Difference between revisions of "Technics PE II"

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(McMaster)
Line 1: Line 1:
 
A popular unit. A number of people have this or similar including:
 
A popular unit. A number of people have this or similar including:
  
* John McMaster
+
*John McMaster
* Markus
+
*Markus
* Sam Z
+
*Sam Z
  
  
 
Specifications:
 
Specifications:
  
* Parallel plate 15" chamber
+
*Parallel plate 15" chamber
* Microprocessor controller
+
*Microprocessor controller
* 11" electrode
+
*11" electrode
* Power?
+
*Power?
* 500 Watt @ 30Khz
+
*500 Watt @ 30Khz
** Other source says 300W @ 13.56 MHz
+
**Other source says 300W @ 13.56 MHz
* Three gas system
+
*Three gas system
* Wafers
+
*Wafers
** 4 4"
+
**4 4"
** One 5-8"
+
**One 5-8"
* Weight
+
*Weight
** System: 120 lb
+
**System: 120 lb
** Module: 30 lb
+
**Module: 30 lb
** Pump (which?): 100 lb
+
**Pump (which?): 100 lb
  
  
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<br />
 
<br />
  
== McMaster ==
+
==McMaster==
 +
Pressure gauge:
 +
 
 +
* PS/DVM
 +
* PDR-C-1A
 +
 
 +
=== 2020-5-06 ===
 +
Resuming repair effort. The story so far:
 +
 
 +
* Came with bad pressure gauge
 +
** Tried to order replacement but seller sent wrong part
 +
** Second replacement installed
 +
** Think it worked? Needs to be checked out
 +
* Pressure gauge was likely bypassed
 +
* Missing manifold valve
 +
** Replacement ordered but not installed
 +
 
 +
 
 +
Today:
 +
 
 +
* Clear area around it
 +
** Put Ron back up
 +
* Order lazy susan
 +
 
 +
 
 +
Vacuum gauge
 +
 
 +
* Rewired with colored wires + better connections
 +
* Still reading bad
 +
** Negative reading (switch center)
 +
** Low setpoint can be set (switch left)
 +
** High setpoint can not be set (switch right). Shows same negative value as center
 +
* Opened gauge
 +
** Loose/missing cover screws
 +
** Several wires have been desoldered
 +
** Diode is hanging loose
 +
** Bad state. Probably not worth further troubleshooting
 +
** Try to source replacement identical module, or find another gauge with low/high set points
 +
 
 +
<br />

Revision as of 05:06, 7 May 2020

A popular unit. A number of people have this or similar including:

  • John McMaster
  • Markus
  • Sam Z


Specifications:

  • Parallel plate 15" chamber
  • Microprocessor controller
  • 11" electrode
  • Power?
  • 500 Watt @ 30Khz
    • Other source says 300W @ 13.56 MHz
  • Three gas system
  • Wafers
    • 4 4"
    • One 5-8"
  • Weight
    • System: 120 lb
    • Module: 30 lb
    • Pump (which?): 100 lb


https://www.chiphistory.org/274-technics-pe-ii-a-planar-etcher


McMaster

Pressure gauge:

  • PS/DVM
  • PDR-C-1A

2020-5-06

Resuming repair effort. The story so far:

  • Came with bad pressure gauge
    • Tried to order replacement but seller sent wrong part
    • Second replacement installed
    • Think it worked? Needs to be checked out
  • Pressure gauge was likely bypassed
  • Missing manifold valve
    • Replacement ordered but not installed


Today:

  • Clear area around it
    • Put Ron back up
  • Order lazy susan


Vacuum gauge

  • Rewired with colored wires + better connections
  • Still reading bad
    • Negative reading (switch center)
    • Low setpoint can be set (switch left)
    • High setpoint can not be set (switch right). Shows same negative value as center
  • Opened gauge
    • Loose/missing cover screws
    • Several wires have been desoldered
    • Diode is hanging loose
    • Bad state. Probably not worth further troubleshooting
    • Try to source replacement identical module, or find another gauge with low/high set points