Difference between revisions of "Technics PE II"
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| Line 54: | Line 54: | ||
Solenoids | Solenoids | ||
| − | * Pins AD | + | *Pins AD |
| − | ** Gas 1 | + | **Gas 1 |
| − | ** 358 ohm | + | **358 ohm |
| − | * Pins CF | + | *Pins CF |
| − | ** Vent | + | **Vent |
| − | ** 355 ohm | + | **355 ohm |
| − | ** Tested via female fencepost connectors soldered to AC cord | + | **Tested via female fencepost connectors soldered to AC cord |
| + | |||
| + | |||
| + | Pressure gauge | ||
| + | |||
| + | * Blank at atmosphere | ||
| + | * Proper set points? | ||
==McMaster== | ==McMaster== | ||
Revision as of 03:16, 21 May 2020
A popular unit. A number of people have this or similar including:
- John McMaster
- Markus
- Sam Z
Specifications:
- Parallel plate 15" chamber
- Microprocessor controller
- 11" electrode
- Power?
- 500 Watt @ 30Khz
- Other source says 300W @ 13.56 MHz
- Three gas system
- Wafers
- 4 4"
- One 5-8"
- Weight
- System: 120 lb
- Module: 30 lb
- Pump (which?): 100 lb
https://www.chiphistory.org/274-technics-pe-ii-a-planar-etcher
Components:
- MKS PDR-C-1A Baratron pressure gauge
- Original had an on/off switch, new one does not
- Doesn't really matter since I always want this on if master power is on
- Had to be replaced, but kept the original display since its part of the Technics chassis, not the Baratron chassis
- Recommended setpoints?
- MKS Baratron sensor (which?)
- TODO: temp controller
- TODO: timer
- Filters: HOKE 316SS Filter Element, 2-5 microns, No. 2231
- Solenoid: Skinner Electric Valves, black w/ blue logo w/ yellow circle
- Originally were 2 bore. Missing vent valve, replaced w/ similar 3 bore and plugged top
- 8-32 screws
- 120V
- Solenoid bundle connector (solenoid side)
- Blue Amphenol 7 pin
- Amphenol 126-198 Miniature Hex Connector Thermoplastic, Solder Cup Terminal
- Related: EML 7 Pin Extension Cable M7S/ M7P Amphenol 126 Series Compatible! 15ft/ 4.5m
- Mates to: 7 Pin Male Miniature Hexagonal Panel Connector Plug Lock Hood Cable Clamp 126
- Related: Reclaimed AMPHENOL 126-192 7 pin Female Socket! 126 Series/ WPI
- Doesn't have lock
- 126-198 - Circular Connector, BCE Key, 126 Series, Panel Mount Receptacle, 7 Contacts, Steel Body
Solenoids
- Pins AD
- Gas 1
- 358 ohm
- Pins CF
- Vent
- 355 ohm
- Tested via female fencepost connectors soldered to AC cord
Pressure gauge
- Blank at atmosphere
- Proper set points?
McMaster
Pressure gauge:
- PS/DVM
- PDR-C-1A
Previous
Summary
- Came with bad pressure gauge
- Tried to order replacement but seller sent wrong part
- Second replacement installed
- Think it worked? Needs to be checked out
- Pressure gauge was likely bypassed
- Missing manifold valve
- Replacement ordered but not installed
2020-05-06
Summary:
- Clear area around it
- Put Ron back up
- Order lazy susan
- Vacuum gauge controller is bad
- Modified and in bad state: repairs may be difficult
- Looking to source identical replacement or something new entirely
Vacuum gauge
- Rewired with colored wires + better connections
- Still reading bad
- Negative reading (switch center)
- Low setpoint can be set (switch left)
- High setpoint can not be set (switch right). Shows same negative value as center
- Opened gauge
- Loose/missing cover screws
- Several wires have been desoldered
- Diode is hanging loose
- Bad state. Probably not worth further troubleshooting
- Try to source replacement identical module, or find another gauge with low/high set points
