Difference between revisions of "SEM H"
(Added service manual link for S-2500) (Tag: Visual edit) |
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| ||Hitachi||S-570|| || || || || || ||[https://microwiki.org/media/hitachi/s-570/S-570%20Schematics.pdf Schematics.pdf Yes]||"As an option the S-570 is available with LaB6 gun for large probe currents and low voltage applications" [http://www.hht-eu.com/cms/4731.html ref] | | ||Hitachi||S-570|| || || || || || ||[https://microwiki.org/media/hitachi/s-570/S-570%20Schematics.pdf Schematics.pdf Yes]||"As an option the S-570 is available with LaB6 gun for large probe currents and low voltage applications" [http://www.hht-eu.com/cms/4731.html ref] | ||
|- | |- | ||
− | | ||Hitachi||S-800|| || || || || || ||[http:// | + | | ||Hitachi||S-800|| || || || || || ||[http://microwiki.org/media/hitachi/s-800/S-800 Schematics Manual.pdf Yes]||[http://www.hht-eu.com/cms/4713.html ref] |
|- | |- | ||
| ||Hitachi||S-806|| || || || || || || || ||"uses a cold field emitter as electron gun" [http://www.hht-eu.com/cms/4719.html ref] | | ||Hitachi||S-806|| || || || || || || || ||"uses a cold field emitter as electron gun" [http://www.hht-eu.com/cms/4719.html ref] | ||
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| ||Hitachi||S-2100|| || || || || || || || || | | ||Hitachi||S-2100|| || || || || || || || || | ||
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− | | ||Hitachi||S-2300|| || || || ||WDX, EDX|| ||[http:// | + | | ||Hitachi||S-2300|| || || || ||WDX, EDX|| ||[http://microwiki.org/media/hitachi/s-2300/S-2300 Schematics Manual.pdf Yes]||[http://www.hht-eu.com/cms/6475.html ref] |
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|[[File:kitmondo_hitachi_s-2400_7ee58f4d-4bef-4cd0-acd2-2b74d6987591.jpg|300 px]] <br />[http://www.kitmondo.com/hitachi-s-2400/ref478043 Source]||Hitachi||S-2400|| || || || || || || || || | |[[File:kitmondo_hitachi_s-2400_7ee58f4d-4bef-4cd0-acd2-2b74d6987591.jpg|300 px]] <br />[http://www.kitmondo.com/hitachi-s-2400/ref478043 Source]||Hitachi||S-2400|| || || || || || || || || | ||
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− | | ||Hitachi||S-2460N|| || || || || || ||[http:// | + | | ||Hitachi||S-2460N|| || || || || || ||[http://microwiki.org/media/hitachi/s-2460n/S-2460N Schematics Manual.pdf Yes]|| || |
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|[[File:Hitachi S-2500 running.jpg|thumb]]||Hitachi||S-2500||1987 | |[[File:Hitachi S-2500 running.jpg|thumb]]||Hitachi||S-2500||1987 | ||
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− | | ||Hitachi||S-2600H|| || || || || || ||[http:// | + | | ||Hitachi||S-2600H|| || || || || || ||[http://microwiki.org/media/hitachi/S-3500NH-S3000NH-S2600NH Schematics Manual.pdf Yes]|| || |
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− | | ||Hitachi||S-2600N|| || || || || || ||[http:// | + | | ||Hitachi||S-2600N|| || || || || || ||[http://microwiki.org/media/hitachi/S-3500NH-S3000NH-S2600NH Schematics Manual.pdf Yes]|| || |
|- | |- | ||
| ||Hitachi||S-2700|| || || || || || || || || | | ||Hitachi||S-2700|| || || || || || || || || | ||
|- | |- | ||
− | | ||Hitachi||S-3000H|| || || ||3nm @ 30kV|| || ||[http:// | + | | ||Hitachi||S-3000H|| || || ||3nm @ 30kV|| || ||[http://microwiki.org/media/hitachi/S-3500NH-S3000NH-S2600NH Schematics Manual.pdf Yes]|| || |
|- | |- | ||
− | |[[File:kitmondo_hitachi_s-3000n_ef3890fa-3989-4aeb-8c2e-4cf59988c489.jpg|300 px]] <br />[http://www.kitmondo.com/hitachi-s-3000n/ref487575 Source]||Hitachi||S-3000N|| || || || || || ||[http:// | + | |[[File:kitmondo_hitachi_s-3000n_ef3890fa-3989-4aeb-8c2e-4cf59988c489.jpg|300 px]] <br />[http://www.kitmondo.com/hitachi-s-3000n/ref487575 Source]||Hitachi||S-3000N|| || || || || || ||[http://microwiki.org/media/hitachi/S-3500NH-S3000NH-S2600NH Schematics Manual.pdf Yes]|| || |
