Technics Hummer

Now Anatech

BK intro to sputter coaters: [1]

Suggested procedure: [2]

Claims to have a manual: [3]

• "The manufacturer was purchased by Anatech USA and they still support this product. "
• Requesting it

Hummer II

JM unit: advert called it "Hummer II Sputter Coater for Au" although it doesn't actually say that anywhere on the machine

Have a bunch of internal photos. Will add them + better pictures once I finish overhauling it.

TODO:

• Fix ATM switch
  • Stuck closed
• Panel: clean
• Panel: fix handle / order screw(s)
  • Replace with SHCS?
  • Thread size?
• Panel: fill out all screws
  • Replace with SHCS?
  • Thread size?
• Pump: slowly leaking oil?
• Pump: oil mist filter
  • Where does it go? Thread?
• HV: fix negative lead. Currently alligator clipped
• TC: replace sensor
  • Rusted
  • Key is broken
  • Seems to work though

DONE

• Demonstrate plasma. System seems to more or less work
• General cleaning
• Pump: oil was low but now halfway on window
• Pump: window dirty. Tried to clean but not much success. Probably okay as is

General notes:

• TC sensor: Teledyne DV-23. Orange base
• Pump: Sargent Welch 8810

Hummer V

Source]]

Hummer 6

manual]]

Source]: "Technics Hummer VI Sputtering System"]

Source] Like above but its switched from being Technics to Anatech branded]

Source]: "Hummer 6.2 Sputter System - SEM Sample Preparation"]

Source]: "Hummer 6.6 Sputter System - SEM Sample Preparation"]

Source]: "ANATECH HUMMER 6.6T SPUTTER SYSTEM"]

Hummer 7

Website skips from 7 to 8. Never produced?

Notes from someone: HUMMER VII NOTES DISPLAY PCB LED Short Lead to square Pad, Long Lead to Round Pad MAIN PCB CONNECTIONS J7 Pin 1 Common Red Pin 2 Current Monitor Green Pin 3 No Connection Pin 4 No Connection Pin 5 Relay Yellow Pin 6 Relay Brown Pin 7 Safety Interlock Black Pin 8 Current Program Orange J8 Pin 1 Analog Common Yellow Pin 2 No Connection Pin 3 No Connection Pin 4 No Connection Pin 5 Logic Common Black Pin 6 -12v Pin 7 +5v Red Pin 8 +12v Green J9 Pin 1 Pressure Switch Blue Pin 2 Pressure Switch Blue Pin 3 No Connection J5 Pin 1 Two Way Gas Solenoid White Pin 2 Two Way Gas Solenoid White Blue Pin 3 3-Way Vent Solenoid White Pin 4 3-Way Vent Solenoid White Connector J4 Pin 1 Pump Relay Green Pin 2 Pump Relay Yellow Pin 3 + Meter Red Pin 4 - Meter BlackON RELAY PCB J4 Pin 1 + Meter Red Pin 2 - Meter Black Pin 3 Pump Relay Green Pin 4 Pump Relay Yellow

Hummer 8

Source]: "Hummer 8.0 Sputter System - SEM Sample Preparation"]

Hummer X

Source]: "HUMMER X, Cold Deposition/Etch Sputter Coater"]

Hummer XP

Source]: "Anatech Hummer XP"]

mcmaster Hummer IV

Got from craigslist a while back, including gold source. A little dirty, but worked fine. Cleaned up front panel best I could

2018-08-07:

• Pedestal does not stay tight and can be easily moved up and down when tightented
• Threads had eroded on pedestal clamp. I tried to shore them up with PTFE tape, but maybe not enough
• Ordered "PARKER P8MC6 Connector, Poly, CompxM, 1/2Inx3/8In" to replace it
  • Looks like want P8MC8

2018-08-08:

• Chamber glass
  • 5" OD
  • 4.5" ID
  • 0.25" thick
  • 6" tall
• Chamber seals
  • PORTER SEAL COMPANY-DALLAS
  • L shaped
  • 1/2" tall
  • 3/8" wide
  • ~0.073" thick
  • Bell jar L gasket

2018-08-20

• Install banana plug to ground pedestal
• Order cap to attach to pedestal
  • Shaft is about 0.37"
  • Something like: [4]
• Install metal backing plate into TITE connector
  • Much stiffer now
  • Scratching post a little...don't move it
  • Didn't grease o-ring or post. Maybe should have?
• Was able to sputter coat a sample!
  • First time in several years

mcmaster Hummer VI

Got from industrial auction

2018-08-07:

