Difference between revisions of "SEM P-Z"

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(Add some Zeiss Models)
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| ||Zeiss||DSM 950||1986||30kV||W||10nm (Spec)||"Digital SEM"|| ||[http://dsm950.debugmo.de Schematics] (ask @tmbinc for access)|| ||"First Digital SEM" == lots of 74xx with a microcontroller here and there; Very similar to DSM960(A) and DSM940
 
| ||Zeiss||DSM 950||1986||30kV||W||10nm (Spec)||"Digital SEM"|| ||[http://dsm950.debugmo.de Schematics] (ask @tmbinc for access)|| ||"First Digital SEM" == lots of 74xx with a microcontroller here and there; Very similar to DSM960(A) and DSM940
 
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|-
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| ||Zeiss||DSM 960|| || || || || ||[http://www.microscopy.ou.edu/manual/zeiss-960.pdf DSM960 Manual]|| || ||
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|
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|Zeiss
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|DSM 940
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|1988
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|
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|-
 
|-
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| ||Zeiss||NEON 40 EsB|| || ||FE||2.5 nm @ 1 kV|| || || || ||"Canion FIB column"
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| ||Zeiss||DSM 960||1988|| || || || ||[http://www.microscopy.ou.edu/manual/zeiss-960.pdf DSM960 Manual]|| || ||
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|-
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|
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|Zeiss
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|DSM 942
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|1990
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|30
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|-
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|Zeiss
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|DSM 962
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|1990
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|30
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|-
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|Zeiss
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|DSM 940A
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|1990
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|30
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|
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|-
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|Zeiss
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|DSM 962A
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|1990
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|30
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|-
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|
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|Zeiss
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|DSM 982 Gemini
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|1993
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|30
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|FE
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|
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|
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|
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|
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|
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|First combined electrostatic-magnetic Lens SEM
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|-
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|
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|Zeiss
 +
|Supra
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|2002
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|30
 +
|FE
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|
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|
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|
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|
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|
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|
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|-
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|
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|Zeiss
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|Ultra
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|2003
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|30
 +
|FE
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|
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|
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|
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|-
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|
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|Zeiss
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|Ultra Plus
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|2008
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|30
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|FE
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|
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|
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|
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|
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|
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|-
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| ||Zeiss||SIGMA||2009||30||FE|| || ||[http://siliconpr0n.org/media/carl_zeiss/sigma/SEM_manual.pdf Yes]|| || ||
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|-
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|
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|Zeiss
 +
|Sigma HD
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|
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|30
 +
|FE
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|
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|
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|
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|
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|
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|
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|-
 +
|
 +
|Zeiss
 +
|Merlin
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|
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|30
 +
|FE
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|
 +
|
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|
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|
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|
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|
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|-
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|
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|Zeiss
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|Merlin Compact
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|
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|30
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|FE
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|
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|
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|
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|
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|
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|
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|-
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|
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|Zeiss
 +
|Sigma 300
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|
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|30
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|FE
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|
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|
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|
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|
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|
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|-
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|
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|Zeiss
 +
|Sigma 500
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|
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|30
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|FE
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|
 +
|
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|
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|
 +
|
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|
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|-
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|
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|Zeiss
 +
|GeminiSEM 500
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|
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|30
 +
|FE
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|
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|
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|
 +
|
 +
|
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|
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|-
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|
 +
|Zeiss
 +
|GeminiSEM 300
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|
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|30
 +
|FE
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|
 +
|
 +
|
 +
|
 +
|
 +
|
 +
|-
 +
|
 +
|Zeiss
 +
|GeminiSEM 450
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|
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|30
 +
|FE
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|
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|
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|
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|
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|
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|
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|-
 +
|
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|Zeiss
 +
|GeminiSEM 360
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|
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|30
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|FE
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|
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|
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|
 +
|
 +
|
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|
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|-
 +
|
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|Zeiss
 +
|GeminiSEM 460
 +
|
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|30
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|FE
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|
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|
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|
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|
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|
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|-
 +
|
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|Zeiss
 +
|GeminiSEM 560
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|
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|30
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|FE
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|
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|
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|
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|-
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|
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|Zeiss
 +
|EVO
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|2004
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|30
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|W
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|
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|
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|
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|
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|-
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|
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|Zeiss
 +
|EVO HD
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|
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|
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|LaB6
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|
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|
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|
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|
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|
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|
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|-
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|
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|Zeiss
 +
|EVO MA/LS
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|2008
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|30
 +
|W
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|
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|
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|
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|
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|
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|
 
