Difference between revisions of "SEM P-Z"
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[[Category:SEM]] | [[Category:SEM]] | ||
− | {| class="wikitable sortable" border=1 | + | {| class="wikitable sortable" border="1" |
− | !Image !!Vendor !!Model !!Year !!kV !!Gun !!Resolution (nm) !!Features | + | !Image!!Vendor!!Model!!Year!!kV!!Gun!!Resolution (nm)!!Features!!Manual!!Schem!!SW!!Notes |
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− | | | + | | ||Phillips||FEG XL 40|| || || || ||EDAX|| || || || |
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− | | | + | | ||Phillips||501||1977||30|| ||7|| || || || ||[1970s] |
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− | | | + | | ||Phillips||501B||1979||30?|| ||7?||EDS, WDS|| || || ||[1970s] |
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− | | | + | | ||Phillips||SEM 505||1980|| || || || || || || ||"new doped-yttrium silicate scintillator for the detection of backscattered electrons in its 1980 model SEM 505; this new detector was 200 times more sensitive to backscattered electrons than previous scintillators" [1980s] |
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− | | | + | | ||Phillips||SEM 515||1984|| || || || || || || ||"improved on the 505 by adding computer-controlled automatic focussing and astigmation correction" [1980s] |
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− | | | + | | ||Phillips||SEM 525 EB||1985|| || || || || || || ||"created for functional testing of ICs" [1980s] |
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− | | | + | | ||Phillips||SEM 525 IC||1985|| || || || || || || ||"designed for the non-destructive testing of semiconductor wafers" [1980s] |
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− | | | + | | ||Phillips||EM 300 accessory||1968|| || || || || || || ||"attachment turned the TEM into an STEM" [1960s] |
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− | | | + | | ||Phillips||PSEM 500||1972||50|| ||10|| || || || ||"Philips' first SEM" [1970s] |
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− | | | + | | ||Phillips||PSEM 500M||1973||50?|| ||10?|| || || || ||"designed for larger samples, accommodating specimens with dimensions of 153 mm x 146 mm x 84 mm" [1970s] |
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− | | [[File:microscope_sem_dc_phillips_xl40_dc_sem.jpg|300 px]] | + | |[[File:microscope_sem_dc_phillips_xl40_dc_sem.jpg|300 px]]||Phillips||XL-30|| || ||W||3.5nm @ 30kV|| || || || || |
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− | | | + | | ||RCA||EMU-3|| || || || || || || || || |
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− | | | + | | ||RCA||EMU-4|| || || || || || || || || |
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− | | | + | | ||SEC||SNE-1500M|| || || || || ||[http://siliconpr0n.org/media/sec/sne-1500m/SNE-1500M Manual_eng_042308[1].pdf Yes]|| || ||Tabletop ] |
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− | | | + | | ||SEC||SNE-3000M|| || || || || || || || ||Tabletop |
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− | | | + | | ||SEC||SNE-3000MB|| || || || || || || || ||Tabletop |
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− | | | + | | ||SEC||SNE-3200M|| || || || || || || || ||Tabletop |
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− | | | + | | ||SEC||SNE-4500M|| || || || || || || || ||Tabletop |
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− | | | + | | ||Seron||AIS2100C|| || || || || || || || || |
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− | | | + | | ||Seron||AIS2200|| || || || || || || || || |
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− | | | + | | ||Seron||AIS2300C|| || || || || || || || || |
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− | | | + | | ||Tescan||VEGA3|| || || || || ||[http://siliconpr0n.org/media/tescan/vega3/VEGA_manual_GEN_3_04_tisk.pdf Yes]|| || || |
