Difference between revisions of "SEM A-G"
(Tag: Visual edit) |
|||
Line 1: | Line 1: | ||
[[Category:SEM]] | [[Category:SEM]] | ||
− | {| class="wikitable sortable" border=1 | + | {| class="wikitable sortable" border="1" |
− | !Image !!Vendor !!Model !!Year !!kV !!Gun !!Resolution (nm) !!Features | + | !Image!!Vendor!!Model!!Year!!kV!!Gun!!Resolution (nm)!!Features!!Manual!!Schem!!SW!!Notes |
|- | |- | ||
− | | [[File:agilent_8500_overview.jpg|300 px]] <br />[http://www.keysight.com/en/pd-1878801/8500-field-emission-scanning-electron-microscope-fe-sem?nid=-33760.940647&cc=SG&lc=eng Source] | + | |[[File:agilent_8500_overview.jpg|300 px]] <br />[http://www.keysight.com/en/pd-1878801/8500-field-emission-scanning-electron-microscope-fe-sem?nid=-33760.940647&cc=SG&lc=eng Source]||Agilent||8500|| || ||FE|| || || || || ||<br />Tabletop <br /> <br />Keysight? |
|- | |- | ||
− | | | + | | ||Amray||<br />900 <br /> <br />(AMR-900)||1969||30|| ||10|| || || || || |
|- | |- | ||
− | | [[File:cae_amray_1000_1.jpg|300 px]] <br />[http://www.caeonline.com/listing/product/155989/amray-1000 Source] | + | |[[File:cae_amray_1000_1.jpg|300 px]] <br />[http://www.caeonline.com/listing/product/155989/amray-1000 Source]||Amray||1000||197?|| || || || || || || || |
|- | |- | ||
− | | [[File:coxem2010_amray_1000a_3222325533384853814.jpg|300 px]] <br />[http://coxem2010.blog.163.com/blog/static/16510375720105120510147/ Source] | + | |[[File:coxem2010_amray_1000a_3222325533384853814.jpg|300 px]] <br />[http://coxem2010.blog.163.com/blog/static/16510375720105120510147/ Source]||Amray||1000A||197?|| || ||[http://pubs.acs.org/doi/pdf/10.1021/ac00225a856 4]|| || || || || |
|- | |- | ||
− | | [[File:coxem2010_amray_1000b_1276207544423025258.jpg|300 px]] <br />[http://coxem2010.blog.163.com/blog/static/16510375720105120510147/ Source] | + | |[[File:coxem2010_amray_1000b_1276207544423025258.jpg|300 px]] <br />[http://coxem2010.blog.163.com/blog/static/16510375720105120510147/ Source]||Amray||1000B||197?|| ||<br />FE <br /> <br />LaB6|| || || || || || |
|- | |- | ||
− | | | + | | ||Amray||1200B|| || || ||[http://pubs.acs.org/doi/pdf/10.1021/ac00225a856 5]|| || || || || |
|- | |- | ||
− | | | + | | ||Amray||1200C|| || || || || || || || || |
|- | |- | ||
− | | | + | | ||Amray||1400D|| || || || || || || || || |
|- | |- | ||
− | | [[File:coxem2010_amray_1500fe_amray_1500fe.jpg|300 px]] <br />[http://coxem2010.blog.163.com/blog/static/16510375720105120510147/ Source] | + | |[[File:coxem2010_amray_1500fe_amray_1500fe.jpg|300 px]] <br />[http://coxem2010.blog.163.com/blog/static/16510375720105120510147/ Source]||Amray||1500FE||1989|| || || || || || || || |
|- | |- | ||
