Difference between revisions of "Vacuum"

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==Sensor==
 
==Sensor==
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<br />
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{| class="wikitable"
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|+McMaster important sensors
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!
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!Vendor
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!Model
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!Range
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!Notes
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|-
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|[[File:Mks GP-275ConvectronPirani-400w.jpg|none|thumb]][[File:Mks gp275 275600-2-400w.jpg|none|thumb]]Above: marketing images
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<br />
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|Granville Phillips
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|GP275
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|Atm to 1x10-4 Torr
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|Very popular sensor a while back. Good entry level system
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|-
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|[[File:Inficon 1143-BCG450.webp|thumb|Above: marketing image]]
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|Inficon
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|BCG450
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|3.75×10-10 to 1125 Torr
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|McMaster standard "high quality" gauge
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Ex: on SEM
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 +
 +
Triple gauge
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Got some at flea market, then got some more
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Can find them rebranded as "applied materials universal gauge"
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 +
Some versions don't support serial port
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|-
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|[[File:Mks 910P-Display-Family-800w.jpg|none|thumb|Above: marketing image]]
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|MKS
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|901P
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|
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|Serial port. Sometimes integrated LCD screen
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|-
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|[[File:ASAIR AGP3000.jpg|none|thumb|Above: marketing image]]
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|ASAIR
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|AGP3000
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|Atm to 3.8E-4 Torr
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|Sort of like a China MKS 901P
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LCD, RS-485, 0-10V out
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 +
9-28VDC
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2025-03-21: bought 3 for $85.43 each
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5E-2 Pa: +/-50%
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1E-1: +/- 15%
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1.5E4: +/- 0.5%
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|}
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 +
 
McMaster sensor state 2024-07-17
 
McMaster sensor state 2024-07-17
  

Revision as of 17:44, 12 May 2025

Turbo

Pfeiffer TPH/TPU

3D animation

3D animation

Rebuild videos / resources
Vendor Model Link(s) Note
Agilent V81M Link
ALCATEL ATP400C Link
Edwards EXT255 Aggressive repair of totaled pump
Edwards nEXT240 Oil, bearing replacement
Edwards nEXT730/930 Official bearing replacement
Pfeiffer TPH2101 Big boi
Pfeiffer / Balzers TPU050 Hall sensor replacement
Pfeiffer / Balzers Misc short See wiki page / mcmaster notes
Pfeiffer TMU260 Cleaning
Leybold Bearings
Leybold MAG2000CT Link
Leybold Turbovac50 Link
Leybold Turbovac150 Disassembly
Leybold TMP151 Link
Leybold T1600 Link
Varian V200 Link
Misc Pump balancing

Turbo pump oils:

Vendor Model Viscosity Density Vapor Pressure Notes
Apiezon AP303 29 mm²/s @ 40 °C 0.97 g/mL @ 20 °C 3.1E-7 Torr @ 80°C
braycote 815Z 148 mm²/s @ 38°C

45 mm²/s @ 100°C

4E-13 Torr @ 20C

2E-9 Torr @ 100C

DO NOT USE THIS. Only in here for reference


McMaster: not a turbo oil so much as something I used in a pinch that I had laying around

Viscosity is way too high


"mixture of small PTFE particles and a perfluorinated polyether liquid"

Cambridge Mills CMP500 8.7 mm2/s @ 130C 0.922 g/mL @ 22C 0.1 mm @ 130C "Hydrocarbon Oil"

A&J: "TL011 is discontinued and Pfeiffer does not offer a replacement for it. You could use CMP500, which is chemically identical."


McMaster: purchased this for my Balzers pumps

Dymavac 500 8.7 mm²/s @ 54 ° C 1E-7 Torr @ 25°C
Leybold HE500 LVO variant required?


98-198-052

98-198-053

98-198-030

Leybold Leybonol

LVO-250

13 mm²/s @ 40 °C

3.5 mm²/s @ 100 °C

925 kg/m3 @ 15C "<0.5 Pa @ 20C" Replaces HE500

Oil type: Synthetic oil (Ester oil with additives)

"Bearing lubricant for turboradial blowers."

