Difference between revisions of "Technics PE II"
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*PDR-C-1A | *PDR-C-1A | ||
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Summary | Summary | ||
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**Replacement ordered but not installed | **Replacement ordered but not installed | ||
| − | ===2020- | + | ===2020-05-06=== |
Summary: | Summary: | ||
Revision as of 05:09, 7 May 2020
A popular unit. A number of people have this or similar including:
- John McMaster
- Markus
- Sam Z
Specifications:
- Parallel plate 15" chamber
- Microprocessor controller
- 11" electrode
- Power?
- 500 Watt @ 30Khz
- Other source says 300W @ 13.56 MHz
- Three gas system
- Wafers
- 4 4"
- One 5-8"
- Weight
- System: 120 lb
- Module: 30 lb
- Pump (which?): 100 lb
https://www.chiphistory.org/274-technics-pe-ii-a-planar-etcher
McMaster
Pressure gauge:
- PS/DVM
- PDR-C-1A
Previous
Summary
- Came with bad pressure gauge
- Tried to order replacement but seller sent wrong part
- Second replacement installed
- Think it worked? Needs to be checked out
- Pressure gauge was likely bypassed
- Missing manifold valve
- Replacement ordered but not installed
2020-05-06
Summary:
- Clear area around it
- Put Ron back up
- Order lazy susan
- Vacuum gauge controller is bad
- Modified and in bad state: repairs may be difficult
- Looking to source identical replacement or something new entirely
Vacuum gauge
- Rewired with colored wires + better connections
- Still reading bad
- Negative reading (switch center)
- Low setpoint can be set (switch left)
- High setpoint can not be set (switch right). Shows same negative value as center
- Opened gauge
- Loose/missing cover screws
- Several wires have been desoldered
- Diode is hanging loose
- Bad state. Probably not worth further troubleshooting
- Try to source replacement identical module, or find another gauge with low/high set points