− | | [[File:ebay_globalmachines_201006248944_1.jpg|300 px]] <br />[[File:ebay_globalmachines_201006248944_5.jpg|300 px]] <br />[http://www.ebay.com/itm/AMRAY-SCANNING-ELECTRON-MICROSCOPE-1600-TURBO-/201006248944 Source] | + | |[[File:ebay_globalmachines_201006248944_1.jpg|300 px]] <br />[[File:ebay_globalmachines_201006248944_5.jpg|300 px]] <br />[http://www.ebay.com/itm/AMRAY-SCANNING-ELECTRON-MICROSCOPE-1600-TURBO-/201006248944 Source]||Amray||1600 Turbo|| || || ||[http://pubs.acs.org/doi/pdf/10.1021/ac00225a856 4]|| || || || || |
|- | |- | ||
− | | [[File:coxem2010_amray_1810_1.jpg|300 px]] <br />[http://coxem2010.blog.163.com/blog/static/16510375720105120510147/ Source] | + | |[[File:coxem2010_amray_1810_1.jpg|300 px]] <br />[http://coxem2010.blog.163.com/blog/static/16510375720105120510147/ Source]||Amray||1810||~1985|| || || || || || || || |
|- | |- | ||
− | | [[File:coxem2010_amray_1820_amray_1820.jpg|300 px]] <br />[http://coxem2010.blog.163.com/blog/static/16510375720105120510147/ Source] | + | |[[File:coxem2010_amray_1820_amray_1820.jpg|300 px]] <br />[http://coxem2010.blog.163.com/blog/static/16510375720105120510147/ Source]||Amray||1820||~1985|| || || || || || || || |
|- | |- | ||
− | | [[File:coxem2010_amray_1830_1.jpg|300 px]] <br />[http://coxem2010.blog.163.com/blog/static/16510375720105120510147/ Source] | + | |[[File:coxem2010_amray_1830_1.jpg|300 px]] <br />[http://coxem2010.blog.163.com/blog/static/16510375720105120510147/ Source]||Amray||1830||~1985|| || ||4 nm @ 30 kV|| || || || || |
|- | |- | ||
− | | | + | | ||Amray||1830D|| || || || || || || || || |
|- | |- | ||
− | | [[File:coxem2010_amray_1840fe_amray_1840fe.jpg|300 px]] <br />[http://coxem2010.blog.163.com/blog/static/16510375720105120510147/ Source] | + | |[[File:coxem2010_amray_1840fe_amray_1840fe.jpg|300 px]] <br />[http://coxem2010.blog.163.com/blog/static/16510375720105120510147/ Source]||Amray||1840FE||~1985|| || || || || || || || |
|- | |- | ||
− | | | + | |[[File:kitmondo_amray_1845fe_1845.jpg|300 px]] <br />[http://www.kitmondo.com/amray-1845-fe/ref242812 Source]||Amray||1845FE|| || || ||4 nm @ 1 kV <br />1.5 nm @ 25 kV|| || || || || |
|- | |- | ||
− | | | + | | ||Amray||1850|| || || || || || || || || |
|- | |- | ||
− | | | + | | ||Amray||1860FE||~1988|| ||TFE||7 nm @ 1 kV <br />1.5 nm @ 25 kV|| || || || || |
|- | |- | ||
− | | | + | | ||Amray||1880FE||~1988||10?|| ||2|| || || || || |
|- | |- | ||
− | | | + | |[[File:kitmondo_amray_1910fe_amray_1910fe.jpg|300 px]] <br />[http://www.kitmondo.com/amray-1910-fe/ref242816 Source]||Amray||1910FE|| || ||FE||7 nm @ 1 kV <br />1.5 nm @ 30 kV|| || || || || |
|- | |- | ||
− | | | + | | ||Amray||2030L|| || || || || || || || || |
|- | |- | ||
− | | | + | | ||Amray||3200|| || || ||6nm @ 30kV (LV) <br />4nm @ 30kV (HV)|| || || || ||4 torr max pressure |