|-
 
|-
−
| ||Zeiss||SIGMA|| || || || || ||[http://siliconpr0n.org/media/carl_zeiss/sigma/SEM_manual.pdf Yes]|| || ||
 
 
|-
 
|-
 
| ||Zeiss||Supra 55VP|| || ||FE||<br />1.7 nm @ 1 kV                <br />  <br />2 nm @ 30 kV (VP)|| || || || ||
 
| ||Zeiss||Supra 55VP|| || ||FE||<br />1.7 nm @ 1 kV                <br />  <br />2 nm @ 30 kV (VP)|| || || || ||
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|-
 
 
|}
 
|}

Revision as of 02:29, 16 March 2021


Image Vendor Model Year kV Gun Resolution (nm) Features Manual Schem SW Notes
Phillips FEG XL 40 EDAX
Phillips 501 1977 30 7 [1970s]
Phillips 501B 1979 30? 7? EDS, WDS [1970s]
Phillips SEM 505 1980 "new doped-yttrium silicate scintillator for the detection of backscattered electrons in its 1980 model SEM 505; this new detector was 200 times more sensitive to backscattered electrons than previous scintillators" [1980s]
Phillips SEM 515 1984 "improved on the 505 by adding computer-controlled automatic focussing and astigmation correction" [1980s]
Phillips SEM 525 EB 1985 "created for functional testing of ICs" [1980s]
Phillips SEM 525 IC 1985 "designed for the non-destructive testing of semiconductor wafers" [1980s]
Phillips EM 300 accessory 1968 "attachment turned the TEM into an STEM" [1960s]
Phillips PSEM 500 1972 50 10 "Philips' first SEM" [1970s]
Phillips PSEM 500M 1973 50? 10? "designed for larger samples, accommodating specimens with dimensions of 153 mm x 146 mm x 84 mm" [1970s]
Microscope sem dc phillips xl40 dc sem.jpg Phillips XL-30 W 3.5nm @ 30kV
RCA EMU-3
RCA EMU-4
SEC SNE-1500M Manual_eng_042308[1.pdf Yes] Tabletop ]
SEC SNE-3000M Tabletop
SEC SNE-3000MB Tabletop
SEC SNE-3200M Tabletop
SEC SNE-4500M Tabletop
Seron AIS2100C
Seron AIS2200
Seron AIS2300C
Tescan VEGA3 Yes
Topcon ABT-32 5
Topcon ABT-60 4
Topcon ABT-150
Topcon SM-720 0.9
Zeiss DSM 950 1986 30kV W 10nm (Spec) "Digital SEM" Schematics (ask @tmbinc for access) "First Digital SEM" == lots of 74xx with a microcontroller here and there; Very similar to DSM960(A) and DSM940
Zeiss DSM 940 1988
Zeiss DSM 960 1988 DSM960 Manual
Zeiss DSM 942 1990 30
Zeiss DSM 962 1990 30
Zeiss DSM 940A 1990 30
Zeiss DSM 962A 1990 30
Zeiss DSM 982 Gemini 1993 30 FE First combined electrostatic-magnetic Lens SEM
Zeiss Supra 2002 30 FE
Zeiss Ultra 2003 30 FE
Zeiss Ultra Plus 2008 30 FE
Zeiss SIGMA 2009 30 FE Yes
Zeiss Sigma HD 30 FE
Zeiss Merlin 30 FE
Zeiss Merlin Compact 30 FE
Zeiss Sigma 300 30 FE
Zeiss Sigma 500 30 FE
Zeiss GeminiSEM 500 30 FE
Zeiss GeminiSEM 300 30 FE
Zeiss GeminiSEM 450 30 FE
Zeiss GeminiSEM 360 30 FE
Zeiss GeminiSEM 460 30 FE
Zeiss GeminiSEM 560 30 FE
Zeiss EVO 2004 30 W
Zeiss EVO HD LaB6
Zeiss EVO MA/LS 2008 30 W
Zeiss Supra 55VP FE
1.7 nm @ 1 kV

2 nm @ 30 kV (VP)
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