|- | |- | ||
− | | ||Hitachi||S-3200N|| || || || || ||[http:// | + | | ||Hitachi||S-3200N|| || || || || ||[http://microwiki.org/media/hitachi/s-3200n/S3200N.pdf Yes]|| || || |
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− | |[[File:kitmondo_hitachi_s-3200h_hitachi_s-3200h.jpg|300 px]] <br />[http://www.kitmondo.com/hitachi-s-3200h/ref242817 Source]||Hitachi||S-3500H|| || || || || || ||[http:// | + | |[[File:kitmondo_hitachi_s-3200h_hitachi_s-3200h.jpg|300 px]] <br />[http://www.kitmondo.com/hitachi-s-3200h/ref242817 Source]||Hitachi||S-3500H|| || || || || || ||[http://microwiki.org/media/hitachi/S-3500NH-S3000NH-S2600NH Schematics Manual.pdf Yes]|| || |
|- | |- | ||
− | | ||Hitachi||S-3500N|| || || || || || ||[http:// | + | | ||Hitachi||S-3500N|| || || || || || ||[http://microwiki.org/media/hitachi/S-3500NH-S3000NH-S2600NH Schematics Manual.pdf Yes]|| || |
|- | |- | ||
− | | ||Hitachi||S-4000|| || || || || || ||[http:// | + | | ||Hitachi||S-4000|| || || || || || ||[http://microwiki.org/media/hitachi/s-4000/S-4000 Schematics Manual.pdf Yes]|| || |
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| ||Hitachi||S-4100|| || || || || || || || || | | ||Hitachi||S-4100|| || || || || || || || || | ||
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|[[File:kitmondo_hitachi_s-4200_h4200.jpg|300 px]] <br />[http://www.kitmondo.com/hitachi-s-4200/ref242815 Source]||Hitachi||S-4200|| || ||FE||5 nm @ 1 kV <br />1.6 nm @ 15 kV|| || || || || | |[[File:kitmondo_hitachi_s-4200_h4200.jpg|300 px]] <br />[http://www.kitmondo.com/hitachi-s-4200/ref242815 Source]||Hitachi||S-4200|| || ||FE||5 nm @ 1 kV <br />1.6 nm @ 15 kV|| || || || || | ||
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− | |[[File:kitmondo_hitachi_s-4500_109hitachis-4_106.jpg|300 px]] <br />[http://www.kitmondo.com/hitachi-s-4500/ref284598 Source]||Hitachi||S-4500|| || || || || || ||[http:// | + | |[[File:kitmondo_hitachi_s-4500_109hitachis-4_106.jpg|300 px]] <br />[http://www.kitmondo.com/hitachi-s-4500/ref284598 Source]||Hitachi||S-4500|| || || || || || ||[http://microwiki.org/media/hitachi/s-4500/S-4500 Schematics Manual.pdf Yes]|| || |
|- | |- | ||
− | | ||Hitachi||S-4700|| || || || || || ||[http:// | + | | ||Hitachi||S-4700|| || || || || || ||[http://microwiki.org/media/hitachi/s-4700/S-4700 Schematics.pdf Yes]|| || |
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| ||Hitachi||S-4700-II|| || || || || || || || || | | ||Hitachi||S-4700-II|| || || || || || || || || | ||
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− | | ||Hitachi||S-4800|| || || || || ||[http:// | + | | ||Hitachi||S-4800|| || || || || ||[http://microwiki.org/media/hitachi/s-4800/SEM-Hitachi-S-4800-Instruction-Manual.pdf Yes]|| || || |
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− | | ||Hitachi||S-5200|| || || || || || ||[http:// | + | | ||Hitachi||S-5200|| || || || || || ||[http://microwiki.org/media/hitachi/s-5200/S-5200service-schematics.pdf Yes]|| || |
|- | |- | ||
| ||Hitachi||S-6000|| || || || || || || || || | | ||Hitachi||S-6000|| || || || || || || || || | ||
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| ||Hitachi||SU-8040|| || || || || || || || || | | ||Hitachi||SU-8040|| || || || || || || || || | ||
|- | |- | ||
− | | ||Hitachi||TM3000|| || || || || ||[http:// | + | | ||Hitachi||TM3000|| || || || || ||[http://microwiki.org/media/hitachi/tm3000/tm_scopeeg.pdf Yes]|| || || |
|- | |- | ||
| ||Hitachi||XMA-5b||1966|| || || || || || || ||"Hitachi called its 1966 XMA-5b an EPMA with SEM. This was more of an electron probe microanalyzer than an SEM, and was most likely Hitachi's attempt to quickly join in the SEM business" [1960s] | | ||Hitachi||XMA-5b||1966|| || || || || || || ||"Hitachi called its 1966 XMA-5b an EPMA with SEM. This was more of an electron probe microanalyzer than an SEM, and was most likely Hitachi's attempt to quickly join in the SEM business" [1960s] | ||