|- | |- | ||
− | | | + | |[[File:kitmondo_amray_3200vp_3200_eco_sem.jpg|300 px]] <br />[http://www.kitmondo.com/amray-3200vp/ref242820 Source]||Amray||3200VP|| || || || || || || || || |
|- | |- | ||
− | | | + | |[[File:kitmondo_amray_3300fe_amray_3300fe.jpg|300 px]] <br />[[ Source]||Amray||3300FE|| || ||FE||5 nm @ 1.5 kV <br />1.5 nm @ 20 kV|| || || || || |
|- | |- | ||
− | | [[File:cae_amray_3800c_1.jpg|300 px]] <br />[http://www.caeonline.com/listing/product/143256/amray-3800c Source] | + | |[[File:cae_amray_3800c_1.jpg|300 px]] <br />[http://www.caeonline.com/listing/product/143256/amray-3800c Source]||Amray||3800C|| || || || || || || || || |
|- | |- | ||
− | | | + | | ||Akashi||Mini-SEM MSM2||1972||15|| || || || || || ||[1970s] |
|- | |- | ||
− | | | + | | ||Akashi||Mini-Rapid-Scan||1973||15?|| || || || || || ||"slightly modified version of the Mini-SEM" [1970s] |
|- | |- | ||
− | | | + | | ||Bausch & Lomb||LE 2100|| || || || || || || || || |
|- | |- | ||
− | | | + | | ||Ben Krasnow||BK-1?|| || || || || || || || || |
|- | |- | ||
− | | | + | | ||Cambridge||S-90|| || || || || || || || || |
|- | |- | ||
− | | | + | | ||Cambridge||S-100|| || || || || || || || || |
|- | |- | ||
− | | | + | | ||Cambridge||S-120|| || || || || || || || || |
|- | |- | ||
− | | | + | | ||Cambridge||S-200|| || || || || || || || || |
|- | |- | ||
− | | | + | | ||Cambridge||S-240|| || || || || || || || || |
|- | |- | ||
− | | | + | | ||Cambridge||S-250|| || || || || || || || || |
|- | |- | ||
− | | | + | | ||Cambridge||S-260|| || || || || || || || || |
|- | |- | ||
− | | | + | |[[File:kitmondo_cambridge_s-360_109cambridges-3_105.jpg|300 px]] <br />[http://www.kitmondo.com/cambridge-s-360-sem/ref284597 Source]||Cambridge||S-360|| || || || || || || || || |
|- | |- | ||
− | | | + | | ||CEMES-LOE/CNRS|| ||1965||3 MeV|| || || || || || ||[1960s] |
|- | |- | ||
− | | | + | | ||Delong Instruments||LVEM5|| || || || || || || || || |
|- | |- | ||
− | | | + | | ||ElectroScan (Phillips)||2020|| || || || || || || || || |
|- | |- | ||
− | | | + | | ||ElectroScan (Phillips)||E30|| || || || || || || || ||"Voltage: 208-220 VAC, 60 Hz, 30 Amps, 1 phase" |
|- | |- | ||
− | | | + | | ||ElectroScan (Phillips)||ESEM E3|| || || || ||ESEM|| || || || |
|- | |- | ||
− | | | + | |[[File:kitmondo_elionix_8900fe_8900fe.jpg|300 px]] <br />[http://www.kitmondo.com/elionix-8900-fe/ref242813 Source]||Elionix||8900FE|| || ||FE||5 nm @ 1 kV <br />1.2 nm @ 30 kV|| || || || || |
|- | |- | ||
− | | | + | | ||FEI||ESEM Explorer||1992|| || || ||ESEM|| || || ||"up to 20 Torr" [1990s] |
|- | |- | ||
− | | | + | | ||FEI||ESEM Model 2020||1994|| || || ||ESEM|| || || ||"50 Torr in the sample chamber" [1990s] |
|- | |- | ||
