Difference between revisions of "SEM P-Z"

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[[Category:SEM]]
 
[[Category:SEM]]
  
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{| class="wikitable sortable" border="1"
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!Image !!Vendor !!Model !!Year !!kV !!Gun !!Resolution (nm) !!Features !!List price !!Ask price !!Manual !!Schem !!SW !!Notes  
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!Image!!Vendor!!Model!!Year!!kV!!Gun!!Resolution (nm)!!Features!!Manual!!Schem!!SW!!Notes
 
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|-
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|   || Phillips || FEG XL 40 ||   ||   ||   ||   || EDAX ||   || [http://www.ebay.com/itm/PHILIPS-FEG-XL-40-SCANNING-ELECTRON-MICROSCOPE-W-EDAX-PV9760-57-/300980801721?pt=LH_DefaultDomain_0&hash=item4613da90b9 100,000]  ||    ||    ||   ||
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| ||Phillips||FEG XL 40|| || || || ||EDAX|| || || ||
 
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|-
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|   || Phillips || 501 || 1977 || 30 ||   || 7 ||   ||   ||   ||   ||    ||    || [1970s]
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| ||Phillips||501||1977||30|| ||7|| || || || ||[1970s]
 
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|-
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|   || Phillips || 501B || 1979 || 30? ||   || 7? || EDS, WDS ||   ||   ||   ||    ||    || [1970s]
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| ||Phillips||501B||1979||30?|| ||7?||EDS, WDS|| || || ||[1970s]
 
|-
 
|-
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|   || Phillips || SEM 505 || 1980 ||   ||   ||   ||   ||   ||   ||   ||    ||    || "new doped-yttrium silicate scintillator for the  detection of backscattered electrons in its 1980 model SEM 505; this new  detector was 200 times more sensitive to backscattered electrons than  previous scintillators" [1980s]
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| ||Phillips||SEM 505||1980|| || || || || || || ||"new doped-yttrium silicate scintillator for the  detection of backscattered electrons in its 1980 model SEM 505; this new  detector was 200 times more sensitive to backscattered electrons than  previous scintillators" [1980s]
 
|-
 
|-
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|   || Phillips || SEM 515 || 1984 ||   ||   ||   ||   ||   ||   ||   ||    ||    || "improved on the 505 by  adding computer-controlled automatic focussing and astigmation correction" [1980s]
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| ||Phillips||SEM 515||1984|| || || || || || || ||"improved on the 505 by  adding computer-controlled automatic focussing and astigmation correction" [1980s]
 
|-
 
|-
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|   || Phillips || SEM 525 EB || 1985 ||   ||   ||   ||   ||   ||   ||   ||    ||    || "created for functional testing of ICs" [1980s]
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| ||Phillips||SEM 525 EB||1985|| || || || || || || ||"created for functional testing of ICs" [1980s]
 
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|-
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|   || Phillips || SEM 525 IC || 1985 ||   ||   ||   ||   ||   ||   ||   ||    ||    || "designed for the non-destructive testing of semiconductor wafers" [1980s]
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| ||Phillips||SEM 525 IC||1985|| || || || || || || ||"designed for the non-destructive testing of semiconductor wafers" [1980s]
 
|-
 
|-
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|   || Phillips || EM 300 accessory || 1968 ||   ||   ||   ||   ||   ||   ||   ||    ||    || "attachment turned the TEM into an STEM" [1960s]
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| ||Phillips||EM 300 accessory||1968|| || || || || || || ||"attachment turned the TEM into an STEM" [1960s]
 
|-
 
|-
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|   || Phillips || PSEM 500 || 1972 || 50 ||   || 10 ||   ||   ||   ||   ||    ||    || "Philips' first SEM" [1970s]
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| ||Phillips||PSEM 500||1972||50|| ||10|| || || || ||"Philips' first SEM" [1970s]
 
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|-
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|   || Phillips || PSEM 500M || 1973 || 50? ||   || 10? ||   ||   ||   ||   ||    ||    || "designed for larger samples, accommodating  specimens with dimensions of 153 mm x 146 mm x 84 mm" [1970s]
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| ||Phillips||PSEM 500M||1973||50?|| ||10?|| || || || ||"designed for larger samples, accommodating  specimens with dimensions of 153 mm x 146 mm x 84 mm" [1970s]
 
|-
 
|-
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| [[File:microscope_sem_dc_phillips_xl40_dc_sem.jpg|300 px]] || Phillips || XL-30 ||   ||   || W || 3.5nm @ 30kV ||   ||   ||   ||   ||    ||    ||
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|[[File:microscope_sem_dc_phillips_xl40_dc_sem.jpg|300 px]]||Phillips||XL-30|| || ||W||3.5nm @ 30kV|| || || || ||
 
