Difference between revisions of "Technics PE II"
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| − | McMaster | + | A popular unit. A number of people have this or similar including: |
| + | |||
| + | * John McMaster | ||
| + | * Markus | ||
| + | * Sam Z | ||
| + | |||
| + | |||
| + | Specifications: | ||
| + | |||
| + | * Parallel plate 15" chamber | ||
| + | * Microprocessor controller | ||
| + | * 11" electrode | ||
| + | * Power? | ||
| + | * 500 Watt @ 30Khz | ||
| + | ** Other source says 300W @ 13.56 MHz | ||
| + | * Three gas system | ||
| + | * Wafers | ||
| + | ** 4 4" | ||
| + | ** One 5-8" | ||
| + | * Weight | ||
| + | ** System: 120 lb | ||
| + | ** Module: 30 lb | ||
| + | ** Pump (which?): 100 lb | ||
| + | |||
| + | |||
| + | <nowiki>https://www.chiphistory.org/274-technics-pe-ii-a-planar-etcher</nowiki> | ||
| + | |||
| + | <br /> | ||
| + | |||
| + | == McMaster == | ||
Revision as of 02:43, 7 May 2020
A popular unit. A number of people have this or similar including:
- John McMaster
- Markus
- Sam Z
Specifications:
- Parallel plate 15" chamber
- Microprocessor controller
- 11" electrode
- Power?
- 500 Watt @ 30Khz
- Other source says 300W @ 13.56 MHz
- Three gas system
- Wafers
- 4 4"
- One 5-8"
- Weight
- System: 120 lb
- Module: 30 lb
- Pump (which?): 100 lb
https://www.chiphistory.org/274-technics-pe-ii-a-planar-etcher