|- | |- | ||
|} | |} |
Revision as of 19:30, 27 August 2022
Image | Vendor | Model | Year | kV | Gun | Resolution (nm) | Features | Manual | Schem | SW | Notes |
---|---|---|---|---|---|---|---|---|---|---|---|
Hitachi | ? | 1954 | 300 | [1960s] | |||||||
Hitachi | H-1250 | 1976 | 1250 | 0.204 | Successor to HU-3000 [1970s] | ||||||
Hitachi | H-1300S | 1982 | 1300 | " based on ion radiation" [1980s] | |||||||
Hitachi | HFS-2 | 1972 | FE | 3 | "first SEM to use a field emission gun as an electron source" [1970s] | ||||||
Hitachi | HSM-2A | 1971 | 40 | 15 | EDS, WDS | [1970s] | |||||
Hitachi | HU-500 | 1964 | 500 | [1960s] | |||||||
Hitachi | HU-650 | 1968 | 650 | [1960s] | |||||||
Hitachi | HU-1000 | 1969 | 1000 | [1960s] | |||||||
Hitachi | HU-3000 | 1970 | 3000 | 0.46 | "accelerating voltage was the highest ever for an electron microscope" [1970s] | ||||||
Hitachi | S-450 | 1977 | "samples up to 4 inches" [1970s] | ||||||||
Hitachi | S-500 | 1975 | "two 8 inch CRT displays, and featured automatic recording of image data (including magnification, acceleration voltage, and film number) directly on the micrograph" [1970s] ] | ||||||||
Hitachi | S-510 | EDX | ref | ||||||||
Hitachi | S-520 | ||||||||||
Hitachi | S-530 | ||||||||||
Hitachi | S-570 | Schematics.pdf Yes | "As an option the S-570 is available with LaB6 gun for large probe currents and low voltage applications" ref | ||||||||
Hitachi | S-800 | Schematics Manual.pdf Yes | ref | ||||||||
Hitachi | S-806 | "uses a cold field emitter as electron gun" ref | |||||||||
Hitachi | S-806C | ||||||||||
Hitachi | S-2100 | ||||||||||
Hitachi | S-2300 | WDX, EDX | Schematics Manual.pdf Yes | ref | |||||||
Source |
Hitachi | S-2400 | |||||||||
Hitachi | S-2460N | Schematics Manual.pdf Yes | |||||||||
Hitachi | S-2500 | 1987 | 0.5-30 kV | Manual.pdf Yes | See S-570, which is apparently equivalent | ||||||
Hitachi | S-2600H | Schematics Manual.pdf Yes | |||||||||
Hitachi | S-2600N | Schematics Manual.pdf Yes | |||||||||
Hitachi | S-2700 | ||||||||||
Hitachi | S-3000H | 3nm @ 30kV | Schematics Manual.pdf Yes | ||||||||
Source |
Hitachi | S-3000N | Schematics Manual.pdf Yes | ||||||||
Hitachi | S-3200N | Yes | |||||||||
Source |
Hitachi | S-3500H | Schematics Manual.pdf Yes | ||||||||
Hitachi | S-3500N | Schematics Manual.pdf Yes | |||||||||
Hitachi | S-4000 | Schematics Manual.pdf Yes | |||||||||
Hitachi | S-4100 | ||||||||||
Source |
Hitachi | S-4200 | FE | 5 nm @ 1 kV 1.6 nm @ 15 kV |
|||||||
Source |
Hitachi | S-4500 | Schematics Manual.pdf Yes | ||||||||
Hitachi | S-4700 | Schematics.pdf Yes | |||||||||
Hitachi | S-4700-II | ||||||||||
Hitachi | S-4800 | Yes | |||||||||
Hitachi | S-5200 | Yes | |||||||||
Hitachi | S-6000 | ||||||||||
Hitachi | S-6100 | ||||||||||
Hitachi | S-6200 | ||||||||||
Hitachi | S-6280H | ref | |||||||||
Hitachi | S-6600 | ||||||||||
Hitachi | S-6780 | ||||||||||
Hitachi | S-7000 | ||||||||||
Source |
Hitachi | S-7800H | "Critical Dimension (CD)" SEM ] | ||||||||
Source |
Hitachi | S-8840 | |||||||||
Source |
Hitachi | S-9200 | |||||||||
Source |
Hitachi | S-9220 | |||||||||
Hitachi | S-9300 | ref | |||||||||
Hitachi | SU-1500 | ||||||||||
Hitachi | SU-8010 | ||||||||||
Hitachi | SU-8020 | ||||||||||
Hitachi | SU-8030 | ||||||||||
Hitachi | SU-8040 | ||||||||||
Hitachi | TM3000 | Yes | |||||||||
Hitachi | XMA-5b | 1966 | "Hitachi called its 1966 XMA-5b an EPMA with SEM. This was more of an electron probe microanalyzer than an SEM, and was most likely Hitachi's attempt to quickly join in the SEM business" [1960s] |