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|-
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|   || RCA || EMU-3 ||   ||   ||   ||   ||   ||   || [http://www.ebay.com/itm/RCA-Electron-Microscopes-Vintage-EMU-3-and-EMU-4-/331036772721?pt=LH_DefaultDomain_0&hash=item4d13544971 275,000 for EMU-3/4 (way overpriced?)]  ||    ||    ||   ||
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| ||RCA||EMU-3|| || || || || || || || ||
 
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|-
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|   || RCA || EMU-4 ||   ||   ||   ||   ||   ||   || [http://www.ebay.com/itm/RCA-Electron-Microscopes-Vintage-EMU-3-and-EMU-4-/331036772721?pt=LH_DefaultDomain_0&hash=item4d13544971 275,000 for EMU-3/4 (way overpriced?)]  ||    ||    ||   ||
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| ||RCA||EMU-4|| || || || || || || || ||
 
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|   || SEC || SNE-1500M ||   ||   ||   ||   ||   ||    ||    || [http://siliconpr0n.org/media/sec/sne-1500m/SNE-1500M Manual_eng_042308[1].pdf Yes] ||   ||   || Tabletop ]
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| ||SEC||SNE-1500M|| || || || || ||[http://siliconpr0n.org/media/sec/sne-1500m/SNE-1500M Manual_eng_042308[1].pdf Yes]|| || ||Tabletop ]
 
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|-
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|   || SEC || SNE-3000M ||   ||   ||   ||   ||   ||   ||   ||   ||    ||    || Tabletop
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| ||SEC||SNE-3000M|| || || || || || || || ||Tabletop
 
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|-
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|   || SEC || SNE-3000MB ||   ||   ||   ||   ||   ||   ||   ||   ||    ||    || Tabletop
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| ||SEC||SNE-3000MB|| || || || || || || || ||Tabletop
 
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|-
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|   || SEC || SNE-3200M ||   ||   ||   ||   ||   ||   ||   ||   ||    ||    || Tabletop
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| ||SEC||SNE-3200M|| || || || || || || || ||Tabletop
 
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|-
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|   || SEC || SNE-4500M ||   ||   ||   ||   ||   ||   ||   ||   ||    ||    || Tabletop
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| ||SEC||SNE-4500M|| || || || || || || || ||Tabletop
 
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|-
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|   || Seron || AIS2100C ||   ||   ||   ||   ||   ||   ||   ||   ||    ||    ||
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| ||Seron||AIS2100C|| || || || || || || || ||
 
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|   || Seron || AIS2200 ||   ||   ||   ||   ||   ||   ||   ||   ||    ||    ||
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| ||Seron||AIS2200|| || || || || || || || ||
 
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|-
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|   || Seron || AIS2300C ||   ||   ||   ||   ||   ||   ||   ||   ||    ||    ||
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| ||Seron||AIS2300C|| || || || || || || || ||
 
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|   || Tescan || VEGA3 ||   ||   ||   ||   ||   ||    ||    || [http://siliconpr0n.org/media/tescan/vega3/VEGA_manual_GEN_3_04_tisk.pdf Yes] ||   ||   ||
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| ||Tescan||VEGA3|| || || || || ||[http://siliconpr0n.org/media/tescan/vega3/VEGA_manual_GEN_3_04_tisk.pdf Yes]|| || ||
 
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|-
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|   || Topcon || ABT-32 ||   ||   ||   || [http://ds130.com/ABT-32.htm 5] ||   ||   ||   ||   ||    ||    ||
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| ||Topcon||ABT-32|| || || ||[http://ds130.com/ABT-32.htm 5]|| || || || ||
 
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|   || Topcon || ABT-60 ||   ||   ||   || [http://ds130.com/ABT-60.htm 4] ||   ||   ||   ||   ||    ||    ||
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| ||Topcon||ABT-60|| || || ||[http://ds130.com/ABT-60.htm 4]|| || || || ||
 
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|-
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|   || Topcon || ABT-150 ||   ||   ||   ||   ||   ||   ||   ||   ||    ||    ||
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| ||Topcon||ABT-150|| || || || || || || || ||
 
