Technics PE II

A popular unit. A number of people have this or similar including:

• John McMaster
• Markus
• Sam Z

Specifications:

• Parallel plate 15" chamber
• Microprocessor controller
• 11" electrode
• Power?
• 500 Watt @ 30Khz
  • Other source says 300W @ 13.56 MHz
• Three gas system
• Wafers
  • 4 4"
  • One 5-8"
• Weight
  • System: 120 lb
  • Module: 30 lb
  • Pump (which?): 100 lb

https://www.chiphistory.org/274-technics-pe-ii-a-planar-etcher

Components:

• MKS PDR-C-1A Baratron pressure gauge
  • Original had an on/off switch, new one does not
  • Doesn't really matter since I always want this on if master power is on
  • Had to be replaced, but kept the original display since its part of the Technics chassis, not the Baratron chassis
  • Recommended setpoints?
• MKS Baratron 222 AHS
  • Blue
  • Compression fitting
  • Range: 10 Torr
• TODO: temp controller
• TODO: timer
• Filters: HOKE 316SS Filter Element, 2-5 microns, No. 2231
• Solenoid: Skinner Electric Valves, black w/ blue logo w/ yellow circle
  • Originally were 2 bore. Missing vent valve, replaced w/ similar 3 bore and plugged top
  • 8-32 screws
  • 120V
• Solenoid bundle connector (solenoid side)
  • Blue Amphenol 7 pin
  • Amphenol 126-198 Miniature Hex Connector Thermoplastic, Solder Cup Terminal
  • Related: EML 7 Pin Extension Cable M7S/ M7P Amphenol 126 Series Compatible! 15ft/ 4.5m
  • Mates to: 7 Pin Male Miniature Hexagonal Panel Connector Plug Lock Hood Cable Clamp 126
  • Related: Reclaimed AMPHENOL 126-192 7 pin Female Socket! 126 Series/ WPI
    • Doesn't have lock
  • 126-198 - Circular Connector, BCE Key, 126 Series, Panel Mount Receptacle, 7 Contacts, Steel Body

Solenoids

• Pins AD
  • Gas 1
  • 358 ohm
• Pins CF
  • Vent
  • 355 ohm
  • Tested via female fencepost connectors soldered to AC cord

Pressure gauge

• Blank at atmosphere
• Proper set points?

McMaster

Pressure gauge:

• PS/DVM
• PDR-C-1A

Previous

Summary

• Came with bad pressure gauge
  • Tried to order replacement but seller sent wrong part
  • Second replacement installed
  • Think it worked? Needs to be checked out
• Pressure gauge was likely bypassed
• Missing manifold valve
  • Replacement ordered but not installed

2020-05-06

Summary:

• Clear area around it
  • Put Ron back up
• Order lazy susan
• Vacuum gauge controller is bad
  • Modified and in bad state: repairs may be difficult
  • Looking to source identical replacement or something new entirely

Vacuum gauge

• Rewired with colored wires + better connections
• Still reading bad
  • Negative reading (switch center)
  • Low setpoint can be set (switch left)
  • High setpoint can not be set (switch right). Shows same negative value as center
• Opened gauge
  • Loose/missing cover screws
  • Several wires have been desoldered
  • Diode is hanging loose
  • Bad state. Probably not worth further troubleshooting
  • Try to source replacement identical module, or find another gauge with low/high set points