ||
| + | * Opened gauge | ||
| + | ** Loose/missing cover screws | ||
| + | ** Several wires have been desoldered | ||
| + | ** Diode is hanging loose | ||
| + | ** Bad state. Probably not worth further troubleshooting | ||
| + | ** Try to source replacement identical module, or find another gauge with low/high set points | ||
| + | |||
| + | <br /> | ||
Revision as of 05:06, 7 May 2020
A popular unit. A number of people have this or similar including:
- John McMaster
- Markus
- Sam Z
Specifications:
- Parallel plate 15" chamber
- Microprocessor controller
- 11" electrode
- Power?
- 500 Watt @ 30Khz
- Other source says 300W @ 13.56 MHz
- Three gas system
- Wafers
- 4 4"
- One 5-8"
- Weight
- System: 120 lb
- Module: 30 lb
- Pump (which?): 100 lb
https://www.chiphistory.org/274-technics-pe-ii-a-planar-etcher
McMaster
Pressure gauge:
- PS/DVM
- PDR-C-1A
2020-5-06
Resuming repair effort. The story so far:
- Came with bad pressure gauge
- Tried to order replacement but seller sent wrong part
- Second replacement installed
- Think it worked? Needs to be checked out
- Pressure gauge was likely bypassed
- Missing manifold valve
- Replacement ordered but not installed
Today:
- Clear area around it
- Put Ron back up
- Order lazy susan
Vacuum gauge
- Rewired with colored wires + better connections
- Still reading bad
- Negative reading (switch center)
- Low setpoint can be set (switch left)
- High setpoint can not be set (switch right). Shows same negative value as center
- Opened gauge
- Loose/missing cover screws
- Several wires have been desoldered
- Diode is hanging loose
- Bad state. Probably not worth further troubleshooting
- Try to source replacement identical module, or find another gauge with low/high set points