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|   || Topcon || SM-720 ||   ||   ||   || [http://ds130.com/SM-720.htm 0.9] ||   ||   ||   ||   ||    ||    ||
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| ||Topcon||SM-720|| || || ||[http://ds130.com/SM-720.htm 0.9]|| || || || ||
 
|-
 
|-
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|   || Zeiss || DSM 950 || 1986 || 30kV || W || 10nm (Spec) || "Digital SEM" || ~300k DM in 1987 || [https://debugmo.de/2018/11/my-scanning-electron-microscope/ 4500 EUR]  ||    ||  [http://dsm950.debugmo.de Schematics] (ask @tmbinc for access) ||   || "First Digital SEM" == lots of 74xx with a microcontroller here and there; Very similar to DSM960(A) and DSM940
+
| ||Zeiss||DSM 950||1986||30kV||W||10nm (Spec)||"Digital SEM"|| ||[http://dsm950.debugmo.de Schematics] (ask @tmbinc for access)|| ||"First Digital SEM" == lots of 74xx with a microcontroller here and there; Very similar to DSM960(A) and DSM940
 
|-
 
|-
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|   || Zeiss || DSM 960 ||   ||   ||   ||   ||   ||    || [http://www.ebay.com/itm/ZEISS-SEM-Scanning-Electron-Microscope-Model-DSM-960-Turbo-Pump-/151026866735?pt=LH_DefaultDomain_0& link]  || [http://www.microscopy.ou.edu/manual/zeiss-960.pdf DSM960 Manual] ||   ||   ||
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| ||Zeiss||DSM 960|| || || || || ||[http://www.microscopy.ou.edu/manual/zeiss-960.pdf DSM960 Manual]|| || ||
 
|-
 
|-
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|   || Zeiss || NEON 40 EsB ||   ||   || FE || 2.5 nm @ 1 kV ||   ||   ||   ||   ||    ||    || "Canion FIB column"
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| ||Zeiss||NEON 40 EsB|| || ||FE||2.5 nm @ 1 kV|| || || || ||"Canion FIB column"
 
|-
 
|-
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|   || Zeiss || SIGMA ||   ||   ||   ||   ||   ||    ||    || [http://siliconpr0n.org/media/carl_zeiss/sigma/SEM_manual.pdf Yes] ||   ||   ||
+
| ||Zeiss||SIGMA|| || || || || ||[http://siliconpr0n.org/media/carl_zeiss/sigma/SEM_manual.pdf Yes]|| || ||
 
|-
 
|-
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|   || Zeiss || Supra 55VP ||   ||   || FE ||   <br />1.7 nm @ 1 kV                <br />  <br />2 nm @ 30 kV (VP)   ||    ||    ||   ||   ||   ||   ||
+
| ||Zeiss||Supra 55VP|| || ||FE||<br />1.7 nm @ 1 kV                <br />  <br />2 nm @ 30 kV (VP)|| || || || ||
 
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|}

Revision as of 18:55, 13 February 2019


Image Vendor Model Year kV Gun Resolution (nm) Features Manual Schem SW Notes
Phillips FEG XL 40 EDAX
Phillips 501 1977 30 7 [1970s]
Phillips 501B 1979 30? 7? EDS, WDS [1970s]
Phillips SEM 505 1980 "new doped-yttrium silicate scintillator for the detection of backscattered electrons in its 1980 model SEM 505; this new detector was 200 times more sensitive to backscattered electrons than previous scintillators" [1980s]
Phillips SEM 515 1984 "improved on the 505 by adding computer-controlled automatic focussing and astigmation correction" [1980s]
Phillips SEM 525 EB 1985 "created for functional testing of ICs" [1980s]
Phillips SEM 525 IC 1985 "designed for the non-destructive testing of semiconductor wafers" [1980s]
Phillips EM 300 accessory 1968 "attachment turned the TEM into an STEM" [1960s]
Phillips PSEM 500 1972 50 10 "Philips' first SEM" [1970s]
Phillips PSEM 500M 1973 50? 10? "designed for larger samples, accommodating specimens with dimensions of 153 mm x 146 mm x 84 mm" [1970s]
Microscope sem dc phillips xl40 dc sem.jpg Phillips XL-30 W 3.5nm @ 30kV
RCA EMU-3
RCA EMU-4
SEC SNE-1500M Manual_eng_042308[1.pdf Yes] Tabletop ]
SEC SNE-3000M Tabletop
SEC SNE-3000MB Tabletop
SEC SNE-3200M Tabletop
SEC SNE-4500M Tabletop
Seron AIS2100C
Seron AIS2200
Seron AIS2300C
Tescan VEGA3 Yes
Topcon ABT-32 5
Topcon ABT-60 4
Topcon ABT-150
Topcon SM-720 0.9
Zeiss DSM 950 1986 30kV W 10nm (Spec) "Digital SEM" Schematics (ask @tmbinc for access) "First Digital SEM" == lots of 74xx with a microcontroller here and there; Very similar to DSM960(A) and DSM940
Zeiss DSM 960 DSM960 Manual
Zeiss NEON 40 EsB FE 2.5 nm @ 1 kV "Canion FIB column"
Zeiss SIGMA Yes
Zeiss Supra 55VP FE
1.7 nm @ 1 kV

2 nm @ 30 kV (VP)
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