− | | | + | | ||FEI||Nova NanoSEM 450|| || || || || ||[http://siliconpr0n.org/media/fei/nova_nanosem/online_doc.pdf Yes]|| || || |
|- | |- | ||
− | | | + | | ||FEI||Nova NanoSEM 650|| || || || || ||[http://siliconpr0n.org/media/fei/nova_nanosem/online_doc.pdf Yes]|| || || |
|- | |- | ||
− | | | + | | ||FEI||Quanta 450FEG|| || || || || ||Yes|| || || |
|- | |- | ||
|} | |} |
Revision as of 18:53, 13 February 2019
Image | Vendor | Model | Year | kV | Gun | Resolution (nm) | Features | Manual | Schem | SW | Notes |
---|---|---|---|---|---|---|---|---|---|---|---|
Source |
Agilent | 8500 | FE | Tabletop Keysight? | |||||||
Amray | 900 (AMR-900) |
1969 | 30 | 10 | |||||||
Source |
Amray | 1000 | 197? | ||||||||
Source |
Amray | 1000A | 197? | 4 | |||||||
Source |
Amray | 1000B | 197? | FE LaB6 |
|||||||
Amray | 1200B | 5 | |||||||||
Amray | 1200C | ||||||||||
Amray | 1400D | ||||||||||
Source |
Amray | 1500FE | 1989 | ||||||||
Source |
Amray | 1600 Turbo | 4 | ||||||||
Source |
Amray | 1810 | ~1985 | ||||||||
Source |
Amray | 1820 | ~1985 | ||||||||
Source |
Amray | 1830 | ~1985 | 4 nm @ 30 kV | |||||||
Amray | 1830D | ||||||||||
Source |
Amray | 1840FE | ~1985 | ||||||||
Source |
Amray | 1845FE | 4 nm @ 1 kV 1.5 nm @ 25 kV |
||||||||
Amray | 1850 | ||||||||||
Amray | 1860FE | ~1988 | TFE | 7 nm @ 1 kV 1.5 nm @ 25 kV |
|||||||
Amray | 1880FE | ~1988 | 10? | 2 | |||||||
Source |
Amray | 1910FE | FE | 7 nm @ 1 kV 1.5 nm @ 30 kV |
|||||||
Amray | 2030L | ||||||||||
Amray | 3200 | 6nm @ 30kV (LV) 4nm @ 30kV (HV) |
4 torr max pressure | ||||||||
Source |
Amray | 3200VP | |||||||||
[[ Source] |
Amray | 3300FE | FE | 5 nm @ 1.5 kV 1.5 nm @ 20 kV |
|||||||
Source |
Amray | 3800C | |||||||||
Akashi | Mini-SEM MSM2 | 1972 | 15 | [1970s] | |||||||
Akashi | Mini-Rapid-Scan | 1973 | 15? | "slightly modified version of the Mini-SEM" [1970s] | |||||||
Bausch & Lomb | LE 2100 | ||||||||||
Ben Krasnow | BK-1? | ||||||||||
Cambridge | S-90 | ||||||||||
Cambridge | S-100 | ||||||||||
Cambridge | S-120 | ||||||||||
Cambridge | S-200 | ||||||||||
Cambridge | S-240 | ||||||||||
Cambridge | S-250 | ||||||||||
Cambridge | S-260 | ||||||||||
Source |
Cambridge | S-360 | |||||||||
CEMES-LOE/CNRS | 1965 | 3 MeV | [1960s] | ||||||||
Delong Instruments | LVEM5 | ||||||||||
ElectroScan (Phillips) | 2020 | ||||||||||
ElectroScan (Phillips) | E30 | "Voltage: 208-220 VAC, 60 Hz, 30 Amps, 1 phase" | |||||||||
ElectroScan (Phillips) | ESEM E3 | ESEM | |||||||||
Source |
Elionix | 8900FE | FE | 5 nm @ 1 kV 1.2 nm @ 30 kV |
|||||||
FEI | ESEM Explorer | 1992 | ESEM | "up to 20 Torr" [1990s] | |||||||
FEI | ESEM Model 2020 | 1994 | ESEM | "50 Torr in the sample chamber" [1990s] | |||||||
FEI | Nova NanoSEM 450 | Yes | |||||||||
FEI | Nova NanoSEM 650 | Yes | |||||||||
FEI | Quanta 450FEG | Yes |