Technics Hummer

From Microwiki
Jump to: navigation, search

Now Anatech

BK intro to sputter coaters: [1]

Suggested procedure: [2]

Claims to have a manual: [3]

  • "The manufacturer was purchased by Anatech USA and they still support this product. "
  • Requesting it

Hummer I

Hummer II

Mcmaster technics hummer ii hummer1.jpg

Mcmaster technics hummer ii hummer2.jpg

JM unit: advert called it "Hummer II Sputter Coater for Au" although it doesn't actually say that anywhere on the machine

Have a bunch of internal photos. Will add them + better pictures once I finish overhauling it.

TODO:

  • Fix ATM switch
    • Stuck closed
  • Panel: clean
  • Panel: fix handle / order screw(s)
    • Replace with SHCS?
    • Thread size?
  • Panel: fill out all screws
    • Replace with SHCS?
    • Thread size?
  • Pump: slowly leaking oil?
  • Pump: oil mist filter
    • Where does it go? Thread?
  • HV: fix negative lead. Currently alligator clipped
  • TC: replace sensor
    • Rusted
    • Key is broken
    • Seems to work though

DONE

  • Demonstrate plasma. System seems to more or less work
  • General cleaning
  • Pump: oil was low but now halfway on window
  • Pump: window dirty. Tried to clean but not much success. Probably okay as is

General notes:

  • TC sensor: Teledyne DV-23. Orange base
  • Pump: Sargent Welch 8810


Hummer III

Hummer IV

Hummer V

Ps1 technics ps1.jpg

Source]]


Hummer 6

manual]]

Sitekprocess hummervi 0.jpg

Source]: "Technics Hummer VI Sputtering System"]

Rit hummer6 it sputter1.jpg

Source] Like above but its switched from being Technics to Anatech branded]

Anatechusa hummer6.2 0.jpg

Source]: "Hummer 6.2 Sputter System - SEM Sample Preparation"]

Anatechusa hummer6.6 0.jpg

Source]: "Hummer 6.6 Sputter System - SEM Sample Preparation"]

Capovani hummer6.6t 0.jpg Capovani hummer6.6t 2.jpg

Source]: "ANATECH HUMMER 6.6T SPUTTER SYSTEM"]


Hummer 7

Website skips from 7 to 8. Never produced?

Notes from someone: HUMMER VII NOTES DISPLAY PCB LED Short Lead to square Pad, Long Lead to Round Pad MAIN PCB CONNECTIONS J7 Pin 1 Common Red Pin 2 Current Monitor Green Pin 3 No Connection Pin 4 No Connection Pin 5 Relay Yellow Pin 6 Relay Brown Pin 7 Safety Interlock Black Pin 8 Current Program Orange J8 Pin 1 Analog Common Yellow Pin 2 No Connection Pin 3 No Connection Pin 4 No Connection Pin 5 Logic Common Black Pin 6 -12v Pin 7 +5v Red Pin 8 +12v Green J9 Pin 1 Pressure Switch Blue Pin 2 Pressure Switch Blue Pin 3 No Connection J5 Pin 1 Two Way Gas Solenoid White Pin 2 Two Way Gas Solenoid White Blue Pin 3 3-Way Vent Solenoid White Pin 4 3-Way Vent Solenoid White Connector J4 Pin 1 Pump Relay Green Pin 2 Pump Relay Yellow Pin 3 + Meter Red Pin 4 - Meter BlackON RELAY PCB J4 Pin 1 + Meter Red Pin 2 - Meter Black Pin 3 Pump Relay Green Pin 4 Pump Relay Yellow

Hummer 8

Anatechusa hummer8.0 0.jpg

Source]: "Hummer 8.0 Sputter System - SEM Sample Preparation"]


Hummer X

Wotol hummerx 0.jpg

Source]: "HUMMER X, Cold Deposition/Etch Sputter Coater"]


Hummer XP

Bsdservice hummerxp 0.jpg

Source]: "Anatech Hummer XP"]


mcmaster Hummer IV

Got from craigslist a while back, including gold source. A little dirty, but worked fine. Cleaned up front panel best I could

2018-08-07:

  • Pedestal does not stay tight and can be easily moved up and down when tightented
  • Threads had eroded on pedestal clamp. I tried to shore them up with PTFE tape, but maybe not enough
  • Ordered "PARKER P8MC6 Connector, Poly, CompxM, 1/2Inx3/8In" to replace it
    • Looks like want P8MC8

2018-08-08:

  • Chamber glass
    • 5" OD
    • 4.5" ID
    • 0.25" thick
    • 6" tall
  • Chamber seals
    • PORTER SEAL COMPANY-DALLAS
    • L shaped
    • 1/2" tall
    • 3/8" wide
    • ~0.073" thick
    • Bell jar L gasket

2018-08-20

  • Install banana plug to ground pedestal
  • Order cap to attach to pedestal
    • Shaft is about 0.37"
    • Something like: [4]
  • Install metal backing plate into TITE connector
    • Much stiffer now
    • Scratching post a little...don't move it
    • Didn't grease o-ring or post. Maybe should have?
  • Was able to sputter coat a sample!
    • First time in several years


mcmaster Hummer VI

Got from industrial auction

2018-08-07:

  • Glass chamber + seals not present
  • No source installed
  • Vacuum pump
    • Model: Trivac D1, 6B
    • Low on oil
    • Remaining oil is clear
    • Put Agilent oil in
    • Black feet at bottom have degraded
    • Black feet stick outside of case...I guess to better isolate the pump from the chamber?
    • TODO: replace feet
    • KF16 inlet and outlet
  • Cleaned up inside unit
    • Oil, degraded pump feet
  • Front panel
    • Cleaned. Lots of black stuff on it
    • Not holding a vacuum. Pressure gauge does not move
    • MODE switch is off center, but otherwise seems to work
    • VAC PUMP switch is not present
  • Its unclear how to properly vent the unit
  • Rear assembly
    • Chamber => electric solenoid => leak valve => cut green tube
    • Rubber hinge w/ chamber top snapped
  • Hummer IV chamber fits, but is probably too tall and slightly too wide
  • Back cover comes off easily
    • Generally much easier to work on this unit than the IV

2018-08-08:

  • Found large gouge on cap
    • Filed down followed by 220, 1500 grit sandpaper
    • Pump ran for a few minutes and reached 50 mTorr
    • Switched to IV pedestal
    • After pumping for 15 minutes reached nearly 20 mTorr
    • Conclusion
    • Pump is good
    • Vacuum tight, including the rear assembly
    • Both pedestals seem fine. Evidence points towards replacing TITE assembly on IV
    • TODO
    • Size / order chamber, seals
    • Investigate leaking chamber
  • Mode tests
    • All three modes seem to roughly work
    • Plate D/C: very slight discharge at top. Suspect plate is too far away
    • Etch D/C: padastel sparkles (reverse polarity?)
    • Plasma Exc: mix of both of above (AC?)
  • Chamber glass diameter estimate
    • Lower platform lip
    • IV: recessed, 3.8 ID, 5.4 OD
    • VI: edge, 3.9 ID, 4.9 OD
    • Upper
    • VI: recessed, 4.9 OD
    • VI: edge, 5.4 OD
    • VI pedestal: 3.75" OD
    • eBay pictures show a chamber not overhanging
    • IV is 4.5" ID, could shrink down 0.5" probably from 5.0" => 4.5" OD
    • But 5" does seem to work and would keep parts compatible. Maybe easier to find
  • Chamber glass height estimate
    • 2.3" gap
    • Current chamber 6", 3.75" is probably right for this one
  • Chamber glass summary
    • Diameter: 4.5 - 5.0" OD
    • Height: 3.5 - 4.0"
    • Width: 0.25"
  • Chamber candidates
    • [5]
    • $67 for 1' of 5" acrylic
  • Finding replacement seal
    • Ideally want chamber + seals together
    • [6]
    • Called. Min run 250 pieces
    • [7]
    • Smallest 7"
    • [8]
    • Sent RFQ
    • Same as [9]
    • [10]
    • smallest 12"
    • mcmaster.com
    • can't find anything in the category
    • [11]
    • smallest 7"
    • [12]
    • smallest 6"
    • [13]
    • might have some
    • Called, they will get back to me
    • [14]
    • Think they used to be PORTER SEAL COMPANY-DALLAS
    • Called them and have 5" in stock, about $15 each, $50 min order. Order 3

glass tubing

  • need: Pyrex 237670
    • 127.0mm (5") Pyrex® Glass Heavy Wall Tubing, 2/cs., 29 lbs.
    • Size O.D. (mm): 127
    • Wall (mm): 6.4
    • [15]
  • [16]
    • BH-500C
    • Heavy Wall Corning Pyrex Glass Tubing - 5 ft. lengths
    • 127mm (5 in) O.D. x 6.4mm wall Corning Pyrex Glass Tubing - CASE(3 PCS.) 53 LBS.
    • $310.00
    • Yields 15' => 180", need 4
  • [17]
    • 4-1/4" max
    • Pressure-Rated Borosilicate Glass Tubes
    • can be used as glass bowls in oil dispensers
  • [18]
    • HW237670
    • $239

Custom glass quotes

  • [19]
    • "1 to 2 ea #STG-2376570-95 Clear Pyrex glass cylinders, 5" O.D. x .25" wall thickness x 3.75" long. both ends open, cut straight, flat, parallel, fire polished and furnace annealed @ $120.00 ea, can ship 2 to 3 days ARO"
  • stemmerich.com
    • $29 each
    • 3 wk LT
  • [20]
    • Pending


2018-08-09

  • Gasket order placed w/ elderrubber
    • MOQ $50, gaskets about $16 each, ordered 3
    • In stock
  • Glass order placed w/ stemmerich.com
    • $29 each, no MOQ
    • ...actually they called me weeks later and said $70 each
    • Ordered 1
    • 3 wk LT
  • Summary: a lot of sleuthing, but around $100 to fully replace a chamber



mcmaster carbon

2018-08-07:

  • Order replacement chamber seals
    • Original gasket brown (Viton?)
    • Ordered replacement gaskets: mcmaster 9464K175]]
    • Chemical-Resistant Viton Fluoroelastomer O-Ring, 3/16 Fractional Width, Dash Number 346, packs of 2
    • Width: 0.21"
    • ID: 4.100"
    • OD: 4.520"
  • Order carbon rods: Ted Pella 62-118]]
    • PNTD CARBON ROD,1.5MMTIP,PK/10