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− | | | + | | ||Topcon||ABT-32|| || || ||[http://ds130.com/ABT-32.htm 5]|| || || || || |
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− | | | + | | ||Topcon||ABT-60|| || || ||[http://ds130.com/ABT-60.htm 4]|| || || || || |
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− | | | + | | ||Topcon||ABT-150|| || || || || || || || || |
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− | | | + | | ||Topcon||SM-720|| || || ||[http://ds130.com/SM-720.htm 0.9]|| || || || || |
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− | | | + | | ||Zeiss||DSM 950||1986||30kV||W||10nm (Spec)||"Digital SEM"|| ||[http://dsm950.debugmo.de Schematics] (ask @tmbinc for access)|| ||"First Digital SEM" == lots of 74xx with a microcontroller here and there; Very similar to DSM960(A) and DSM940 |
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− | | | + | | ||Zeiss||DSM 960|| || || || || ||[http://www.microscopy.ou.edu/manual/zeiss-960.pdf DSM960 Manual]|| || || |
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− | | | + | | ||Zeiss||NEON 40 EsB|| || ||FE||2.5 nm @ 1 kV|| || || || ||"Canion FIB column" |
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− | | | + | | ||Zeiss||SIGMA|| || || || || ||[http://siliconpr0n.org/media/carl_zeiss/sigma/SEM_manual.pdf Yes]|| || || |
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− | | | + | | ||Zeiss||Supra 55VP|| || ||FE||<br />1.7 nm @ 1 kV <br /> <br />2 nm @ 30 kV (VP)|| || || || || |
|- | |- | ||
|} | |} |
Revision as of 18:55, 13 February 2019
Image | Vendor | Model | Year | kV | Gun | Resolution (nm) | Features | Manual | Schem | SW | Notes |
---|---|---|---|---|---|---|---|---|---|---|---|
Phillips | FEG XL 40 | EDAX | |||||||||
Phillips | 501 | 1977 | 30 | 7 | [1970s] | ||||||
Phillips | 501B | 1979 | 30? | 7? | EDS, WDS | [1970s] | |||||
Phillips | SEM 505 | 1980 | "new doped-yttrium silicate scintillator for the detection of backscattered electrons in its 1980 model SEM 505; this new detector was 200 times more sensitive to backscattered electrons than previous scintillators" [1980s] | ||||||||
Phillips | SEM 515 | 1984 | "improved on the 505 by adding computer-controlled automatic focussing and astigmation correction" [1980s] | ||||||||
Phillips | SEM 525 EB | 1985 | "created for functional testing of ICs" [1980s] | ||||||||
Phillips | SEM 525 IC | 1985 | "designed for the non-destructive testing of semiconductor wafers" [1980s] | ||||||||
Phillips | EM 300 accessory | 1968 | "attachment turned the TEM into an STEM" [1960s] | ||||||||
Phillips | PSEM 500 | 1972 | 50 | 10 | "Philips' first SEM" [1970s] | ||||||
Phillips | PSEM 500M | 1973 | 50? | 10? | "designed for larger samples, accommodating specimens with dimensions of 153 mm x 146 mm x 84 mm" [1970s] | ||||||
Phillips | XL-30 | W | 3.5nm @ 30kV | ||||||||
RCA | EMU-3 | ||||||||||
RCA | EMU-4 | ||||||||||
SEC | SNE-1500M | Manual_eng_042308[1.pdf Yes] | Tabletop ] | ||||||||
SEC | SNE-3000M | Tabletop | |||||||||
SEC | SNE-3000MB | Tabletop | |||||||||
SEC | SNE-3200M | Tabletop | |||||||||
SEC | SNE-4500M | Tabletop | |||||||||
Seron | AIS2100C | ||||||||||
Seron | AIS2200 | ||||||||||
Seron | AIS2300C | ||||||||||
Tescan | VEGA3 | Yes | |||||||||
Topcon | ABT-32 | 5 | |||||||||
Topcon | ABT-60 | 4 | |||||||||
Topcon | ABT-150 | ||||||||||
Topcon | SM-720 | 0.9 | |||||||||
Zeiss | DSM 950 | 1986 | 30kV | W | 10nm (Spec) | "Digital SEM" | Schematics (ask @tmbinc for access) | "First Digital SEM" == lots of 74xx with a microcontroller here and there; Very similar to DSM960(A) and DSM940 | |||
Zeiss | DSM 960 | DSM960 Manual | |||||||||
Zeiss | NEON 40 EsB | FE | 2.5 nm @ 1 kV | "Canion FIB column" | |||||||
Zeiss | SIGMA | Yes | |||||||||
Zeiss | Supra 55VP | FE | 1.7 nm @ 1 kV 2 nm @ 30 kV (VP) |