• Glass chamber + seals not present
• No source installed
• Vacuum pump
  • Model: Trivac D1, 6B
  • Low on oil
  • Remaining oil is clear
  • Put Agilent oil in
  • Black feet at bottom have degraded
  • Black feet stick outside of case...I guess to better isolate the pump from the chamber?
  • TODO: replace feet
  • KF16 inlet and outlet
• Cleaned up inside unit
  • Oil, degraded pump feet
• Front panel
  • Cleaned. Lots of black stuff on it
  • Not holding a vacuum. Pressure gauge does not move
  • MODE switch is off center, but otherwise seems to work
  • VAC PUMP switch is not present
• Its unclear how to properly vent the unit
• Rear assembly
  • Chamber => electric solenoid => leak valve => cut green tube
  • Rubber hinge w/ chamber top snapped
• Hummer IV chamber fits, but is probably too tall and slightly too wide
• Back cover comes off easily
  • Generally much easier to work on this unit than the IV

2018-08-08:

• Found large gouge on cap
  • Filed down followed by 220, 1500 grit sandpaper
  • Pump ran for a few minutes and reached 50 mTorr
  • Switched to IV pedestal
  • After pumping for 15 minutes reached nearly 20 mTorr
  • Conclusion
  • Pump is good
  • Vacuum tight, including the rear assembly
  • Both pedestals seem fine. Evidence points towards replacing TITE assembly on IV
  • TODO
  • Size / order chamber, seals
  • Investigate leaking chamber
• Mode tests
  • All three modes seem to roughly work
  • Plate D/C: very slight discharge at top. Suspect plate is too far away
  • Etch D/C: padastel sparkles (reverse polarity?)
  • Plasma Exc: mix of both of above (AC?)
• Chamber glass diameter estimate
  • Lower platform lip
  • IV: recessed, 3.8 ID, 5.4 OD
  • VI: edge, 3.9 ID, 4.9 OD
  • Upper
  • VI: recessed, 4.9 OD
  • VI: edge, 5.4 OD
  • VI pedestal: 3.75" OD
  • eBay pictures show a chamber not overhanging
  • IV is 4.5" ID, could shrink down 0.5" probably from 5.0" => 4.5" OD
  • But 5" does seem to work and would keep parts compatible. Maybe easier to find
• Chamber glass height estimate
  • 2.3" gap
  • Current chamber 6", 3.75" is probably right for this one
• Chamber glass summary
  • Diameter: 4.5 - 5.0" OD
  • Height: 3.5 - 4.0"
  • Width: 0.25"
• Chamber candidates
  • [5]
  • $67 for 1' of 5" acrylic
• Finding replacement seal
  • Ideally want chamber + seals together
  • [6]
  • Called. Min run 250 pieces
  • [7]
  • Smallest 7"
  • [8]
  • Sent RFQ
  • Same as [9]
  • [10]
  • smallest 12"
  • mcmaster.com
  • can't find anything in the category
  • [11]
  • smallest 7"
  • [12]
  • smallest 6"
  • [13]
  • might have some
  • Called, they will get back to me
  • [14]
  • Think they used to be PORTER SEAL COMPANY-DALLAS
  • Called them and have 5" in stock, about $15 each, $50 min order. Order 3

glass tubing

• need: Pyrex 237670
  • 127.0mm (5") Pyrex® Glass Heavy Wall Tubing, 2/cs., 29 lbs.
  • Size O.D. (mm): 127
  • Wall (mm): 6.4
  • [15]
• [16]
  • BH-500C
  • Heavy Wall Corning Pyrex Glass Tubing - 5 ft. lengths
  • 127mm (5 in) O.D. x 6.4mm wall Corning Pyrex Glass Tubing - CASE(3 PCS.) 53 LBS.
  • $310.00
  • Yields 15' => 180", need 4
• [17]
  • 4-1/4" max
  • Pressure-Rated Borosilicate Glass Tubes
  • can be used as glass bowls in oil dispensers
• [18]
  • HW237670
  • $239

Custom glass quotes

• [19]
  • "1 to 2 ea #STG-2376570-95 Clear Pyrex glass cylinders, 5" O.D. x .25" wall thickness x 3.75" long. both ends open, cut straight, flat, parallel, fire polished and furnace annealed @ $120.00 ea, can ship 2 to 3 days ARO"
• stemmerich.com
  • $29 each
  • 3 wk LT
• [20]
  • Pending

2018-08-09

• Gasket order placed w/ elderrubber
  • MOQ $50, gaskets about $16 each, ordered 3
  • In stock
• Glass order placed w/ stemmerich.com
  • $29 each, no MOQ
  • ...actually they called me weeks later and said $70 each
  • Ordered 1
  • 3 wk LT
• Summary: a lot of sleuthing, but around $100 to fully replace a chamber

mcmaster carbon

2018-08-07:

• Order replacement chamber seals
  • Original gasket brown (Viton?)
  • Ordered replacement gaskets: mcmaster 9464K175]]
  • Chemical-Resistant Viton Fluoroelastomer O-Ring, 3/16 Fractional Width, Dash Number 346, packs of 2
  • Width: 0.21"
  • ID: 4.100"
  • OD: 4.520"
• Order carbon rods: Ted Pella 62-118]]
  • PNTD CARBON ROD,1.5MMTIP,PK/10