TURBOSTREAM

Pfeiffer TL 011 10.5 mm²/s @ 40 °C 0.947 kg/dm3 @ 20 °C No data TPU/TPH official oil


Notes:

  • 1 centistokes =1 millimeter²/second
    • 1 cSt = 1 mm2/s


"IIRC the TCP300 is basically an older equivalent to the TCP121, which can do everything up to a TPU330. TPU510s and TPU180s (for some reason) need the bigger TCP380 or (at least in principle) a TCP310. My experience with the older generation of Pfeiffer controllers (TCP300s and TCP310s) is that they go up in flames."

Sensor


McMaster important sensors
Vendor Model Range Notes
Mks GP-275ConvectronPirani-400w.jpg
Mks gp275 275600-2-400w.jpg
Above: marketing images


Granville Phillips GP275 Atm to 1x10-4 Torr Very popular sensor a while back. Good entry level system
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Above: marketing image
 Inficon BCG450 3.75×10-10 to 1125 Torr McMaster standard "high quality" gauge

Ex: on SEM


Triple gauge

Got some at flea market, then got some more

Can find them rebranded as "applied materials universal gauge"

Some versions don't support serial port

Above: marketing image
 MKS 901P Serial port. Sometimes integrated LCD screen
Above: marketing image
 ASAIR AGP3000 Atm to 3.8E-4 Torr Sort of like a China MKS 901P

LCD, RS-485, 0-10V out

9-28VDC

2025-03-21: bought 3 for $85.43 each


5E-2 Pa: +/-50%

1E-1: +/- 15%

1.5E4: +/- 0.5%


McMaster sensor state 2024-07-17

  • Got burned by mismatched GP275 sensor to gauge
    • I thought it was going to give an error like 40%, but its actually a zero point error => massive misreading / order of magnitudes
  • Inficon
    • Found 3x BCG450 at flea market. 1 / 3 work
    • Notes
  • MKS 901P might also go into ecosystem

GP275

GP275 controllers:

  • GP375
    • Green display
    • RS232 as DB9
    • Circa 2009
  • 275106, 275108
    • Red display
    • Cable seems to be uncommon
    • Cable has AC + GP275 connection
  • Granville-Phillips 316 Vacuum Gauge Controller 316001
    • IG controller
    • Integrated power supply, controller
  • HP 59827A
    • Rebranded GP
      • Somewhat similar to Granville-Phillips 316 Vacuum Gauge Controller 316001
    • Half width IG controller (integrated PS / controller)
  • Granville Phillips 307001
    • Full width IG controller (half PS, half controller)
    • RS232 is optional card

GP275 sensor

Can get ones with integrated controllers. You can take the sensor out of them but it doesn't have the keying on the connector

Haven't played with DeviceNet, RS485, etc direct control on these

MKS 901P


Hastings HPM-2002

Interesting but tubes are relatively scarce on surplus market

Nice integrated display + sensor pluggable architecture

https://www.youtube.com/watch?v=hrZwKTwS9cs

HASTING INSTRUMENTS VACUUM GAUGE MODEL 760 110-220 VAC 760

TELEDYNE HASTINGS DUAL SENSOR VACUUM GAUGE MODEL HPM-2002-OBE

HVG-2020B

Teledyne Hastings HPM-2002 Digital Dual Vacuum Digital Gauge w/ RS232 Option


McMaster pumping station


Image Vendor Model Turbo/MDP Roughing Condition Notes
Danielson Tribodyn TD-150 5010

Drag pump

2025-05-11

5.6E-6 Torr

2025-04-21: ordered from eBay

Fixed misc issues

Notes


Official oil is X

But used GPL 202

Danielson Tribodyn TD-100/38 Bad roughing pump

Turbo shuts down


3.3E-4 Torr before shut down

2024-07-30: ordered from eBay

Notes

Danielson Broken 2025-05: buy parts unit from Peter

Might have enough parts to fix both

Alcatel Drytel 31 MDP5011

Drag pump

XXX Torr


Spec

8.3E-7 Torr

2025-09-17: ordered from eBay

Fixed misc issues


Can probably salvage one drag pump


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